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1. 发明授权

US07189425B2 Method of manufacturing a superconducting magnesium diboride thin film 失效
标题翻译：制造超导二硼化镁薄膜的方法
公开(公告)号：US07189425B2
公开(公告)日：2007-03-13
申请号：US10781644
申请日：2004-02-20
申请人： Won nam Kang , Sung-ik Lee , Eun-mi Choi , Hyeong-jin Kim
发明人： Won nam Kang , Sung-ik Lee , Eun-mi Choi , Hyeong-jin Kim
IPC分类号： B05D5/12 , C23C14/00 , C23C16/00 , H01L39/24
CPC分类号： H01L39/2487 , Y10T29/49014
摘要： A superconducting magnesium diboride (MgB2) thin film having c-axial orientation and a method and apparatus for fabricating the same are provided. The fabrication method includes forming a boron thin film on a substrate and thermally processing the substrate on which the boron thin film is formed along with a magnesium source and cooling the resulting structure. The superconducting magnesium diboride thin film can be used in a variety of electronic devices employing superconducting thin films, such as precision medical diagnosis equipment using superconducting quantum interface devices (SQUIDs) capable of sensing weak magnetic fields, microwave communications equipment used for satellite communications, and Josephson devices. Computer systems with 100 times greater computing speed can be implemented with the superconducting magnesium diboride thin film.
摘要翻译：提供了具有c轴取向的超导二硼化镁（MgB 2 N 2）薄膜及其制造方法和装置。制造方法包括在基板上形成硼薄膜，并与镁源一起热处理形成有硼薄膜的基板，并冷却所得到的结构。超导二硼化镁薄膜可用于使用超导薄膜的各种电子装置，例如使用能够感测弱磁场的超导量子接口装置（SQUID）的精密医疗诊断装置，用于卫星通信的微波通信设备和约瑟夫森设备。使用超导二硼化镁薄膜可以实现计算速度提高100倍的计算机系统。

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