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1. 发明授权

US4985710A Buttable subunits for pagewidth "Roofshooter" printheads 失效
标题翻译：页面宽度“Roofshooter”打印头的Buttable子单元
公开(公告)号：US4985710A
公开(公告)日：1991-01-15
申请号：US442641
申请日：1989-11-29
申请人： Donald J. Drake , William G. Hawkins
发明人： Donald J. Drake , William G. Hawkins
IPC分类号： B41J2/05 , B41J2/155 , B41J2/16
CPC分类号： B41J2/1623 , B41J2/155 , B41J2/1603 , B41J2/1626 , B41J2/1632 , Y10T156/1052
摘要： A "roofshooter" pagewidth printhead for use in a thermal ink jet printing device is fabricated by forming a plurality of subunits, each being produced by bonding a heater substrate having an architecture including an array of heater elements and an etched ink feed slot to a secondary substrate having a series of spaced feed hole openings to form a combined substrate in which said series of spaced feed hole openings communicates with said ink feed slot, and dicing said combined substrates through said ink feed slot to form a subunit. An array of butted subunits having a length equal to one pagewidth is formed by butting one of said subunits against an adjacent subunit. The array of butted subunits is bonded to a pagewidth support substrate. The secondary substrate provides an integral support structure for maintaining the alignment of the heater plate which, if diced through the feed hole without the secondary substrate, would separate into individual pieces, thereby complicating the alignment and assembly process.

2. 发明授权

US4899181A Large monolithic thermal ink jet printhead 失效
标题翻译：大型单片热喷墨打印头
公开(公告)号：US4899181A
公开(公告)日：1990-02-06
申请号：US303620
申请日：1989-01-30
申请人： William G. Hawkins , Donald J. Drake
发明人： William G. Hawkins , Donald J. Drake
IPC分类号： B41J2/05 , B41J2/16
CPC分类号： B41J2/1642 , B41J2/1604 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635
摘要： An improved thermal ink jet printhead and method of fabrication thereof is disclosed of the type formed by the mating and bonding of first and second substrates. The first substrate is silicon with {100} crystal plane surfaces and has anisotropically etched in one surface thereof a linear series of separate through recesses and a plurality of parallel, elongated ink channels grooves. The second substrate has a plurality of heating elements and addressing electrodes patterned on one surface thereof. The through recesses serve as a segmented ink reservoir with each segment having an ink inlet, and the elongated ink channel grooves having one end adjacent the segmented reservoir and the opposite end open to serve as ink droplet emitting nozzles. Each segment of the segmented reservoir is isolated from each other by dividing walls. The dividing walls strengthen the printhead, and the separate through recesses reduce the effects of angular misalignment between mask and first substrate crystal planes. In the preferred embodiment, a thick film insulative layer is sandwiched between the first and second substrates and patterned to form recesses therein to provide the means for placing the segmented reservoir into communication with the ink channel grooves. To produce a multicolor printing printhead, the thick film layer is patterned to form a linear series of recesses, each substantially equal in length to an associated one of the reservoir segments, so that each reservoir segment may have a different colored ink supplied thereto that cannot mix with the ink of the other reservoir segments.
摘要翻译：公开了一种改进的热喷墨打印头及其制造方法，其通过第一和第二基板的配合和结合而形成。第一衬底是具有{100}晶面表面的硅，并且在其一个表面中具有各向异性蚀刻线性系列的分离的通孔和多个平行的细长的墨水槽。第二基板具有在其一个表面上图案化的多个加热元件和寻址电极。贯通凹部用作分段墨水储存器，每个分段具有墨水入口，并且细长的墨水通道凹槽具有与分段的储存器相邻的一端，并且相对的端部打开以用作墨滴喷射。分段储存器的每个段通过分隔壁彼此隔离。分隔壁加强了打印头，并且单独的通孔减少了掩模和第一基板晶体平面之间的角度偏移的影响。在优选实施例中，厚膜绝缘层被夹在第一和第二基板之间并被图案化以在其中形成凹槽，以提供用于将分段的储存器放置成与墨水通道槽连通的装置。为了生产多色打印打印头，将厚膜层图案化以形成线性系列的凹槽，每个凹槽的长度与相关联的储存器段之间的长度基本上相等，使得每个储存器段可以具有供给其的不同颜色的墨水，不能与其他水库段的油墨混合。

