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1. 发明申请

US20080317140A1 Method of Converting a User Bitstream Into Coded Bitstream, Method for Detecting a Synchronization Pattern in a Signal, a Record Carier, a Signal, a Recording Device and a Playback Device 审中-公开
标题翻译：将用户比特流转换为编码比特流的方法，用于检测信号中的同步模式的方法，记录卡尔，信号，记录装置和播放装置
公开(公告)号：US20080317140A1
公开(公告)日：2008-12-25
申请号：US11575138
申请日：2005-09-12
申请人： Willem Marie Julia Marcel Coene , Andries Pieter Hekstra , Alexander Padiy
发明人： Willem Marie Julia Marcel Coene , Andries Pieter Hekstra , Alexander Padiy
IPC分类号： H04B14/04
CPC分类号： H03M5/145 , G11B20/10009 , G11B20/1426 , G11B27/105 , G11B27/3027 , G11B2020/1453
摘要： This ID proposes synchronization patterns for RLL codes with a (repeated) minimum transition run (RMTR) constraint, where the synchronization pattern comprises a synchronization pattern-body that contains a characteristic bit-pattern that represents a violation of the RMTR constraint. Using a violation of the RMTR constraint allows for short synchronization patterns.
摘要翻译：该ID提出具有（重复的）最小过渡运行（RMTR）约束的RLL代码的同步模式，其中同步模式包括包含表示违反RMTR约束的特征位模式的同步模式体。使用违反RMTR约束允许短同步模式。

2. 发明申请

US20080316071A1 Modulation Coding with Rll (1,K) and Mtr (2) Constraints 审中-公开
标题翻译：用Rll（1，K）和Mtr（2）约束的调制编码
公开(公告)号：US20080316071A1
公开(公告)日：2008-12-25
申请号：US11575078
申请日：2005-09-09
申请人： Willem Marie Julia Marcel Coene , Alexander Padiy
发明人： Willem Marie Julia Marcel Coene , Alexander Padiy
IPC分类号： H03M7/46
CPC分类号： G11B20/10009 , G11B20/10194 , G11B20/1426 , G11B2020/1453 , H03M5/145
摘要： This invention relates to a method of converting a user bitstream into a coded bitstream by means of a runlengh limited (d, k) channel code where the channel code has a constraint of d=1. In order to ensure an improvement in bit detection performance an additional RMTR constraint of r=2 is imposed limiting to two the maximum number of minimum runs allowed by the d=1 constraint. An additional advantage of such a code is a limitation of the back-tracking depth of a Viterbi bit-detector Based on two different k constraints the construction of such d=1 and r=2 codes is disclosed.
摘要翻译：本发明涉及一种通过利用限制（d，k）信道码将用户比特流转换为编码比特流的方法，其中信道码具有d = 1的约束。为了确保位检测性能的提高，r = 2的附加RMTR约束被强制限制为由d = 1约束允许的最大最小数目的两个。这种代码的另外的优点是维特比比特检测器的反向跟踪深度的限制基于两个不同的k约束，公开了这样的d = 1和r = 2代码的构造。

3. 发明申请

US20090028031A1 METHOD AND APPARATUS FOR WRITING/READING AN INFORMATION CARRIER AND SUCH AN INFORMATION CARRIER 审中-公开
标题翻译：用于书写/阅读信息载体和这种信息载体的方法和装置
公开(公告)号：US20090028031A1
公开(公告)日：2009-01-29
申请号：US12282179
申请日：2007-03-05
申请人： Rong Liu , Goossens Henk , Willem Marie Julia Marcel Coene
发明人： Rong Liu , Goossens Henk , Willem Marie Julia Marcel Coene
IPC分类号： G11B7/00
CPC分类号： G11B20/10 , G11B7/14 , G11B20/10527 , G11B20/12 , G11B20/1217 , G11B2020/1062 , G11B2020/10759 , G11B2020/1222 , G11B2020/1294 , G11B2220/2541 , G11B2220/2562
摘要： Proposed is a method and apparatus for writing/reading a data block onto/from an information carrier with M-spots schemes and such an information carrier. The method comprises the steps of dividing the data block into N portions according to predetermined writing capacities for each one of the N writers of the M-spots schemes, N and M being integers not less than 2 and N
摘要翻译：提出了一种用于使用M点方案和这种信息载体将数据块写入/读出信息载体的方法和装置。该方法包括以下步骤：根据M点方案的N个写入者中的每一个的预定写入容量将数据块划分成N个部分，N和M是不小于2的整数，N <= M，并且同时写入 N个作者相应地将N个数据分组到信息载体上。由于所有写入器正在处理一个数据块的不同部分，所以处理一个数据块的数据速率几乎增加了N倍。因此，数据块占用的某个缓冲器容量的周期大幅度降低，总缓冲容量可能减少，这意味着方案的成本大幅下降。

