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1. 发明申请

US20090153932A1 MEMS devices and related scanned beam devices 有权
标题翻译： MEMS器件和相关的扫描光束器件
公开(公告)号：US20090153932A1
公开(公告)日：2009-06-18
申请号：US12004090
申请日：2007-12-18
申请人： Wyatt Davis , Gregory T. Gibson , Hakan Urey , Thomas W. Montague , Bin Xue , John Lewis
发明人： Wyatt Davis , Gregory T. Gibson , Hakan Urey , Thomas W. Montague , Bin Xue , John Lewis
IPC分类号： G02B26/10
CPC分类号： G02B23/2423 , G02B26/0841 , G02B26/085
摘要： Embodiments relate to a MEMS device including a scanner rotatable about at least one rotation axis, with the scanner having a characteristic resonant frequency. According to one embodiment, the MEMS device includes drive electronics operable to generate a drive signal that causes the scanner to oscillate at an operational frequency about the at least one rotation axis. The drive signal has a drive frequency selected to be about equal to the characteristic resonant frequency or a sub-harmonic frequency of the characteristic resonant frequency. According to another embodiment, the drive electronics are operable to generate a drive signal having a plurality of drive-signal pulses that moves the scanner at an operational frequency and sensing electronics are operable to sense a position of the scanner only when the drive-signal pulses of the drive signal are not being transmitted by the drive electronics. The MEMS device embodiments may be incorporated in scanned beam imagers, endoscopes, and displays.
摘要翻译：实施例涉及包括可围绕至少一个旋转轴线旋转的扫描仪的MEMS装置，扫描器具有特征谐振频率。根据一个实施例，MEMS装置包括可操作以产生驱动信号的驱动电子设备，该驱动信号使扫描仪以围绕至少一个旋转轴线的工作频率振荡。驱动信号的驱动频率选择为大约等于特性谐振频率或特征谐振频率的次谐波频率。根据另一个实施例，驱动电子器件可操作以产生具有多个驱动信号脉冲的驱动信号，驱动信号脉冲以操作频率移动扫描器，并且感测电子装置可操作以仅当驱动信号脉冲的驱动信号不被驱动电子器件传输。 MEMS器件实施例可并入扫描光束成像器，内窥镜和显示器中。

2. 发明授权

US07999244B2 MEMS devices and related scanned beam devices 有权
标题翻译： MEMS器件和相关的扫描光束器件
公开(公告)号：US07999244B2
公开(公告)日：2011-08-16
申请号：US12004090
申请日：2007-12-18
申请人： Wyatt Davis , Gregory T. Gibson , Hakan Urey , Thomas W. Montague , Bin Xue , John Lewis
发明人： Wyatt Davis , Gregory T. Gibson , Hakan Urey , Thomas W. Montague , Bin Xue , John Lewis
IPC分类号： G01N21/86
CPC分类号： G02B23/2423 , G02B26/0841 , G02B26/085
摘要： Embodiments relate to a MEMS device including a scanner rotatable about at least one rotation axis, with the scanner having a characteristic resonant frequency. According to one embodiment, the MEMS device includes drive electronics operable to generate a drive signal that causes the scanner to oscillate at an operational frequency about the at least one rotation axis. The drive signal has a drive frequency selected to be about equal to the characteristic resonant frequency or a sub-harmonic frequency of the characteristic resonant frequency. According to another embodiment, the drive electronics are operable to generate a drive signal having a plurality of drive-signal pulses that moves the scanner at an operational frequency and sensing electronics are operable to sense a position of the scanner only when the drive-signal pulses of the drive signal are not being transmitted by the drive electronics. The MEMS device embodiments may be incorporated in scanned beam imagers, endoscopes, and displays.
摘要翻译：实施例涉及包括可围绕至少一个旋转轴线旋转的扫描仪的MEMS装置，扫描器具有特征谐振频率。根据一个实施例，MEMS装置包括可操作以产生驱动信号的驱动电子设备，该驱动信号使扫描仪以围绕至少一个旋转轴线的工作频率振荡。驱动信号的驱动频率选择为大约等于特性谐振频率或特征谐振频率的次谐波频率。根据另一个实施例，驱动电子器件可操作以产生具有多个驱动信号脉冲的驱动信号，驱动信号脉冲以操作频率移动扫描器，并且感测电子装置可操作以仅当驱动信号脉冲的驱动信号不被驱动电子器件传输。 MEMS器件实施例可并入扫描光束成像器，内窥镜和显示器中。