3. 发明授权

US4822755A Method of fabricating large area semiconductor arrays 失效
标题翻译：制造大面积半导体阵列的方法
公开(公告)号：US4822755A
公开(公告)日：1989-04-18
申请号：US185600
申请日：1988-04-25
申请人： William G. Hawkins , Donald J. Drake , Michael R. Campanelli
发明人： William G. Hawkins , Donald J. Drake , Michael R. Campanelli
IPC分类号： H01L21/302 , B41J2/16 , H01L21/301 , H01L21/306 , H01L29/06 , H01L21/00 , H01L21/02 , H01L21/72 , H01L21/98
CPC分类号： B41J2/1628 , B41J2/1601 , B41J2/1623 , B41J2/1629 , B41J2/1642 , H01L21/30604 , B41J2202/13 , H01L29/0657 , Y10S438/928
摘要： A method for separating chips formed on a silicon substrate is provided which uses a combination of reactive ion etching techniques combined with orientation etching to yield integrated chips having edges which can be more precisely butted together to form large area arrays.

4. 再颁专利

USRE32572E Thermal ink jet printhead and process therefor 失效
标题翻译：热喷墨打印头及其工艺
公开(公告)号：USRE32572E
公开(公告)日：1988-01-05
申请号：US947020
申请日：1986-12-29
申请人： William G. Hawkins , Donald J. Drake , Michael R. Campanelli
发明人： William G. Hawkins , Donald J. Drake , Michael R. Campanelli
IPC分类号： B41J2/16
CPC分类号： B41J2/1623 , B41J2/1604 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1635 , B41J2/1642
摘要： Several fabricating processes for ink jet printheads are disclosed, each printhead being composed of two parts aligned and bonded together. One part is a substantially flat substrate which contains on the surface thereof a lineal array of heating elements and addressing electrodes, and the second part is a substrate having at least one recess anisotropically etched therein to serve as an ink supply manifold when the two parts are bonded together. A lineal array of parallel grooves are formed in the second part, so that one end of the grooves communicate with the manifold recess an the other ends are open for use as an ink droplet expelling nozzles. Many printheads can be made simultaneously by producing a plurality of sets of heating elements array with their addressing electrodes on a silicon wafer and by placing alignment marks thereon at predetermined locations. A corresponding plurality of sets of channels and associated manifolds are produced in a second silicon wafer and, in one embodiment, alignment openings are etched thereon at predetermined locations. The two wafers are aligned via the alignment openings and alignment marks, then bonded together and diced into many separate printheads. A number of printheads can be fixedly mounted in a pagewidth configuration which confronts a moving recording medium for pagewidth printing or individual printheads may be adapted for carriage type ink jet printing.

5. 发明授权

US5030971A Precisely aligned, mono- or multi-color, `roofshooter` type printhead 失效
标题翻译：精确对齐，单色或多色，“屋顶运动”型打印头
公开(公告)号：US5030971A
公开(公告)日：1991-07-09
申请号：US442574
申请日：1989-11-29
申请人： Donald J. Drake , William G. Hawkins
发明人： Donald J. Drake , William G. Hawkins
IPC分类号： B41J2/05 , B41J2/14 , B41J2/16 , B41J2/21
CPC分类号： B41J2/2103 , B41J2/14072 , B41J2/14129 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1642
摘要： A multi-color roofshooter type thermal ink jet printhead includes a common heater substrate having at least two arrays of heating elements and a corresponding number of elongated feed slots, each heater array being located adjacent its corresponding feed slot. A common channel substrate is layered above a heater substrate and includes arrays of nozzles corresponding in number to the arrays of heating elements, each nozzle array communicating with one of the feed slots on the heater substrate. Each nozzle array is isolated from an adjacent nozzle array and each nozzle of each nozzle array is aligned above a respective heating element of a corresponding heater array. Each of the heater arrays is individually addressed and driven by switching circuitry located on the heater substrate adjacent to its corresponding heater array. The switching circuitry can be active driver matrices corresponding in number to the arrays of heating elements. The locations of the driver matrices preferably alternate with locations of the feed slots. With this construction, multi-color printheads can be efficiently arranged on a single wafer, so that silicon real estate is conserved. The switching circuitry can also be used to address an array of heating elements in a mono-color thermal inkjet printhead. In a preferred embodiment, inputs of the switching circuitry extend from sides of the switching circuitry whereby distances between adjacent feed slots are minimized.
摘要翻译：多色屋顶拍摄型热喷墨打印头包括具有至少两个加热元件阵列和相应数量的细长进给槽的公共加热器基板，每个加热器阵列位于其相应的进料槽附近。公共通道基板层叠在加热器基板的上方，并且包括与加热元件阵列相对应的喷嘴阵列，每个喷嘴阵列与加热器基板上的一个进料槽连通。每个喷嘴阵列与相邻的喷嘴阵列隔离，并且每个喷嘴阵列的每个喷嘴对准在相应加热器阵列的相应加热元件的上方。每个加热器阵列由位于加热器基板上的与其对应的加热器阵列相邻的切换电路单独寻址和驱动。开关电路可以是与加热元件阵列相对应的有源驱动器矩阵。驱动器矩阵的位置优选地与馈送槽的位置交替。利用这种结构，可以将多色打印头有效地布置在单个晶片上，从而保持硅的空间。开关电路还可用于解决单色热喷墨打印头中的加热元件阵列。在优选实施例中，开关电路的输入从开关电路的侧面延伸，从而相邻进料槽之间的距离最小化。

