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1. 发明授权

US06409878B1 Automatic decapsulation system utilizing an acid resistant, high heat endurance and flexible sheet coupled to a rubber gasket and a method of use 失效
标题翻译：使用耐酸，高耐热性和与橡胶垫圈耦合的柔性片材的自动解封装系统和使用方法
公开(公告)号：US06409878B1
公开(公告)日：2002-06-25
申请号：US09680558
申请日：2000-10-05
申请人： Xia Li , Joseph Vu , Mohammad Massoodi , Jose Hulog
发明人： Xia Li , Joseph Vu , Mohammad Massoodi , Jose Hulog
IPC分类号： C23F102
CPC分类号： H01L21/67126 , G01N1/32 , G01R31/316
摘要： An automatic decapsulation system for a device is disclosed. The system comprises an etch plate, an etch head, an acid resistant, high heat endurance and flexible sheet coupled to the etch plate, and a rubber gasket disposed between the sheet and the etch head. The sheet provides a precise etch window and a self-aligning gasket for the device. The rubber gasket creates a tight seal between the device, the sheet, and the etch head. A system in accordance with the present invention utilizes an acid resistant, high heat endurance and flexible sheet in combination with a rubber gasket to seal the device for decapsulation and to provide a well-defined etch window. In addition, the sheet being utilized as the gasket is also utilized as the fixture, thereby eliminating the need to align the gasket to the metal fixture utilized in the conventional system.
摘要翻译：公开了一种用于设备的自动解封装系统。该系统包括蚀刻板，蚀刻头，耐酸，高耐热性和耦合到蚀刻板的柔性片，以及设置在片和蚀刻头之间的橡胶垫。该片材为设备提供精确的蚀刻窗口和自对准衬垫。橡胶垫圈在装置，片材和蚀刻头之间产生紧密的密封。根据本发明的系统利用耐酸，高耐热性和柔性片材与橡胶垫圈组合以密封装置以进行封装并提供良好定义的蚀刻窗口。此外，用作垫圈的片材也用作夹具，从而消除了将垫圈对准在常规系统中使用的金属夹具的需要。

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