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1. 发明授权

US06846543B2 Thin film magnetic recording disk with ruthenium-aluminum layer 失效
标题翻译：带钌铝层的薄膜磁记录盘
公开(公告)号：US06846543B2
公开(公告)日：2005-01-25
申请号：US10850735
申请日：2004-05-21
申请人： Xiaoping Bian , Mary Frances Doerner , Jinshan Li , Mohammad Taghi Mirzamaani , Kai Tang
发明人： Xiaoping Bian , Mary Frances Doerner , Jinshan Li , Mohammad Taghi Mirzamaani , Kai Tang
IPC分类号： G11B5/64 , G11B5/73 , G11B5/84 , G11B5/66 , B05D5/12 , B32B3/02 , B32B15/00 , G11B5/70
CPC分类号： G11B5/732 , G11B5/656 , G11B5/7325 , G11B5/8404 , Y10S428/90 , Y10T428/12465 , Y10T428/12861 , Y10T428/265
摘要： A magnetic thin film disk for use in a disk drive with a ruthenium-aluminum (RuAl) seed layer with B2 structure followed by a NiAl layer is described. The disk has reduced noise and increased squareness which results in improved recording performance in a disk drive utilizing the disk. The improved disk is formed by first depositing the RuAl seed layer on the substrate then the NiAl layer is deposited onto the NiAl, followed by the other layers required for a magnetic disk such as an underlayer material with a lattice parameter compatible with RuAl such as Cr-alloy, followed by a standard hcp magnetic material. The RuAl seed layer promotes a [100] preferred orientation in the underlayer which in turn promotes a [11{overscore (2)}0] preferred orientation in the magnetic layer.
摘要翻译：描述了一种用于带有B2结构的钌 - 铝（RuAl）晶种层的磁盘驱动器的磁性薄膜盘片，然后是NiAl层。磁盘具有降低的噪声和增加的矩形度，这导致利用磁盘的磁盘驱动器中的记录性能得到改善。通过首先在衬底上沉积RuAl籽晶层，然后将NiAl层沉积到NiAl上，然后沉积到具有与RuAl相容的晶格参数如Cr的磁盘所需的其它层，形成改进的盘合金，其次是标准的hcp磁性材料。 RuAl种子层促进底层中的优选取向，这进一步促进了磁性层中的[11（超（20））优选取向。

2. 发明授权

US06593009B2 Magnetic thin film media with a pre-seed layer of CrTi 失效
公开(公告)号：US06593009B2
公开(公告)日：2003-07-15
申请号：US09798235
申请日：2001-03-02
申请人： Xiaoping Bian , Mary Frances Doerner , Mohammad Taghi Mirzamaani , Tim Minvielle , Kai Tang
发明人： Xiaoping Bian , Mary Frances Doerner , Mohammad Taghi Mirzamaani , Tim Minvielle , Kai Tang
IPC分类号： G11B566
CPC分类号： B82Y25/00 , G11B5/732 , H01F10/30 , H01F10/32 , Y10S428/90 , Y10T428/12465 , Y10T428/12826 , Y10T428/12847 , Y10T428/12861 , Y10T428/265
摘要： A thin film magnetic media structure comprising a pre-seed layer CrTi is disclosed. The CrTi pre-seed layer presents an amorphous or nanocrystalline structure. The preferred seed layer is RuAl. The use of the CrTi/RuAl bilayer structure provides superior adhesion to the substrate and resistance to scratching, as well as, excellent coercivity and signal-to-noise ratio (SNR) and reduced cost over the prior art.