6. 发明授权

US5006202A Fabricating method for silicon devices using a two step silicon etching process 失效
标题翻译：使用两步硅蚀刻工艺的硅器件的制造方法
公开(公告)号：US5006202A
公开(公告)日：1991-04-09
申请号：US533204
申请日：1990-06-04
申请人： William G. Hawkins , Donald J. Drake , James F. O'Neill
发明人： William G. Hawkins , Donald J. Drake , James F. O'Neill
IPC分类号： B41J2/16 , B81B1/00 , C23F1/00 , C23F1/02 , H01L21/302 , H01L21/306 , H01L21/3065 , H01L21/308
CPC分类号： B41J2/1642 , B41J2/1601 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1645 , B81B1/004 , B81C1/00896 , H01L21/30608 , H01L21/3085 , B81B2201/052 , B81C2201/053
摘要： Disclosed is a method of fabricating a precision etched, three dimensional device from a silicon wafer, wherein the etching is done from one side of the wafer using a two step silicon etching process. A two-sided deposition of a robust protective layer, such as polycrystalline silicon, is placed over a two-sided deposition of a chemical masking layer such as silicon dioxide. The two layers are concurrently patterned with first and second sets of vias on one side of the wafer, while the opposite side is protected by the protective layer. The protective layer is removed to permit deposition of a second masking layer such as silicon nitride, followed by deposition of a second protective layer. Again, the second protective layer prevents damage to the fragile second masking layer on the wafer backside while its frontside is patterned with a similar set of vias aligned with the first set of vias in the first masking layer. This similar set of vias is sequentially formed in both the second protective layer and the underlying second masking layers. Then the wafer is placed in an etchant bath so that the first set of recesses is anisotropically etched in the wafer frontside side. Next, the second protective layer and second masking layer are removed to permit anisotropic etching of the second set of recesses through the second set of vias in the first masking layer. If the protective layer is polycrystalline silicon, it is concurrently etch-removed during the initial etching of the silicon wafer.
摘要翻译：公开了一种从硅晶片制造精密蚀刻的三维器件的方法，其中使用两步硅蚀刻工艺从晶片的一侧进行蚀刻。坚固的保护层（例如多晶硅）的双面沉积置于诸如二氧化硅的化学掩蔽层的双面沉积上。两层同时用晶片一侧的第一组和第二组通孔构图，而相对侧被保护层保护。去除保护层以允许沉积诸如氮化硅的第二掩蔽层，随后沉积第二保护层。再次，第二保护层防止损坏晶片背面上的脆弱的第二掩蔽层，同时其前侧用与第一掩蔽层中的第一组通孔对准的相似的一组通孔构图。在第二保护层和下面的第二掩蔽层中顺序地形成这种类似的通孔。然后将晶片放置在蚀刻剂浴中，使得第一组凹陷在晶片前侧被各向异性地蚀刻。接下来，去除第二保护层和第二掩蔽层，以允许通过第一掩模层中的第二组通孔对第二组凹陷进行各向异性蚀刻。如果保护层是多晶硅，则在硅晶片的初始蚀刻期间同时进行蚀刻去除。