4. 发明申请

US20090015446A1 Coder and a Method of Coding For Codes With a Parity-Complementary Word Assignment Having a Constraint of D1=,R=2 有权
标题翻译：编码器和编码代码的方法，其中具有约束D1 =，R = 2的奇偶互补字分配
公开(公告)号：US20090015446A1
公开(公告)日：2009-01-15
申请号：US12097570
申请日：2006-12-08
申请人： Willem Marie Julia Marcel Coene , Andries Pieter Hekstra , Hiroyuki Yamagishi , Makoto Noda
发明人： Willem Marie Julia Marcel Coene , Andries Pieter Hekstra , Hiroyuki Yamagishi , Makoto Noda
IPC分类号： H03M7/00
CPC分类号： G11B20/1426 , G11B20/10055 , G11B20/10296 , G11B2020/1453 , G11B2020/1457 , H03M5/145 , H03M7/40 , H03M13/29 , H03M13/31 , H03M13/3761 , H03M13/3972 , H03M13/41
摘要： Presently known d=1 codes have long trains consisting of consecutive 2T runs and an overall high frequency of occurrence of the shortest 2T runs that reduce the performance of the bit detector By using a code with an MTR constraint of 2 an improvement in the bit detection is achieved. A code constructed in a systematic way that provides an MTR constraint of 2 is presented. A variation of such a code is disclosed where one sub-code is used, where coding states are divided into coding classes and where code words are divided into code word types. Then, for a given sub-code, an code word of type t can be concatenated with an code word of the next sub-code if said subsequent code word of said next sub-code belongs to one of coding states of the coding class with index Tmax+1 t. In the code according to the invention the overall code has the property that the respective channel bit sequences that are encoded from the same message-bit sequence, starting from any possible state of the finite-state-machine, for each of the two values of a DC-control bit, that is part of a given user word have opposite parities for the sequences generated from the starting state up to the state where both encoder paths merge. For the case that the encoder paths do not merge, there is no such constraint. Finally, a new d=1, k=10 sliding-block decodable RLL code is disclosed with the following properties: (i) it has an r=2 constraint which is the lowest MTR value that is compatible with a rate R=⅔; (ii) it enables practical SISO-RLL decoding because of its compact 2-to-3 mapping; and (iii) the new code uses a parity-complementary word assignment4 (PCWA) for DC-control.
摘要翻译：目前已知的d = 1代码具有由连续的2T运行组成的长列，并且总体出现最短的2T运行的频率，从而降低位检测器的性能通过使用MTR约束为2的代码，改进了位检测已完成。提出了一种以系统方式构建的代码，其提供MTR约束为2的代码。公开了这样的代码的变型，其中使用一个子代码，其中编码状态被分为编码类别以及代码字被分成代码字类型。然后，对于给定子码，如果所述下一子码的所述后续码字属于编码类的编码状态之一，则可以将类型t的码字与下一子码的码字连接，指数Tmax + 1t。在根据本发明的代码中，总代码具有以下特性：从相同消息比特序列编码的各个信道比特序列，从有限状态机的任何可能状态开始，对于两个值的作为给定用户字的一部分的DC控制位对于从起始状态直到两个编码器路径合并的状态产生的序列具有相反的奇偶校验。对于编码器路径不合并的情况，没有这样的限制。最后，公开了一种新的d = 1，k = 10滑块可解码的RLL码，具有以下特性：（i）它具有r = 2约束，其是与速率R = 2 / 3; （ii）由于其紧凑的2对3映射，它使实用的SISO-RLL解码成为可能; 和（iii）新的代码使用奇偶互补字分配4（PCWA）进行DC控制。

