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    • 4. 发明授权
    • Method of producing an integrated micromagnet sensor assembly
    • 一体化微型磁传感器组件的制造方法
    • US08173446B2
    • 2012-05-08
    • US12642968
    • 2009-12-21
    • William Hullinger Huber
    • William Hullinger Huber
    • H01L21/00
    • H01L43/12B82Y25/00G01R33/093G01R33/095H01L43/08
    • A method of integrating a permanent bias magnet within a magnetoresistance sensor comprising depositing an alternating pattern of a metal material and a semiconductor material on or within a surface of an insulating substrate; depositing a mask on the surface of the insulating substrate to create an opening above the alternating pattern of metal material and semiconductor material; applying a magnetic paste within the opening above the alternating pattern of metal material and semiconductor material; curing the magnetic paste to form a hardened bias magnet; removing the mask; and magnetizing the hardened bias magnet by applying a strong magnetic field to the hardened bias magnet at a desired orientation.
    • 一种将永久偏置磁体集成在磁阻传感器内的方法,包括在绝缘衬底的表面上或内部沉积金属材料和半导体材料的交替图案; 在绝缘基板的表面上沉积掩模以在金属材料和半导体材料的交替图案之上产生开口; 在金属材料和半导体材料的交替图案之上的开口内施加磁性浆料; 固化磁性浆料以形成硬化的偏置磁体; 去除面膜; 以及通过以预期取向向硬化的偏置磁体施加强磁场来磁化硬化的偏置磁体。