7. 发明授权

US4829324A Large array thermal ink jet printhead 失效
标题翻译：大阵列热喷墨打印头
公开(公告)号：US4829324A
公开(公告)日：1989-05-09
申请号：US137283
申请日：1987-12-23
申请人： Donald J. Drake , William G. Hawkins
发明人： Donald J. Drake , William G. Hawkins
IPC分类号： B41J2/175 , B41J2/05 , B41J2/16
CPC分类号： B41J2/1623 , B41J2/1604 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2202/20
摘要： A large array ink jet printhead is disclosed having two basic parts, one containing an array of heating elements and addressing electrodes on the surface thereof, and the other containing the liquid ink handling system. At least the part containing the ink handling system is silicon and is assembled from generally identical sub-units aligned and bonded side-by-side on the part surface having the heating element array. Each channel plate sub-unit has an etched manifold with means for supplying ink thereto and a plurality of parallel ink channel grooves open on one end and communicating with the manifold at the other. The surfaces of the channel plate sub-units contacting each other are {111} planes formed by anisotropic etching. The channel plate sub-units appear to have a parallelogram shape when viewed from a direction parallel with and confronting the ink channel groove open ends. The heating element array containing part may also be assembled from etched silicon sub-units with their abutting surfaces being {111} planes. In another embodiment, a plurality of channel plate sub-units are anisotropically etched in a silicon wafer and a plurality of heating element sub-units are formed on another silicon wafer. The heating element wafer is also anisotropically etched with elongated slots. The wafers are aligned and bonded together, then diced into complete printhead sub-units which have abutting side surfaces that are {111} planes for accurate side-by-side assembly.

8. 发明授权

US4601777A Thermal ink jet printhead and process therefor 失效
标题翻译：热喷墨打印头及其工艺
公开(公告)号：US4601777A
公开(公告)日：1986-07-22
申请号：US719410
申请日：1985-04-03
申请人： William G. Hawkins , Donald J. Drake , Michael R. Campanelli
发明人： William G. Hawkins , Donald J. Drake , Michael R. Campanelli
IPC分类号： B41J2/01 , B41J2/015 , B41J2/05 , B41J2/16 , H01L49/02 , H01L21/306 , B44C1/22 , C03C15/00 , C23F1/02
CPC分类号： B41J2/1623 , B41J2/1604 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1635 , B41J2/1642 , H01L49/02
摘要： Several fabricating processes for ink jet printheads are disclosed, each printhead being composed of two parts aligned and bonded together. One part is a substantially flat substrate which contains on the surface thereof a lineal array of heating elements and addressing electrodes, and the second part is a substrate having at least one recess anisotropically etched therein to serve as an ink supply manifold when the two parts are bonded together. A lineal array of parallel grooves are formed in the second part, so that one end of the grooves communicate with the manifold recess an the other ends are open for use as an ink droplet expelling nozzles. Many printheads can be made simultaneously by producing a plurality of sets of heating elements array with their addressing electrodes on a silicon wafer and by placing alignment marks thereon at predetermined locations. A corresponding plurality of sets of channels and associated manifolds are produced in a second silicon wafer and, in one embodiment, alignment openings are etched thereon at predetermined locations. The two wafers are aligned via the alignment openings and alignment marks, then bonded together and diced into many separate printheads. A number of printheads can be fixedly mounted in a pagewidth configuration which confronts a moving recording medium for pagewidth printing or individual printheads may be adapted for carriage type ink jet printing.
摘要翻译：公开了用于喷墨打印头的若干制造方法，每个打印头由对准和粘合在一起的两个部件组成。一部分是在其表面上包含加热元件和寻址电极的线阵列的基本平坦的基板，并且第二部分是具有各向异性蚀刻在其中的至少一个凹部的基板，以当两部分为结合在一起在第二部分中形成一系列平行的凹槽，使得凹槽的一端与歧管凹槽连通，另一端打开以用作墨滴排出喷嘴。许多打印头可以通过在硅晶片上产生多组加热元件阵列与其寻址电极并通过在预定位置放置对准标记而同时制造。在第二硅晶片中产生相应的多组通道和相关联的歧管，并且在一个实施例中，在预定位置处蚀刻对准开口。两个晶片通过对准开口和对准标记对齐，然后粘合在一起并切成许多单独的打印头。许多打印头可以固定地安装在页宽配置中，该宽度配置面对用于页宽打印的移动记录介质，或者单独的打印头可适用于支架式喷墨打印。

