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    • 5. 发明授权
    • Method of wafer level chip scale packaging
    • 晶圆级芯片级封装方法
    • US06368896B2
    • 2002-04-09
    • US09298514
    • 1999-04-23
    • Warren M. FarnworthAlan G. WoodMike Brooks
    • Warren M. FarnworthAlan G. WoodMike Brooks
    • H01L2144
    • H01L23/49827H01L23/4985H01L2224/02333H01L2224/73215H01L2924/09701H01L2924/12044H01L2924/15173
    • A chip scale semiconductor package and a method for fabricating the package are provided. The package includes a semiconductor die and a flex circuit bonded to the face of the die. The flex circuit includes a polymer substrate with a dense array of external contacts, and a pattern of conductors in electrical communication with the external contacts. The package also includes interconnects configured to provide separate electrical paths between die contacts (e.g., bond pads), and the conductors on the flex circuit. Several different embodiments of interconnects are provided including: bumps on the die contacts, bonded to the flex circuit conductors with a conductive adhesive layer; polymer bumps on the conductors, or die contacts, applied in a semi-cured state and then fully cured; solder bumps on the die contacts and conductors, bonded to one another using a bonding tool; rivet-like bonded connections between the conductors and die contacts, formed using metal bumps and a wire bonding or ball bonding apparatus; single point bonded connections between the conductors and die contacts, formed with a bonding tool; and wire bonds between the conductors and die contacts.
    • 提供了一种芯片级半导体封装和一种制造该封装的方法。 该封装包括半导体管芯和连接到管芯的表面的柔性电路。 柔性电路包括具有密集阵列的外部触点的聚合物基板和与外部触点电连通的导体图案。 封装还包括被配置为在管芯触头(例如,焊盘)之间提供分开的电路径的互连件以及柔性电路上的导体。 提供了互连的几个不同实施例,包括:在裸片上的凸起接触,用导电粘合剂层结合到柔性电路导体上; 导体上的聚合物凸块或模具接触件以半固化状态施加,然后完全固化; 使用焊接工具彼此接合的管芯触点和导体上的焊料凸块; 使用金属凸块和引线接合或球焊接装置形成的导体和裸片接触之间的铆钉状接合连接; 导体和裸片接点之间的单点接合连接,用接合工具形成; 以及导体和裸片接触之间的引线键合。
    • 8. 发明授权
    • Semiconductor package including flex circuit, interconnects and dense array external contacts
    • 半导体封装包括柔性电路,互连和密集阵列外部触点
    • US06465877B1
    • 2002-10-15
    • US09536827
    • 2000-03-27
    • Warren M. FarnworthAlan G. WoodMike Brooks
    • Warren M. FarnworthAlan G. WoodMike Brooks
    • H01L23495
    • H01L23/49827H01L23/4985H01L2224/02333H01L2224/73215H01L2924/09701H01L2924/12044H01L2924/15173
    • A chip scale semiconductor package and a method for fabricating the package are provided. The package includes a semiconductor die and a flex circuit bonded to the face of the die. The flex circuit includes a polymer substrate with a dense array of external contacts, and a pattern of conductors in electrical communication with the external contacts. The package also includes interconnects configured to provide separate electrical paths between die contacts (e.g., bond pads), and the conductors on the flex circuit. Several different embodiments of interconnects are provided including: bumps on the die contacts, bonded to the flex circuit conductors with a conductive adhesive layer; polymer bumps on the conductors, or die contacts, applied in a semi-cured state and then fully cured; solder bumps on the die contacts and conductors, bonded to one another using a bonding tool; rivet-like bonded connections between the conductors and die contacts, formed using metal bumps and a wire bonding or ball bonding apparatus; single point bonded connections between the conductors and die contacts, formed with a bonding tool; and wire bonds between the conductors and die contacts.
    • 提供了一种芯片级半导体封装和一种制造该封装的方法。 该封装包括半导体管芯和连接到管芯的表面的柔性电路。 柔性电路包括具有密集阵列的外部触点的聚合物基板和与外部触点电连通的导体图案。 封装还包括被配置为在管芯触头(例如,焊盘)之间提供分开的电路径的互连件以及柔性电路上的导体。 提供了互连的几个不同实施例,包括:在裸片上的凸起接触,用导电粘合剂层结合到柔性电路导体上; 导体上的聚合物凸块或模具接触件以半固化状态施加,然后完全固化; 使用焊接工具彼此接合的管芯触点和导体上的焊料凸块; 使用金属凸块和引线接合或球焊接装置形成的导体和裸片接触之间的铆钉状接合连接; 导体和裸片接点之间的单点接合连接,用接合工具形成; 以及导体和裸片接触之间的引线键合。