3. 发明授权

US06852430B2 Magnetic thin film media with a pre-seed layer of CrTi 失效
标题翻译：具有CrTi预种子层的磁性薄膜介质
公开(公告)号：US06852430B2
公开(公告)日：2005-02-08
申请号：US10059780
申请日：2002-01-29
申请人： Xiaoping Bian , Mary Frances Doerner , James A. Hagan , Tim Minvielle , Mohammad Taghi Mirzamaani , Adam Daniel Polcyn , Kai Tang
发明人： Xiaoping Bian , Mary Frances Doerner , James A. Hagan , Tim Minvielle , Mohammad Taghi Mirzamaani , Adam Daniel Polcyn , Kai Tang
IPC分类号： G11B5/73 , H01F10/30 , H01F10/32 , G11B5/66 , G11B5/70
CPC分类号： B82Y25/00 , G11B5/732 , H01F10/30 , H01F10/32 , Y10S428/90 , Y10T428/12472 , Y10T428/12681 , Y10T428/265
摘要： A thin film magnetic media structure with a pre-seed layer of CrTi is disclosed. The CrTi pre-seed layer presents an amorphous or nanocrystalline structure. The preferred seed layer is RuAl for use with the CrTi pre-seed layer. The use of the CrTi/RuAl bilayer structure provides superior adhesion to the substrate and resistance to scratching, as well as, excellent coercivity and signal-to-noise ratio (SNR) and reduced cost over the prior art. One embodiment of the invention sputter-deposits a CrTi pre-seed layer and a RuAl seed layer followed by at least one underlayer and at least one magnetic layer on a circumferentially polished substrate structure to achieve an Mrt orientation ratio greater than one. Two methods according to the invention allow the Mrt orientation ratio of the disk to be adjusted or maximized by varying the thickness of the RuAl seed layer and/or altering the atomic percentage of titanium in the pre-seed layer.
摘要翻译：公开了一种具有CrTi预种子层的薄膜磁介质结构。 CrTi预种子层呈现无定形或纳米晶体结构。优选的种子层是用于CrTi预种子层的RuAl。 CrTi / RuAl双层结构的使用提供了优异的与基板的粘附性和耐划伤性，以及优于现有技术的矫顽力和信噪比（SNR）以及降低的成本。本发明的一个实施方案溅射沉积CrTi预种子层和RuAl种子层，随后是周向抛光的衬底结构上的至少一个底层和至少一个磁性层，以实现大于1的Mrt取向比。根据本发明的两种方法允许通过改变RuAl种子层的厚度和/或改变预种子层中钛的原子百分比来调节或最大化盘的Mrt取向比。

4. 发明授权

US6077586A Laminated thin film disk for longitudinal recording 失效
标题翻译：用于纵向记录的层压薄膜盘
公开(公告)号：US6077586A
公开(公告)日：2000-06-20
申请号：US892724
申请日：1997-07-15
申请人： Xiaoping Bian , Mary Frances Doerner , Mohammad Taghi Mirzamaani
发明人： Xiaoping Bian , Mary Frances Doerner , Mohammad Taghi Mirzamaani
IPC分类号： G11B5/64 , G11B5/65 , G11B5/66 , G11B5/738 , G11B5/84
CPC分类号： G11B5/66 , Y10S428/90 , Y10T428/265
摘要： A thin film disk with laminated magnetic layers, for use in a disk drive, is described which exhibits a single switching behavior resulting in a smooth hysteresis loop. This is achieved by depositing a seed layer prior to depositing the Cr or Cr alloy underlayer. The seed layer material is selected to promote a [112] PO in the underlayer and subsequently a [1010] PO in the two or more laminated magnetic layers. The [1010] PO aids in maintaining minimal Hc variations between the magnetic layers. The seed layer can be a B2 type structure material such as NiAl or FeAl or any other material which results in the [112] PO in the underlayer. The underlayer is preferably Cr or a Cr alloy; the magnetic layers are preferably CoPtCr, CoPtCrTa or CoPtCrB. The spacer layer between the magnetic layers may be made from the same material as the underlayer, but may also be different, e.g. an hexagonal crystalline material such as Ru. The disks of the invention can be manufactured in standard high volume sputtering systems by virtue of the fact the magnetic layers have a reduced dependency on substrate temperature.
摘要翻译：描述了一种用于磁盘驱动器的具有层叠磁性层的薄膜盘，其具有导致平滑磁滞回线的单一切换行为。这是通过在沉积Cr或Cr合金底层之前沉积种子层来实现的。选择种子层材料以促进底层中的[112] PO和随后在两个或更多个层叠磁性层中的[10 + E，ov 1 + EE 0] PO。 [10 + E，ovs 1 + EE 0] PO有助于保持磁层之间的最小Hc变化。种子层可以是B2型结构材料，例如NiAl或FeAl，或其它材料，其导致底层中的PO。底层优选为Cr或Cr合金; 磁性层优选为CoPtCr，CoPtCrTa或CoPtCrB。磁性层之间的间隔层可以由与底层相同的材料制成，但是也可以不同。六方晶结晶材料如Ru。由于磁性层对衬底温度的依赖性降低，本发明的磁盘可以用标准的高体积溅射系统制造。