5. 发明授权

US07403138B2 Coder and a method of coding for codes having a Repeated Maximum Transition Run constraint of 2 失效
标题翻译：编码器和编码具有重复最大转换运行约束的代码的方法2
公开(公告)号：US07403138B2
公开(公告)日：2008-07-22
申请号：US11575079
申请日：2005-09-08
申请人： Willem Marie Julia Marcel Coene
发明人： Willem Marie Julia Marcel Coene
IPC分类号： H03M5/00
CPC分类号： G11B20/1426 , G11B2020/1453 , H03M5/145
摘要： Presently known codes have long trains consisting of 2T runs that reduce the performance of the bit detector. By using a code with an RMTR constraint of 2 an improvement in the bit detection is achieved. A code constructed is a systematic way that provides an RMTR constraint of 2 is presented. Several variations of such a code are disclosed where one or more sub-codes are used, where coding states are divided into coding classes and where code words are divided into code word types. Then, for a given sub-code, a code word type t can be concatenated with a code word of the next sub-code if the subsequent code word of the next sub-code belongs to one of coding states of the coding class with index Tmax+1−t.
摘要翻译：目前已知的代码具有由2T运行组成的长列车，降低了位检测器的性能。通过使用RMTR约束为2的代码，实现了位检测的改进。构建的代码是提供RMTR约束为2的系统方法。公开了这样的代码的几个变型，其中使用一个或多个子代码，其中编码状态被分为编码类别以及代码字被划分为代码字类型。然后，对于给定的子代码，如果下一子代码的后续代码字属于具有索引的编码类的编码状态之一，则代码字类型t可以与下一子代码的代码字连接最大+ 1-t。

6. 发明授权

US07068574B2 Record carrier, playback apparatus and information system comprising a record carrier and a playback apparatus 有权
公开(公告)号：US07068574B2
公开(公告)日：2006-06-27
申请号：US09897331
申请日：2001-07-02
申请人： Job Cornelis Oostveen , Willem Marie Julia Marcel Coene , Jan Harm De Boer , Franciscus Antonius Johannes Kamperman , Aloysius Michael Josephus Maria Spruijt , Paulus Reinier Joannes Van Roosmalen
发明人： Job Cornelis Oostveen , Willem Marie Julia Marcel Coene , Jan Harm De Boer , Franciscus Antonius Johannes Kamperman , Aloysius Michael Josephus Maria Spruijt , Paulus Reinier Joannes Van Roosmalen
IPC分类号： G11B7/00
CPC分类号： G11B20/00594 , G11B7/0053 , G11B20/00086 , G11B20/00586 , G11B20/00601 , G11B20/1403
摘要： An information system according to the invention comprises a record carrier and a playback apparatus. The record carrier has information marks along a track thereof and exhibits first variations caused by existence and nonexistence of the information marks along the track. The first variations represent an information signal recorded on said record carrier. The record carrier further exhibits second variations caused by variations associated with the information marks. The phase of the second variations is coupled to the phase of the first variations.

7. 发明授权

US09081304B2 Substrate, an inspection apparatus, and a lithographic apparatus 有权
标题翻译：基板，检查装置和光刻设备
公开(公告)号：US09081304B2
公开(公告)日：2015-07-14
申请号：US13059408
申请日：2009-07-09
申请人： Hendrik Jan Hidde Smilde , Willem Marie Julia Marcel Coene
发明人： Hendrik Jan Hidde Smilde , Willem Marie Julia Marcel Coene
IPC分类号： G03B27/42 , G03F7/20
CPC分类号： G03F7/70683 , G03F7/70625 , G03F7/70633 , Y10T428/24802
摘要： A target for measuring an overlay error or a critical dimension of a substrate comprises a grating. In one example, lines of the grating are arranged at an angle of about 45° with respect to edges of the target. As a consequence, the diffraction order of the grating reflection has its sub-maxima not aligned along the line on which the other diffraction orders are positioned, and overlap of intensity with other diffraction orders is reduced.
摘要翻译：用于测量衬底的重叠误差或临界尺寸的目标包括光栅。在一个示例中，光栅的线相对于目标的边缘以大约45°的角度布置。因此，光栅反射的衍射级别具有沿其它衍射级所在的线不对准的亚极大值，并且强度与其他衍射级的重叠减小。

