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1. 发明授权

US07852889B2 Active spectral control of DUV light source 有权
标题翻译： DUV光源的主动光谱控制
公开(公告)号：US07852889B2
公开(公告)日：2010-12-14
申请号：US11510037
申请日：2006-08-25
申请人： Wayne J. Dunstan , Robert N. Jacques , Rajasekhar M. Rao , Fedor B. Trintchouk
发明人： Wayne J. Dunstan , Robert N. Jacques , Rajasekhar M. Rao , Fedor B. Trintchouk
IPC分类号： H01S3/086 , H01S3/097 , H01S3/1055 , H01S3/22
CPC分类号： H01S3/13 , G03F7/70575 , H01S3/134 , H01S3/136
摘要： According to aspects of an embodiment of the disclosed subject matter, a line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control method and apparatus are disclosed which may comprise a bandwidth metrology module measuring the bandwidth of a laser output flight pulse beam pulse produced by the light source and providing a bandwidth measurement; a bandwidth error signal generator receiving the bandwidth measurement and a bandwidth setpoint and providing a bandwidth error signal; an active bandwidth controller providing a fine bandwidth correction actuator signal and a coarse bandwidth correction actuator signal responsive to the bandwidth error. The fine bandwidth correction actuator and the coarse bandwidth correction actuator each may induce a respective modification of the light source behavior that reduces bandwidth error. The coarse and fine bandwidth correction actuators each may comprise a plurality of bandwidth correction actuators.
摘要翻译：根据所公开的主题的实施例的方面，公开了一种窄的高平均功率高脉冲重复激光微光刻光源带宽控制方法和装置，其可以包括测量激光输出飞行脉冲带宽的带宽测量模块由光源产生的光束脉冲并提供带宽测量; 接收带宽测量和带宽设定点并提供带宽误差信号的带宽误差信号发生器; 有源带宽控制器提供精细的带宽校正致动器信号和响应于带宽误差的粗略带宽校正致动器信号。精细带宽校正致动器和粗带宽校正致动器各自可以引起减少带宽误差的光源特性的相应修改。粗略和精细带宽校正致动器各自可以包括多个带宽校正致动器。

2. 发明申请

US20070195836A1 Active spectral control of DUV light source 有权
标题翻译： DUV光源的主动光谱控制
公开(公告)号：US20070195836A1
公开(公告)日：2007-08-23
申请号：US11510037
申请日：2006-08-25
申请人： Wayne J. Dunstan , Robert N. Jacques , Rajasekhar M. Rao , Fedor B. Trintchouk
发明人： Wayne J. Dunstan , Robert N. Jacques , Rajasekhar M. Rao , Fedor B. Trintchouk
IPC分类号： H01S3/13
CPC分类号： H01S3/13 , G03F7/70575 , H01S3/134 , H01S3/136
摘要： According to aspects of an embodiment of the disclosed subject matter, a line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control method and apparatus are disclosed which may comprise a bandwidth metrology module measuring the bandwidth of a laser output flight pulse beam pulse produced by the light source and providing a bandwidth measurement; a bandwidth error signal generator receiving the bandwidth measurement and a bandwidth setpoint and providing a bandwidth error signal; an active bandwidth controller providing a fine bandwidth correction actuator signal and a coarse bandwidth correction actuator signal responsive to the bandwidth error. The fine bandwidth correction actuator and the coarse bandwidth correction actuator each may induce a respective modification of the light source behavior that reduces bandwidth error. The coarse and fine bandwidth correction actuators each may comprise a plurality of bandwidth correction actuators.
摘要翻译：根据所公开的主题的实施例的方面，公开了一种窄的高平均功率高脉冲重复激光微光刻光源带宽控制方法和装置，其可以包括测量激光输出飞行脉冲带宽的带宽测量模块由光源产生的光束脉冲并提供带宽测量; 接收带宽测量和带宽设定点并提供带宽误差信号的带宽误差信号发生器; 有源带宽控制器提供精细的带宽校正致动器信号和响应于带宽误差的粗略带宽校正致动器信号。精细带宽校正致动器和粗带宽校正致动器各自可以引起减少带宽误差的光源特性的相应修改。粗略和精细带宽校正致动器各自可以包括多个带宽校正致动器。