5. 发明授权

US06572989B2 Thin film magnetic recording disk with a chromium-nickel pre-seed layer 失效
标题翻译：具有铬镍预种子层的薄膜磁记录盘
公开(公告)号：US06572989B2
公开(公告)日：2003-06-03
申请号：US09876571
申请日：2001-06-06
申请人： Xiaoping Bian , Mary Frances Doerner , Tim Minvielle , Mohammad Taghi Mirzamaani , Kai Tang
发明人： Xiaoping Bian , Mary Frances Doerner , Tim Minvielle , Mohammad Taghi Mirzamaani , Kai Tang
IPC分类号： G11B566
CPC分类号： G11B5/732 , G11B5/66 , G11B5/7325 , Y10S428/90 , Y10T428/12465 , Y10T428/12847 , Y10T428/12854 , Y10T428/12944 , Y10T428/24975 , Y10T428/265
摘要： In a thin film magnetic disk, a crystalline CrNi pre-seed layer is sputtered onto a substrate such as glass, followed by a RuAl seed layer. The CrNi pre-seed layer reduces grain size and its distribution, and improves in-plane crystallographic orientation, coercivity (Hc) and SNR. In a preferred embodiment the RuAl seed layer is followed by a Cr alloy underlayer. In a preferred embodiment the Cr alloy underlayer is followed by an onset layer and a magnetic layer, or by two or more magnetic layers antiferromagnetically coupled through one or more spacer layers. The crystalline CrNi pre-seed layer allows use of a thinner RuAl seed layer which results in smaller overall grain size, as well as a reduction in manufacturing cost due to relatively high cost of ruthenium. The CrNi pre-seed layer also allows use of a thinner Cr alloy underlayer which also contributes to reduce overall grain size.
摘要翻译：在薄膜磁盘中，将结晶CrNi预种子层溅射到诸如玻璃的衬底上，随后是RuAl种子层。 CrNi预种子层减小晶粒尺寸及其分布，并提高晶面取向，矫顽力（Hc）和信噪比。在优选的实施方案中，RuAl种子层之后是Cr合金底层。在优选的实施方案中，Cr合金底层之后是起始层和磁性层，或者由两个或更多个通过一个或多个间隔层反铁磁耦合的磁性层。结晶CrNi预种子层允许使用更薄的RuAl种子层，其导致更小的总体晶粒尺寸，以及由于钌的相对高的成本而导致的制造成本的降低。 CrNi预种子层还允许使用更薄的Cr合金底层，这也有助于减小总体晶粒尺寸。

6. 发明授权

US06413608B1 Seed layer and underlayer with high and low oxygen concentration portions for hand disk magnetic recording medium on a glass substrate 失效
标题翻译：在玻璃基板上的手盘磁记录介质的种子层和具有高和低氧浓度部分的底层
公开(公告)号：US06413608B1
公开(公告)日：2002-07-02
申请号：US09336641
申请日：1999-06-18
申请人： Xiaoping Bian , Mary Frances Doerner , Shanlin Duan , Jinshan Li , Mohammad Taghi Mirzamaani
发明人： Xiaoping Bian , Mary Frances Doerner , Shanlin Duan , Jinshan Li , Mohammad Taghi Mirzamaani
IPC分类号： G11B566
CPC分类号： G11B5/732 , C23C14/185 , G11B5/7325 , Y10S428/90 , Y10T428/24942 , Y10T428/265
摘要： The thin film magnetic disk of the present invention includes a non-metallic substrate having a seed layer deposited on the substrate, an underlayer deposited upon the seed layer composed of a chromium alloy having a relatively high oxygen concentration portion of from 2,000 ppm to 20,000 ppm and preferably approximately 4,000 ppm to 12,000 ppm, followed by a relatively low oxygen concentration portion of from 0-2,000 ppm, and preferably from 500 ppm to 1,500 ppm and a magnetic layer that is deposited upon the underlayer. The underlayer total thickness is in the range of from approximately 250 Å to approximately 700 Å with a preferred thickness of approximately 450 Å, wherein approximately half of the underlayer thickness is the high oxygen concentration portion and half is the low oxygen concentration portion.
摘要翻译：本发明的薄膜磁盘包括具有沉积在基板上的种子层的非金属基板，沉积在由具有2000ppm至20,000ppm的较高氧浓度部分的铬合金构成的种子层的底层优选为约4,000ppm〜12,000ppm，其次为相对较低的氧浓度部分为0〜2,000ppm，优选为500ppm〜1500ppm，以及沉积在底层上的磁性层。底层总厚度在约250至约700的范围内，优选的厚度约为450，其中下层厚度的大约一半是高氧浓度部分，一半是低氧浓度部分。