8. 发明申请

US20110178785A1 Calibration Method and Apparatus 有权
标题翻译：校准方法和装置
公开(公告)号：US20110178785A1
公开(公告)日：2011-07-21
申请号：US12973248
申请日：2010-12-20
申请人： Patricius Aloysius Jacobus TINNEMANS , Henricus Petrus Maria Pellemans , Gerbrand Van Der Zouw , Willem Marie Julia Marcel Coene
发明人： Patricius Aloysius Jacobus TINNEMANS , Henricus Petrus Maria Pellemans , Gerbrand Van Der Zouw , Willem Marie Julia Marcel Coene
IPC分类号： G06F17/10
CPC分类号： G01N21/93 , G01N21/4785 , G01N21/4788
摘要： Calibration of an angularly resolved scatterometer is performed by measuring a target in two or more different arrangements. The different arrangements cause radiation being measured in an outgoing direction to be different combinations of radiation illuminating the target from ingoing directions. A reference mirror measurement may also be performed. The measurements and modeling of the difference between the first and second arrangements is used to estimate separately properties of the ingoing and outgoing optical systems. The modeling may account for symmetry of the respective periodic target. The modeling typically accounts for polarizing effects of the ingoing optical elements, the outgoing optical elements and the respective periodic target. The polarizing effects may be described in the modeling by Jones calculus or Mueller calculus. The modeling may include a parameterization in terms of basis functions such as Zernike polynomials.
摘要翻译：角度分辨散射仪的校准是通过以两种或多种不同布置测量目标进行的。不同的布置导致在输出方向上测量的辐射是将目标与入射方向照射的辐射的不同组合。还可以执行参考镜测量。使用第一和第二布置之间的差异的测量和建模来分别估计输入和输出光学系统的特性。建模可以考虑相应周期性目标的对称性。该模型通常考虑入射光学元件，输出光学元件和相应周期性靶的偏振效应。极化效应可以在由琼斯微积分或米勒微积分建模中描述。该建模可以包括基于诸如Zernike多项式的基函数的参数化。

9. 发明申请

US20110043791A1 Metrology Method and Apparatus, Lithographic Apparatus, Device Manufacturing Method and Substrate 有权
标题翻译：计量方法和装置，平版印刷装置，装置制造方法和基板
公开(公告)号：US20110043791A1
公开(公告)日：2011-02-24
申请号：US12855394
申请日：2010-08-12
申请人： Hendrik Jan Hidde Smilde , Arno Jan Bleeker , Arie Jeffrey Den Boef , Armand Eugene Albert Koolen , Henricus Petrus Maria Pellemans , Reinder Teun Plug , Willem Marie Julia Marcel Coene
发明人： Hendrik Jan Hidde Smilde , Arno Jan Bleeker , Arie Jeffrey Den Boef , Armand Eugene Albert Koolen , Henricus Petrus Maria Pellemans , Reinder Teun Plug , Willem Marie Julia Marcel Coene
IPC分类号： G01N21/41
CPC分类号： G03F7/70633 , G03F7/70616
摘要： A metrology apparatus is arranged to illuminate a plurality of targets with an off-axis illumination mode. Images of the targets are obtained using only one first order diffracted beam. Where the target is a composite grating, overlay measurements can be obtained from the intensities of the images of the different gratings. Overlay measurements can be corrected for errors caused by variations in the position of the gratings in an image field.
摘要翻译：计量装置被布置成以离轴照明模式照亮多个目标。仅使用一个一阶衍射光束获得目标图像。在目标是复合光栅的地方，可以从不同光栅的图像的强度获得覆盖测量。可以对由图像场中的光栅位置的变化引起的误差来校正叠加测量。

10. 发明申请

US20110001978A1 Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method 失效
标题翻译：检验方法和装置，平版印刷设备，平版印刷加工单元和器件制造方法
公开(公告)号：US20110001978A1
公开(公告)日：2011-01-06
申请号：US12822422
申请日：2010-06-24
申请人： Hendrik Jan Hidde SMILDE , Willem Marie Julia Marcel Coene
发明人： Hendrik Jan Hidde SMILDE , Willem Marie Julia Marcel Coene
IPC分类号： G01N21/47
CPC分类号： G03F7/70633 , G03F7/705 , G03F7/70516
摘要： A method of determining an overlay error between two successive layers produced by a lithographic process on a substrate, including using the lithographic process to form a calibration structure including a periodic structure of the same pitch on each of the layers, such that an overlaid pair of periodic structures is formed, the structures being parallel, but offset relative to each other by an overlay amount. A spectrum produced by directing a beam of radiation onto the calibration structure is measured and compared with one or more modeled spectra so as to determine values of the grating parameters for the calibration structure from the measured spectrum. The lithographic process is used to form further overlaid periodic structures on the same or one or more subsequent substrates, the determined grating parameter values for the calibration structure being used to determine overlay amounts for the further overlaid periodic structures.
摘要翻译：一种确定由光刻工艺在衬底上产生的两个连续层之间的重叠误差的方法，包括使用光刻工艺形成包括在每个层上的相同间距的周期性结构的校准结构，使得重叠的一对形成周期性结构，结构是平行的，但是相对于彼此偏移了重叠量。测量通过将辐射束引导到校准结构上产生的光谱，并将其与一个或多个建模光谱进行比较，以便根据测量的光谱确定校准结构的光栅参数的值。光刻工艺用于在相同或一个或多个后续衬底上形成进一步覆盖的周期性结构，所确定的校准结构的光栅参数值用于确定进一步覆盖的周期性结构的重叠量。

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