3. 发明申请

US20080042052A1 Mems device having simplified drive 有权
标题翻译： Mems设备具有简化的驱动
公开(公告)号：US20080042052A1
公开(公告)日：2008-02-21
申请号：US11975543
申请日：2007-10-19
申请人： Randall Sprague , Jun Yan , Jason Tauscher , Wyatt Davis , John Lewis , Dean Brown , Thomas Montague , Chancellor Brown
发明人： Randall Sprague , Jun Yan , Jason Tauscher , Wyatt Davis , John Lewis , Dean Brown , Thomas Montague , Chancellor Brown
IPC分类号： H01J3/14
CPC分类号： G02B26/0858 , G02B26/085 , G02B26/101
摘要： A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.
摘要翻译：诸如MEMS扫描仪的MEMS振荡器具有改进和简化的驱动方案和结构。驱动脉冲可以通过支撑臂通过扭矩传递到振动体。对于多轴振荡器，两个或多个轴的驱动信号可能由驱动电路叠加并传输到MEMS振荡器。振荡器根据其在该轴上的共振频率在每个轴上进行响应。振荡器可以在一些或所有轴上共振地驱动。改进的载荷分布导致变形减少。简化的结构使用单个移动体提供多轴振动。另一种结构直接驱动多个移动体。另一种结构消除了来自一个或多个移动体的致动器，这些主体由其支撑臂驱动。

4. 发明申请

US20050253055A1 MEMS device having simplified drive 有权
标题翻译：具有简化驱动的MEMS器件
公开(公告)号：US20050253055A1
公开(公告)日：2005-11-17
申请号：US10984327
申请日：2004-11-09
申请人： Randall Sprague , Jun Yan , Jason Tauscher , Wyatt Davis , John Lewis , Dean Brown , Thomas Montague , Chancellor Brown
发明人： Randall Sprague , Jun Yan , Jason Tauscher , Wyatt Davis , John Lewis , Dean Brown , Thomas Montague , Chancellor Brown
IPC分类号： G02B26/08 , H01J3/14
CPC分类号： G02B26/0858 , G02B26/085 , G02B26/101
摘要： A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.
摘要翻译：诸如MEMS扫描仪的MEMS振荡器具有改进和简化的驱动方案和结构。驱动脉冲可以通过支撑臂通过扭矩传递到振动体。对于多轴振荡器，两个或多个轴的驱动信号可能由驱动电路叠加并传输到MEMS振荡器。振荡器根据其在该轴上的共振频率在每个轴上进行响应。振荡器可以在一些或所有轴上共振地驱动。改进的载荷分布导致变形减少。简化的结构使用单个移动体提供多轴振动。另一结构直接驱动多个移动体。另一种结构消除了来自一个或多个移动体的致动器，这些主体由其支撑臂驱动。

5. 发明申请

US20050280879A1 Method and apparatus for scanning a beam of light 审中-公开
标题翻译：用于扫描光束的方法和装置
公开(公告)号：US20050280879A1
公开(公告)日：2005-12-22
申请号：US10988155
申请日：2004-11-12
申请人： Gregory Gibson , Wyatt Davis , Dean Brown , Randall Sprague
发明人： Gregory Gibson , Wyatt Davis , Dean Brown , Randall Sprague
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08 , G02B26/10 , H01L21/78 , H04N1/04
CPC分类号： G02B26/0858 , G02B26/0833 , G02B26/0841 , G02B26/0866 , G02B26/105
摘要： A resonant MEMS scanning system operates a MEMS scanner at its resonant frequency to maximize scan angle and minimize power consumption. A controller includes a phase locked loop, an amplitude servo control loop, and a resonant frequency servo control loop. A microprocessor controls the loops and provides override during conditions such as start-up. Resonant frequency is dynamically thermally trimmed, allowing the device to be operated at higher Q. The phase lock loop operates in a pre-lock condition to allow faster start-up. Resonant frequency is controlled open loop during idle and start-up. Drive voltage is set high during start-up to achieve a rapid rise in scan angle.
摘要翻译：谐振MEMS扫描系统以其谐振频率操作MEMS扫描器，以最大化扫描角度并最小化功耗。控制器包括锁相环，振幅伺服控制环和谐振频率伺服控制环。微处理器控制环路，并在诸如启动的条件下提供覆盖。谐振频率被动态热修剪，允许器件以较高的Q运行。锁相环工作在预锁定状态以允许更快的启动。在空闲和启动期间，谐振频率被控制为开环。启动期间的驱动电压设置为高，以实现扫描角度的快速上升。