9. 发明授权

US4875968A Method of fabricating ink jet printheads 失效
标题翻译：制造喷墨打印头的方法
公开(公告)号：US4875968A
公开(公告)日：1989-10-24
申请号：US305046
申请日：1989-02-02
申请人： James F. O'Neill , Donald J. Drake , William G. Hawkins
发明人： James F. O'Neill , Donald J. Drake , William G. Hawkins
IPC分类号： B41J2/05 , B41J2/16
CPC分类号： B41J2/1631 , B41J2/1604 , B41J2/1623 , B41J2/1629 , B41J2/1635
摘要： An improved method of fabricating a thermal ink jet printhead of the type produced by the mating of an anisotropically etched silicon substrate containing ink flow directing recesses with a substrate having heating elements and addressing electrodes is disclosed. An etch resistant material on one surface of a (100) silicon substrate is patterned to form at least two sets of vias therein having predetermined sizes, shapes, and predetermined spacing therebetween. The predetermined spacing permits selected complete undercutting by an anisotropic etchant within a predetermined etching time period. The patterned silicon substrate is anisotropically etched for the predetermined time period to form at least two sets of separate recesses, each recess being separated from each other by a wall, the surfaces of the walls being {111} crystal planes of the silicon substrate, whereby certain predetermined separately etched recesses are selectively placed into communication with each other by the selective undercutting while the remainder of the undercut walls provide strengthening reinforcement to the printhead, so that larger printheads may be fabricated which are more robust without relinquishing resolution or reducing tolerances.
摘要翻译：公开了一种改进的制造热喷墨打印头的方法，该喷墨打印头是通过将含有墨流动引导凹槽的各向异性蚀刻的硅基底与具有加热元件和寻址电极的基底配合而制造的。对（100）硅衬底的一个表面上的耐蚀刻材料进行图案化，以形成其中具有预定尺寸，形状和预定间隔的至少两组通孔。预定间隔允许在预定蚀刻时间段内由各向异性蚀刻剂选择的完全底切。图案化的硅衬底在预定的时间周期内被各向异性蚀刻以形成至少两组分离的凹槽，每个凹槽彼此被壁分离，壁的表面是硅衬底的{111}晶面，由此某些预定的单独蚀刻的凹槽通过选择性底切而选择性地彼此连通，而其余的底切壁为打印头提供加强增强，使得可以制造更大的打印头，其更坚固，而不放弃分辨率或减小公差。

10. 发明授权

US4638328A Printhead for an ink jet printer 失效
标题翻译：打印头用于喷墨打印机
公开(公告)号：US4638328A
公开(公告)日：1987-01-20
申请号：US858143
申请日：1986-05-01
申请人： Donald J. Drake , William G. Hawkins , Roger G. Markham , Richard V. LaDonna
发明人： Donald J. Drake , William G. Hawkins , Roger G. Markham , Richard V. LaDonna
IPC分类号： B41J2/015 , B41J2/02 , B41J2/075 , G01D15/18
CPC分类号： B41J2/02 , B41J2002/14379 , B41J2202/16
摘要： A continuous stream type ink jet printhead utilizing constant thermal pulses to perturbate the ink streams emitted through a plurality of nozzles to break up the ink streams into droplets at a fixed distance from the nozzles whereat the drops are individually charged by a charging electrode in accordance with digitized data signals. Each printhead has a manifold, a plurality of ink channels communicating at one end with the manifold and terminating at the other end with nozzles, and at least one resistor addressed by a predetermined frequency of current pulses for applying thermal pulses to the ink. In one embodiment, a resistor is positioned in each of the channels adjacent the nozzles and in another embodiment, a single resistor is located in the ink manifold. The resistors are pulsed at low power to generate a perturbation of ink properties such as density, viscosity, or surface tension without producing a phase change in the ink.
摘要翻译：连续流式喷墨打印头，其使用恒定的热脉冲来扰动通过多个喷嘴发射的油墨流，以将墨水流从与喷嘴相距固定距离的液滴分散成液滴，在该喷嘴处，液滴由充电电极根据数字化数据信号。每个打印头具有歧管，多个墨水通道在一端与歧管连通并且在另一端处以喷嘴终止，并且至少一个电阻器由预定频率的电流脉冲寻址，以将热脉冲施加到墨水。在一个实施例中，电阻器位于与喷嘴相邻的每个通道中，并且在另一个实施例中，单个电阻器位于墨水歧管中。电阻器以低功率脉冲以产生油墨性质（例如密度，粘度或表面张力）的扰动，而不会导致油墨中的相变。

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