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2. 发明申请

US20080252908A1 CONTROLLING A FABRICATION TOOL USING SUPPORT VECTOR MACHINE 失效
标题翻译：使用支持矢量机控制制造工具
公开(公告)号：US20080252908A1
公开(公告)日：2008-10-16
申请号：US12120148
申请日：2008-05-13
申请人： Wen JIN , Junwei BAO , Shifang LI , Manuel MADRIAGA
发明人： Wen JIN , Junwei BAO , Shifang LI , Manuel MADRIAGA
IPC分类号： G01B11/02
CPC分类号： G03F7/70616 , G03F7/70491
摘要： A fabrication tool can be controlled using a support vector machine. A profile model of the structure is obtained. The profile model is defined by profile parameters that characterize the geometric shape of the structure. A set of values for the profile parameters is obtained. A set of simulated diffraction signals is generated using the set of values for the profile parameters, each simulated diffraction signal characterizing the behavior of light diffracted from the structure. The support vector machine is trained using the set of simulated diffraction signals as inputs to the support vector machine and the set of values for the profile parameters as expected outputs of the support vector machine. After the support vector machine has been trained, a fabrication process is performed using the fabrication tool to fabricate the structure on the wafer. A measured diffraction signal off the structure is obtained. The measured diffraction signal is inputted into the trained support vector machine. Values of profile parameters of the structure are obtained as an output from the trained support vector machine. One or more process parameters or equipment settings of the fabrication tool are adjusted based on the obtained values of the profile parameters.
摘要翻译：可以使用支持向量机来控制制造工具。获得结构的轮廓模型。轮廓模型由表征结构几何形状的轮廓参数定义。获得一组轮廓参数的值。使用一组轮廓参数的值来生成一组模拟衍射信号，每个模拟衍射信号表征从结构衍射的光的行为。使用一组模拟衍射信号作为支持向量机的输入和用于轮廓参数的值的集合来支持支持向量机作为支持向量机的预期输出。在支持向量机已经被训练之后，使用制造工具执行制造工艺以制造晶片上的结构。获得离开结构的测量的衍射信号。测量的衍射信号被输入到经过训练的支持向量机中。获得结构的轮廓参数的值作为训练支持向量机的输出。基于获得的轮廓参数的值来调整制造工具的一个或多个过程参数或设备设置。

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