6. 发明申请

US20070109560A1 MEMS scanner adapted to a laser printer 有权
标题翻译：适用于激光打印机的MEMS扫描仪
公开(公告)号：US20070109560A1
公开(公告)日：2007-05-17
申请号：US11502131
申请日：2006-08-09
申请人： Randall Sprague , Wyatt Davis , Dean Brown , Yoshiro Koga , Nobumasa Abe , Yujiro Nomura
发明人： Randall Sprague , Wyatt Davis , Dean Brown , Yoshiro Koga , Nobumasa Abe , Yujiro Nomura
IPC分类号： G06F3/12
CPC分类号： G02B26/0858 , B41J2/471 , G02B26/0841
摘要： An electrophotographic printer includes an exposure unit having a MEMS scanner operable to scan a beam of light across a photoconductor. The MEMS scanner includes a mirror having an aspect ratio similar to the shape of the facets of a conventional rotating polygon scanner. In a preferred embodiment, the scan mirror has a length of about 750 microns in a dimension parallel to its axis of rotation and a length of about 8 millimeters in a dimension perpendicular to its axis of rotation. The MEMS scanner is operable to scan at a frequency of about 5 KHz and an angular displacement of about 20 degrees zero-to-peak mechanical scan angle.
摘要翻译：电子照相打印机包括具有MEMS扫描器的曝光单元，其可操作以扫描光束穿过光电导体。 MEMS扫描器包括具有类似于常规旋转多边形扫描仪的面的形状的纵横比的反射镜。在优选实施例中，扫描反射镜具有与其旋转轴线平行的尺寸约750微米的长度，并且垂直于其旋转轴线的尺寸为约8毫米的长度。 MEMS扫描器可操作以在约5KHz的频率和大约20度的零位到峰值机械扫描角度的角位移中扫描。

7. 发明申请

US20050179976A1 High performance MEMS scanner 有权
标题翻译：高性能MEMS扫描仪
公开(公告)号：US20050179976A1
公开(公告)日：2005-08-18
申请号：US10986640
申请日：2004-11-12
申请人： Wyatt Davis , Dean Brown , Thomas Montague , Randall Sprague
发明人： Wyatt Davis , Dean Brown , Thomas Montague , Randall Sprague
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08 , G02B26/10 , H01L21/78 , H04N1/04
CPC分类号： G02B26/0858 , G02B26/0833 , G02B26/0841 , G02B26/0866 , G02B26/105
摘要： A high performance MEMS scanner is disclosed. In some embodiments, scanner mirror has a wide and short aspect ratio that is similar to rotating polygon facets. Long torsion arms allow large rotation angles including 20° zero-to-peak mechanical and greater. Suspensions couple the scan mirror to torsion arms, reducing dynamic mirror deformation by spreading the torque load. “leverage members” at the distal ends of the torsion arms help reduce stress concentrations. Elimination of a mounting frame increases device yield. Heater leads allow for precise trimming of the scanner resonant frequency. A compressive mount holds mounting pads against mounting structures.
摘要翻译：公开了一种高性能MEMS扫描仪。在一些实施例中，扫描仪反射镜具有类似于旋转多边形面的宽而短的纵横比。长扭力臂允许大的旋转角度，包括20°零到机械和更大的角度。悬架将扫描镜耦合到扭转臂，通过扩展转矩负载来减少动态镜面变形。扭力臂末端的“杠杆部件”有助于减轻应力集中。消除安装框架会增加设备的产量。加热器引线允许精确调整扫描器谐振频率。压缩安装座将安装垫保持在安装结构上。

8. 发明申请

US20050173770A1 Method and apparatus for making a MEMS scanner 有权
标题翻译：制造MEMS扫描仪的方法和装置
公开(公告)号：US20050173770A1
公开(公告)日：2005-08-11
申请号：US10986635
申请日：2004-11-12
申请人： Kelly Linden , Mark Helsel , Dean Brown , Randall Sprague , Wyatt Davis
发明人： Kelly Linden , Mark Helsel , Dean Brown , Randall Sprague , Wyatt Davis
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08 , G02B26/10 , H01L21/78 , H04N1/04 , H01L21/00 , H01L27/14 , H01L29/82
CPC分类号： G02B26/0858 , G02B26/0833 , G02B26/0841 , G02B26/0866 , G02B26/105
摘要： Devices are formed on a semiconductor wafer in an interdigitated relationship and are released by deep reactive ion etching. MEMS scanners are formed without a surrounding frame. Mounting pads extend outward from torsion arms. Neighboring MEMS scanners are formed with their mounting pads interdigitated such that a regular polygon cannot be formed around a device without also intersecting a portion of one or more neighboring devices. MEMS scanners may be held in their outlines by a metal layer, by small semiconductor bridges, or a combination.
摘要翻译：器件以交叉关系形成在半导体晶片上，并通过深反应离子蚀刻而释放。 MEMS扫描仪在没有周边框架的情况下形成。安装垫从扭臂向外延伸。相邻的MEMS扫描仪形成，其安装垫相互交错，使得不会在设备周围形成正多边形，而不会与一个或多个相邻设备的一部分相交。 MEMS扫描仪可以通过金属层，小型半导体桥或其组合保持在其轮廓中。

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