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    • 9. 发明申请
    • Oxide films with nanodot flux pinning centers
    • 具有纳多点磁通钉扎中心的氧化膜
    • US20050159298A1
    • 2005-07-21
    • US10758710
    • 2004-01-16
    • Martin RupichThomas KodenkandathWei ZhangXiaoping Li
    • Martin RupichThomas KodenkandathWei ZhangXiaoping Li
    • B01J29/00H01L39/24
    • H01L39/2483H01L39/2425
    • A method for producing a thin film includes disposing a precursor solution onto a substrate to form a precursor film. The precursor solution contains precursor components to a rare-earth/alkaline-earth-metal/transition-metal oxide including a salt of a rare earth element, a salt of an alkaline earth metal, and a salt of a transition metal in one or more solvents, wherein at least one of the salts is a fluoride-containing salt. The precursor solution also contains an additive component comprising one or more metal compounds capable of forming a second phase nanoparticle, either alone or in combination with one or more of the precursor components of the precursor solution or a dopant component comprising one or more metal compounds capable of substituting for an element of the rare-earth/alkaline-earth-metal/transition-metal oxide, and treating the precursor film to form an intermediate metal oxyfluoride including the rare earth, the alkaline earth metal, the transition metal and the additive metal or dopant metal of the precursor solution.
    • 制造薄膜的方法包括将前体溶液设置在基板上以形成前体膜。 前体溶液含有稀土/碱土金属/过渡金属氧化物的前体成分,所述稀土/碱土金属/过渡金属氧化物包括稀土元素的盐,碱土金属的盐和过渡金属的盐在一个或多个 溶剂,其中至少一种盐是含氟化物的盐。 前体溶液还包含添加剂组分,其包含一种或多种能够形成第二相纳米颗粒的金属化合物,单独或与前体溶液的一种或多种前体组分或包含一种或多种金属化合物的掺杂剂组分组合 代替稀土/碱土金属/过渡金属氧化物的元素,并处理前体膜以形成包括稀土,碱土金属,过渡金属和添加金属的中间体金属氟氧化物 或前体溶液的掺杂剂金属。
    • 10. 发明申请
    • DUAL STAGE POSITIONING AND SWITCHING SYSTEM
    • 双级定位和切换系统
    • US20100045961A1
    • 2010-02-25
    • US12444631
    • 2006-12-04
    • Xiaoping LiYingsheng Li
    • Xiaoping LiYingsheng Li
    • G03F7/20H02K41/02
    • G03F7/70758G03F7/70716G03F7/70733
    • The present invention has disclosed a dual stage positioning and switching system, which comprises at least a base, a first object stage positioning unit disposed on the base for a first workstation, and a second object stage positioning unit for a second workstation. Each of the object stage positioning units comprises at least a supporting structure, an X-direction guide bar, a Y-direction guide bar, and a motion positioning detector, wherein, the supporting structure comprises an object stage, and an object stage connector moving relative to the object stage. The object stage positioning unit further comprises a driver connecting to the object stage connector and driving the connector to move along the X-direction guide bar. The X-direction guide bars are positioned on and movable along the Y-direction guide bars. The system further comprises an object stage connector for transitional use during the switching process, which is positioned at the center of the Y-direction guide bar located on one side of the base. The present system does not include a cable stage, so that the structure of the system is simplified.
    • 本发明公开了一种双级定位和切换系统,其至少包括基座,第一物体台定位单元,设置在第一工作站的基座上,第二物位台定位单元包括第二工作站。 每个物体台定位单元至少包括支撑结构,X方向导向杆,Y方向导杆和运动定位检测器,其中,支撑结构包括物体台,物体台连接器移动 相对于物体舞台。 物体台定位单元还包括连接到物体台连接器并驱动连接器沿X方向导杆移动的驱动器。 X方向导杆位于Y方向导杆上并可移动。 该系统还包括在切换过程中用于过渡使用的物体台连接器,其位于位于基座一侧的Y方向导杆的中心。 本系统不包括电缆平台,从而简化了系统的结构。