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    • 3. 发明授权
    • Method for roll-to-roll deposition of optically transparent and high conductivity metallic thin films
    • 光学透明和高导电性金属薄膜的卷对卷沉积方法
    • US06811815B2
    • 2004-11-02
    • US10172282
    • 2002-06-14
    • Xiao-Ming HeRamin Heydarpour
    • Xiao-Ming HeRamin Heydarpour
    • C23C1600
    • C23C14/562B29D11/0073C23C14/022C23C14/08C23C14/205G02F1/133305G02F1/13439H01B1/02H01B1/08H05K1/0393H05K3/381H05K2201/0338H05K2203/095H05K2203/1545Y10T428/31504
    • Methods for roll-to-roll deposition of optically transparent and high conductivity metallic thin films are disclosed. In general, a method according to the present invention comprises: (1) providing a flexible plastic substrate; (2) depositing a multi-layered conductive metallic film on the flexible plastic substrate by a thin-film deposition technique to form a composite film; and (3) collecting the composite film in continuous rolls. Typically, the thin conductive metallic film is an InCeO—Ag—InCeO film. Typically, the thin-film deposition technique is DC magnetron sputtering. Another aspect of the invention is a composite film produced by a method according to the present invention. Still another aspect of the invention is a composite film comprising InCeO—Ag—InCeO film formed on a flexible plastic substrate, wherein the composite film has a combination of properties including: transmittance of at least 90% throughout the visible region; an electrical resistance of no greater than about 10 &OHgr;/square; a root-mean-square roughness of no greater than about 2.5 nm; and an interlayer adhesion between the InCeO/Ag/InCeO metallic film and the remainder of the composite film that is sufficiently great to survive a 180° peel adhesion test.
    • 公开了光学透明和高导电性金属薄膜的卷对卷沉积的方法。 通常,根据本发明的方法包括:(1)提供柔性塑料基板; (2)通过薄膜沉积技术在柔性塑料基板上沉积多层导电金属膜以形成复合膜; 和(3)将复合膜收集在连续辊中。 通常,薄导电金属膜是InCeO-Ag-InCeO膜。 通常,薄膜沉积技术是直流磁控溅射。 本发明的另一方面是通过根据本发明的方法制造的复合膜。 本发明的另一方面是一种复合膜,其包括在柔性塑料基材上形成的InCeO-Ag-InCeO膜,其中该复合膜具有以下特性的组合,包括:透过整个可见区域的至少90% 电阻不大于约10Ω/平方; 均方根粗糙度不大于约2.5nm; 以及InCeO / Ag / InCeO金属膜与复合膜的其余部分之间的层间粘合,其足够大以承受180°剥离粘合试验。
    • 6. 再颁专利
    • Method for roll-to-roll deposition of optically transparent and high conductivity metallic thin films
    • 光学透明和高导电性金属薄膜的卷对卷沉积方法
    • USRE41694E1
    • 2010-09-14
    • US11592317
    • 2006-11-01
    • Xiao-Ming HeRamin Heydarpour
    • Xiao-Ming HeRamin Heydarpour
    • C23C16/00C23C14/00
    • C23C14/562B29D11/0073C23C14/022C23C14/08C23C14/205G02F1/133305G02F1/13439H01B1/02H01B1/08H05K1/0393H05K3/381H05K2201/0338H05K2203/095H05K2203/1545Y10T428/31504
    • Methods for roll-to-roll deposition of optically transparent and high conductivity metallic thin films are disclosed. In general, a method according to the present invention comprises: (1) providing a flexible plastic substrate; (2) depositing a multi-layered conductive metallic film on the flexible plastic substrate by a thin-film deposition technique to form a composite film; and (3) collecting the composite film in continuous rolls. Typically, the thin conductive metallic film is an InCeO—Ag—InCeO film. Typically, the thin-film deposition technique is DC magnetron sputtering. Another aspect of the invention is a composite film produced by a method according to the present invention. Still another aspect of the invention is a composite film comprising InCeO—Ag—InCeO film formed on a flexible plastic substrate, wherein the composite film has a combination of properties including: transmittance of at least 90% throughout the visible region; an electrical resistance of no greater than about 10 Ω/square; a root-mean-square roughness of no greater than about 2.5 nm; and an interlayer adhesion between the InCeO/Ag/InCeO metallic film and the remainder of the composite film that is sufficiently great to survive a 180° peel adhesion test.
    • 公开了光学透明和高导电性金属薄膜的卷对卷沉积的方法。 通常,根据本发明的方法包括:(1)提供柔性塑料基板; (2)通过薄膜沉积技术在柔性塑料基板上沉积多层导电金属膜以形成复合膜; 和(3)将复合膜收集在连续辊中。 通常,薄导电金属膜是InCeO-Ag-InCeO膜。 通常,薄膜沉积技术是直流磁控溅射。 本发明的另一方面是通过根据本发明的方法制造的复合膜。 本发明的另一方面是一种复合膜,其包括在柔性塑料基材上形成的InCeO-Ag-InCeO膜,其中该复合膜具有以下特性的组合,包括:透过整个可见区域的至少90% 电阻不大于约10Ω/平方厘米; 均方根粗糙度不大于约2.5nm; 以及InCeO / Ag / InCeO金属膜与复合膜的其余部分之间的层间粘合,其足够大以承受180°剥离粘合试验。