3. 发明授权

US07741639B2 Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control 有权
标题翻译：多室准分子或分子氟气放电激光氟注射控制
公开(公告)号：US07741639B2
公开(公告)日：2010-06-22
申请号：US10953100
申请日：2004-09-29
申请人： Herve A. Besaucele , Wayne J. Dunstan , Toshihiko Ishihara , Robert N. Jacques , Fedor B. Trintchouk
发明人： Herve A. Besaucele , Wayne J. Dunstan , Toshihiko Ishihara , Robert N. Jacques , Fedor B. Trintchouk
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/225 , H01S3/2316 , H01S3/2366
摘要： A multi-chambered excimer or molecular halogen gas discharge laser system comprising at least one oscillator chamber and at least one amplifier chamber producing oscillator output laser light pulses that are amplified in the at least one power chamber, having a fluorine injection control system and a method of using same is disclosed, which may comprise: a halogen gas consumption estimator: estimating the amount of halogen gas that has been consumed in one of the at least one oscillator chamber based upon at least a first operating parameter of one of the least one oscillator chamber and the at least one amplifier chamber, and the difference between a second operating parameter of the at least one oscillator chamber and the at least one amplifier chamber, and estimating the amount of halogen gas that has been consumed in the other of the at least one oscillator chamber and the at least one amplifier chamber based upon at least a third operating parameter of the other of the at least one oscillator chamber and the at least one amplifier chamber, and producing an output representative of an estimated halogen gas consumption in the at least one oscillator chamber and of the halogen gas consumption in the at least one amplifier chamber, and a halogen gas injection controller determining the amount of halogen gas injection for the at least one oscillator chamber and the at least one amplifier chamber based upon the estimated fluorine consumption outputs from the fluorine consumption estimator and a cost function comprising a plurality of weighted injection decision determinations.
摘要翻译：一种多腔准分子或分子卤素气体放电激光系统，包括至少一个振荡器室和至少一个产生振荡器的放大器室输出在至少一个功率室中放大的激光脉冲，具有氟注入控制系统和方法其中可以包括：卤素气体消耗估计器：基于至少一个振荡器之一的至少一个振荡器中的至少一个振荡器的至少一个振荡器的至少第一操作参数来估计在所述至少一个振荡器腔室中的一个中消耗的卤素气体的量室和至少一个放大器室，以及所述至少一个振荡器室和所述至少一个放大器室的第二操作参数之间的差异，并且估计至少在另一个中消耗的卤素气体的量基于所述至少一个的另一个的至少第三操作参数，所述至少一个振荡器室和所述至少一个放大器室 e振荡器室和所述至少一个放大器室，并且产生代表所述至少一个振荡器室中的估计的卤素气体消耗量的输出和所述至少一个放大器室中的卤素气体消耗量，以及卤素气体注入控制器确定基于来自氟消耗估计器的估计的氟消耗量输出和包括多个加权喷射判定确定的成本函数，至少一个振荡室和至少一个放大器室的卤素气体喷射量。

4. 发明授权

US07643522B2 Method and apparatus for gas discharge laser bandwidth and center wavelength control 有权
标题翻译：气体放电激光带宽和中心波长控制的方法和装置
公开(公告)号：US07643522B2
公开(公告)日：2010-01-05
申请号：US11254282
申请日：2005-10-20
申请人： Fedor B. Trintchouk , Robert N. Jacques
发明人： Fedor B. Trintchouk , Robert N. Jacques
IPC分类号： H01S3/10 , H01S3/13 , H01S3/00 , H01S3/04 , H01S3/22 , H01S3/223 , H01S3/08
CPC分类号： H01S3/1055 , B82Y10/00 , G03F7/70033 , G03F7/70041 , H01S3/08072 , H01S3/097 , H01S3/10069 , H01S3/225
摘要： A gas discharge laser system bandwidth control mechanism and method of operation for controlling bandwidth in a laser output light pulse generated in the gas discharge laser system is disclosed which may comprise a bandwidth controller which may comprise an active bandwidth adjustment mechanism; a controller actively controlling the active bandwidth adjustment mechanism utilizing an algorithm implementing bandwidth thermal transient correction based upon a model of the impact of laser system operation on the wavefront of the laser light pulse being generated and line narrowed in the laser system as it is incident on the bandwidth adjustment mechanism. The controller algorithm may comprises a function of the power deposition history in at least a portion of an optical train of the gas discharge laser system, e.g., a linear function, e.g., a combination of a plurality of decay functions each comprising a respective decay time constant and a respective coefficient.
摘要翻译：公开了一种气体放电激光器系统带宽控制机构和用于控制在气体放电激光器系统中产生的激光输出光脉冲中的带宽的操作方法，其可以包括带宽控制器，其可以包括有源带宽调整机构; 控制器主动地控制有源带宽调整机制，利用实现带宽热瞬变校正的算法，该算法基于激光系统操作对激光系统中产生的激光光脉冲的波前的影响的模型，并且在激光系统中入射时产生线窄带宽调整机制。控制器算法可以包括在气体放电激光系统的光学系列的至少一部分中的功率沉积历史的功能，例如线性函数，例如多个衰减函数的组合，每个衰减函数包括相应的衰减时间常数和相应的系数。