7. 发明授权

US06599642B2 High anisotropy alloy for thin film disk 失效
标题翻译：用于薄膜盘的高各向异性合金
公开(公告)号：US06599642B2
公开(公告)日：2003-07-29
申请号：US09758396
申请日：2001-01-09
申请人： Xiaoping Bian , Mary Frances Doerner , Tim Minvielle , Mohammad Taghi Mirzamaani , Kai Tang
发明人： Xiaoping Bian , Mary Frances Doerner , Tim Minvielle , Mohammad Taghi Mirzamaani , Kai Tang
IPC分类号： G11B565
CPC分类号： G11B5/66 , Y10T428/12465 , Y10T428/12736 , Y10T428/12743 , Y10T428/12757 , Y10T428/12861 , Y10T428/12931 , Y10T428/24967 , Y10T428/265
摘要： The thin film disk includes a pre-seed layer of amorphous or nanocrystalline structure which may be AlTi or Alta, and that is deposited upon a disk substrate. The pre-seed layer is followed by the RuAl seed layer, a Cr alloy underlayer, an onset layer composed essentially of CoCr and a magnetic layer. The magnetic layer is comprised of CoPtxCrBy, wherein x is the at. % concentration of Pt, y is the at. % concentration of boron, and x>4+y.
摘要翻译：薄膜盘包括可以是AlTi或Alta的非晶或纳米晶体结构的种子前层，并且沉积在盘基片上。预种子层之后是RuAl种子层，Cr合金底层，基本上由CoCr和磁性层组成的起始层。磁性层由CoPtxCrBy组成，其中x是at。 Pt的浓度百分比，y为at。％的硼浓度，x> 4 + y。

8. 发明授权

US06596409B2 Onset layer for thin film disk with CoPtCrB alloy 失效
标题翻译： CoPtCrB合金薄膜盘起始层
公开(公告)号：US06596409B2
公开(公告)日：2003-07-22
申请号：US09758690
申请日：2001-01-09
申请人： Xiaoping Bian , Mary Frances Doerner , Tim Minvielle , Mohammad Taghi Mirzamaani , Kai Tang
发明人： Xiaoping Bian , Mary Frances Doerner , Tim Minvielle , Mohammad Taghi Mirzamaani , Kai Tang
IPC分类号： G11B565
CPC分类号： G11B5/66 , Y10T428/12465 , Y10T428/12736 , Y10T428/12743 , Y10T428/12757 , Y10T428/12861 , Y10T428/12931 , Y10T428/24967 , Y10T428/265
摘要： The thin film disk includes a pre-seed layer of amorphous or nanocrystalline structure which may be CrTa or AlTi or AlTa, and that is deposited upon a disk substrate. The pre-seed layer is followed by the RuAl seed layer, a Cr alloy underlayer, an onset layer composed essentially of CoCr and a magnetic layer. The onset layer has an optimal concentration of 28-33 at. % Cr and an optimal thickness of 0.5 to 2.5 nm and it increases coercivity and improves the Signal-to-Noise Ratio (SNR) of the disk.
摘要翻译：薄膜盘包括可以是CrTa或AlTi或AlTa并且沉积在盘基底上的非晶态或纳米晶体结构的种子前层。预种子层之后是RuAl种子层，Cr合金底层，基本上由CoCr和磁性层组成的起始层。起始层的最佳浓度为28-33。％Cr，最佳厚度为0.5〜2.5nm，提高了矫顽力，提高了磁盘的信噪比（SNR）。

