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    • 4. 发明申请
    • Spatially patterned polarization compensator
    • 空间图案偏振补偿器
    • US20050151905A1
    • 2005-07-14
    • US11048675
    • 2005-02-01
    • Andrew KurtzBarry SilversteinXiang-Dong Mi
    • Andrew KurtzBarry SilversteinXiang-Dong Mi
    • G02B5/30G02B27/18G02B27/28G02F1/1335G03B21/00H04N9/31
    • H04N9/3167G02B5/3016G02B5/3058G02B27/18G02B27/283G02F1/133536G02F1/133634G02F2001/133548G02F2001/133638G02F2203/02H04N9/3108H04N9/3191
    • A modulation optical system (40) provides modulation of an incident light beam. A wire grid polarization beamsplitter (240) receives the beam of light (130) and transmits a beam of light having a first polarization, and reflects a beam of light having a second polarization orthogonal to the first polarization. Sub-wavelength wires (250) on the wire grid polarization beamsplitter face a reflective spatial light modulator. The reflective spatial light modulator receives the polarized beam of light and selectively modulates the polarized beam of light to encode data thereon. The reflective spatial light modulator reflects back both the modulated light and the unmodulated light to the wire grid polarization beamsplitter. The wire grid polarization beamsplitter separates the modulated light from the unmodulated light. A compensator (260) is located between the wire grid polarization beamsplitter and the reflective spatial light modulator (210). The compensator conditions the polarization states of the oblique and skew rays of the modulated beam and includes a spatially variant retardance that corrects for a spatially variant retardance of the reflective spatial light modulator.
    • 调制光学系统(40)提供入射光束的调制。 线栅偏振分束器(240)接收光束(130)并透射具有第一偏振的光束,并且反射具有与第一偏振正交的第二偏振的光束。 线栅极偏振分束器上的亚波长线(250)面向反射空间光调制器。 反射空间光调制器接收偏振光束,并选择性地调制偏振光束以在其上编码数据。 反射空间光调制器将调制光和未调制的光反射回线栅偏振分束器。 线栅偏振分束器将调制光与未调制的光分离。 补偿器(260)位于线栅偏振分束器和反射空间光调制器(210)之间。 补偿器调节调制束的倾斜和偏斜光线的偏振状态,并且包括校正反射空间光调制器的空间变化的延迟的空间变化的延迟。
    • 5. 发明申请
    • Exposure system for creating a patterned polarization compensator
    • 用于创建图案化偏振补偿器的曝光系统
    • US20050128392A1
    • 2005-06-16
    • US11048557
    • 2005-02-01
    • Andrew KurtzBarry SilversteinXiang-Dong Mi
    • Andrew KurtzBarry SilversteinXiang-Dong Mi
    • G02B5/30G02B27/18G02B27/28G02F1/1335G03B21/00H04N9/31
    • H04N9/3167G02B5/3016G02B5/3058G02B27/18G02B27/283G02F1/133536G02F1/133634G02F2001/133548G02F2001/133638G02F2203/02H04N9/3108H04N9/3191
    • A modulation optical system (40) provides modulation of an incident light beam. A wire grid polarization beamsplitter (240) receives the beam of light (130) and transmits a beam of light having a first polarization, and reflects a beam of light having a second polarization orthogonal to the first polarization. Sub-wavelength wires (250) on the wire grid polarization beamsplitter face a reflective spatial light modulator. The reflective spatial light modulator receives the polarized beam of light and selectively modulates the polarized beam of light to encode data thereon. The reflective spatial light modulator reflects back both the modulated light and the unmodulated light to the wire grid polarization beamsplitter. The wire grid polarization beamsplitter separates the modulated light from the unmodulated light. A compensator (260) is located between the wire grid polarization beamsplitter and the reflective spatial light modulator (210). The compensator conditions the polarization states of the oblique and skew rays of the modulated beam and includes a spatially variant retardance that corrects for a spatially variant retardance of the reflective spatial light modulator.
    • 调制光学系统(40)提供入射光束的调制。 线栅偏振分束器(240)接收光束(130)并透射具有第一偏振的光束,并且反射具有与第一偏振正交的第二偏振的光束。 线栅极偏振分束器上的亚波长线(250)面向反射空间光调制器。 反射空间光调制器接收偏振光束,并选择性地调制偏振光束以在其上编码数据。 反射空间光调制器将调制光和未调制的光反射回线栅偏振分束器。 线栅偏振分束器将调制光与未调制的光分离。 补偿器(260)位于线栅偏振分束器和反射空间光调制器(210)之间。 补偿器调节调制束的倾斜和偏斜光线的偏振状态,并且包括校正反射空间光调制器的空间变化的延迟的空间变化的延迟。