5. 发明申请

US20110249691A1 METHOD AND APPARATUS FOR CONTROLLING LIGHT BANDWIDTH 有权
标题翻译：控制光束带宽的方法和装置
公开(公告)号：US20110249691A1
公开(公告)日：2011-10-13
申请号：US12755772
申请日：2010-04-07
申请人： Kevin M. O'Brien , Fedor B. Trintchouk
发明人： Kevin M. O'Brien , Fedor B. Trintchouk
IPC分类号： H01S3/10
CPC分类号： H01S3/2308 , H01S3/134 , H01S3/225
摘要： An apparatus includes a light source that produces a light beam, a bandwidth measurement system, a plurality of bandwidth actuation systems, and a control system. Each bandwidth actuation system includes one or more bandwidth actuators and each bandwidth actuation system is connected to an optical feature that is optically coupled to the produced light beam and operable to modify the connected optical feature to select a bandwidth within a bandwidth range of the produced light beam. The control system is connected to the bandwidth measurement system and to the plurality of bandwidth actuation systems. The control system is configured to switch between activating and operating a first bandwidth actuation system and activating and operating a second bandwidth actuation system independently and separately of activating and operating the first bandwidth actuation system based on a provided bandwidth measurement and a selected target bandwidth.
摘要翻译：一种装置包括产生光束的光源，带宽测量系统，多个带宽致动系统和控制系统。每个带宽致动系统包括一个或多个带宽致动器，并且每个带宽致动系统连接到光学特征，该光学特征光学地耦合到所产生的光束并且可操作以修改所连接的光学特征，以在所产生的光的带宽范围内选择带宽光束。控制系统连接到带宽测量系统和多个带宽致动系统。控制系统被配置为在激活和操作第一带宽致动系统之间切换，并且基于所提供的带宽测量和所选择的目标带宽，独立且独立地激活和操作第一带宽致动系统来激活和操作第二带宽致动系统。

6. 发明授权

US08837536B2 Method and apparatus for controlling light bandwidth 有权
标题翻译：用于控制光带宽的方法和装置
公开(公告)号：US08837536B2
公开(公告)日：2014-09-16
申请号：US12755772
申请日：2010-04-07
申请人： Kevin M. O'Brien , Fedor B. Trintchouk
发明人： Kevin M. O'Brien , Fedor B. Trintchouk
IPC分类号： H01S3/10
CPC分类号： H01S3/2308 , H01S3/134 , H01S3/225
摘要： An apparatus includes a light source that produces a light beam, a bandwidth measurement system, a plurality of bandwidth actuation systems, and a control system. Each bandwidth actuation system includes one or more bandwidth actuators and each bandwidth actuation system is connected to an optical feature that is optically coupled to the produced light beam and operable to modify the connected optical feature to select a bandwidth within a bandwidth range of the produced light beam. The control system is connected to the bandwidth measurement system and to the plurality of bandwidth actuation systems. The control system is configured to switch between activating and operating a first bandwidth actuation system and activating and operating a second bandwidth actuation system independently and separately of activating and operating the first bandwidth actuation system based on a provided bandwidth measurement and a selected target bandwidth.
摘要翻译：一种装置包括产生光束的光源，带宽测量系统，多个带宽致动系统和控制系统。每个带宽致动系统包括一个或多个带宽致动器，并且每个带宽致动系统连接到光学特征，该光学特征光学地耦合到所产生的光束并且可操作以修改所连接的光学特征，以在所产生的光的带宽范围内选择带宽光束。控制系统连接到带宽测量系统和多个带宽致动系统。控制系统被配置为在激活和操作第一带宽致动系统之间切换，并且基于所提供的带宽测量和所选择的目标带宽，独立且独立地激活和操作第一带宽致动系统来激活和操作第二带宽致动系统。

7. 发明授权

US07471708B2 Gas discharge laser output light beam parameter control 有权
标题翻译：气体放电激光输出光束参数控制
公开(公告)号：US07471708B2
公开(公告)日：2008-12-30
申请号：US11095293
申请日：2005-03-31
申请人： Herve A. Besaucele , Igor V. Fomenkov , William N. Partlo , Fedor B. Trintchouk , Hao Ton That
发明人： Herve A. Besaucele , Igor V. Fomenkov , William N. Partlo , Fedor B. Trintchouk , Hao Ton That
IPC分类号： H01S3/13 , H01S3/00 , H01S3/22
CPC分类号： H01S3/036 , H01S3/038 , H01S3/097 , H01S3/09702 , H01S3/134
摘要： A line narrowed gas discharge laser system and method of operation are disclosed which may comprise: an oscillator cavity; a laser chamber comprising a chamber housing containing a lasing medium gas; at least one peaking capacitor electrically connected to the chamber housing and to a first one of a pair of electrodes; a second one of the pair of electrodes connected to an opposite terminal of the at least one peaking capacitor; a current return path connected to the chamber housing; the one terminal, the first one of the electrodes, the lasing medium gas, the second one of the electrodes, the current return path and the second terminal forming a head current inductive loop having an inductance unique to the particular head current inductive loop; a spectral quality tuning mechanism comprising a mechanism for changing the particular head current inductive loop inductance value for the particular head current inductance loop.
摘要翻译：公开了一种窄气体放电激光系统和操作方法，其可以包括：振荡器腔; 激光室，包括容纳激光介质气体的腔室; 至少一个峰值电容器电连接到所述腔室壳体和一对电极中的第一电极; 所述一对电极中的第二个连接到所述至少一个峰值电容器的相对端子; 连接到所述腔室壳体的电流返回路径; 一个端子，电极中的第一个，激光介质气体，第二个电极，电流返回路径和第二端子，形成具有特定头电流感应环路特有的电感的磁头电流感应环路; 光谱质量调谐机构包括用于改变特定头电流电感回路的特定头电流感应环电感值的机构。

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