9. 发明授权

US6143388A Thin film disk with onset layer 失效
标题翻译：具有起始层的薄膜盘
公开(公告)号：US6143388A
公开(公告)日：2000-11-07
申请号：US976565
申请日：1997-11-24
申请人： Xiaoping Bian , Mary Frances Doerner , Shanlin Duan , Jinshan Li , Mohammad Taghi Mirzamaani
发明人： Xiaoping Bian , Mary Frances Doerner , Shanlin Duan , Jinshan Li , Mohammad Taghi Mirzamaani
IPC分类号： G11B5/64 , G11B5/66 , G11B5/73
CPC分类号： G11B5/732 , G11B5/656 , G11B5/66 , G11B5/7325 , Y10S428/90 , Y10T428/265
摘要： A thin film disk and a disk drive using the thin film disk are described. The disk has an onset layer between the underlayer and the boron containing magnetic layer, for example. The onset layer of the invention is useful because the boron containing magnetic layer material resists being deposited with the C-axis in plane. The onset layer material is selected to promote an in-plane C-axis orientation. When a boron containing magnetic layer is deposited on the onset layer the resulting in-plane PO is improved. The preferred onset layer is of hexagonal closed pack structured material which may be magnetic or nonmagnetic. Materials which are usable for the onset layer include a wide range of pure elements and cobalt alloys such as CoCr, CoPtCr, CoPtCrTa and CoCrB. The onset layer is particularly useful in allowing a ferromagnetic cobalt (Co) alloy containing a relatively high chromium and boron content to be deposited on nonmetallic substrates with the C-axis in the plane of disk without the need for negative bias during the sputtering of the underlayer.
摘要翻译：描述使用薄膜盘的薄膜盘和磁盘驱动器。例如，盘在底层和含硼磁性层之间具有起始层。本发明的起始层是有用的，因为含硼磁性层材料抵抗C平面上的沉积。选择起始层材料以促进面内C轴取向。当含硼磁性层沉积在起始层上时，所得到的面内PO得到改善。优选的起始层是可以是磁性或非磁性的六边形封闭包装结构材料。可用于起始层的材料包括宽范围的纯元素和钴合金，例如CoCr，CoPtCr，CoPtCrTa和CoCrB。起始层特别适用于允许含有相对较高的铬和硼含量的铁磁性钴（Co）合金沉积在非金属基体上，其中C轴在盘平面中，而不需要在溅射期间的负偏压底层

10. 发明授权

US06607842B2 Containing an AITa or AITi pre-seed layer, a CoCr onset layer and a CoCrPtB magnetic layer 失效
标题翻译：含有aita或aiti预种子层的高性能薄膜盘，共同起始层和cocrptb磁性层
公开(公告)号：US06607842B2
公开(公告)日：2003-08-19
申请号：US09758379
申请日：2001-01-09
申请人： Xiaoping Bian , Mary Frances Doerner , Tim Minvielle , Mohammad Taghi Mirzamaani , Kai Tang
发明人： Xiaoping Bian , Mary Frances Doerner , Tim Minvielle , Mohammad Taghi Mirzamaani , Kai Tang
IPC分类号： G11B565
CPC分类号： G11B5/66 , Y10T428/12465 , Y10T428/12736 , Y10T428/12743 , Y10T428/12757 , Y10T428/12861 , Y10T428/12931 , Y10T428/24967 , Y10T428/265
摘要： The thin film disk includes a pre-seed layer of amorphous or nanocrystalline structure which may be AlTi or AlTa, and that is deposited upon a disk substrate. The pre-seed layer is followed by the RuAl seed layer, a Cr alloy underlayer, an onset layer composed essentially of CoCr and a magnetic layer. The onset layer has an optimal concentration of 28-33 at. % Cr and an optimal thickness of 0.5 to 2.5 nm and it increases coercivity and improves the Signal-to-Noise Ratio (SNR) of the disk. The magnetic layer is comprised of CoPtxCrBy, wherein x is the at. % concentration of Pt, y is the at. % concentration of boron, and x>4+y.
摘要翻译：薄膜盘包括可以是AlTi或AlTa并且沉积在盘基底上的非晶或纳米晶体结构的种子前层。预种子层之后是RuAl种子层，Cr合金底层，基本上由CoCr和磁性层组成的起始层。起始层的最佳浓度为28-33。％Cr，最佳厚度为0.5〜2.5nm，提高了矫顽力，提高了磁盘的信噪比（SNR）。磁性层由CoPtxCrBy组成，其中x是at。 Pt的浓度百分比，y为at。％的硼浓度，x> 4 + y。

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