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1. 发明授权

US09274087B2 Piezoelectric microcantilever sensors for biosensing 有权
标题翻译：用于生物传感的压电微悬臂传感器
公开(公告)号：US09274087B2
公开(公告)日：2016-03-01
申请号：US14551710
申请日：2014-11-24
申请人： Wan Y. Shih , Wei-Heng Shih , Zuyan Shen , John-Paul McGovern , Qing Zhu , Joseph Capobianco
发明人： Wan Y. Shih , Wei-Heng Shih , Zuyan Shen , John-Paul McGovern , Qing Zhu , Joseph Capobianco
IPC分类号： C12M1/34 , C12M3/00 , C12M1/00 , G01F15/00 , G01N29/02 , G01N29/036 , G01N29/24 , G01N33/543 , G01N33/574 , B82Y5/00 , B82Y35/00
CPC分类号： G01N29/022 , B82Y5/00 , B82Y35/00 , G01N29/036 , G01N29/245 , G01N33/54306 , G01N33/57415 , G01N2291/0255 , G01N2291/0256 , G01N2291/0257 , G01N2291/0427
摘要： A piezoelectric microcantilever for sensing compounds or molecules. The piezoelectric microcantilever, may include at least one electrode, an insulation layer, a receptor, an immobilization layer, a non-piezoelectric layer and a piezoelectric layer The sensor is capable of self actuation and detection. The piezoelectric layer may be constructed from a highly piezoelectric thin lead magnesium niobate-lead titanate film, a highly piezoelectric thin zirconate titanate film, a highly piezoelectric lead-free film. Methods of using the sensors and flow cells and arrays including the sensors are also described.
摘要翻译：用于感测化合物或分子的压电微悬臂梁。压电微悬臂梁可以包括至少一个电极，绝缘层，接收器，固定层，非压电层和压电层。传感器能够自我启动和检测。压电层可以由高压电薄铌酸铅铅钛酸铅膜，高压电性薄锆钛酸盐膜，高压电无铅膜构成。还描述了使用传感器和流动池和包括传感器的阵列的方法。

2. 发明授权

US07992431B2 Piezoelectric microcantilevers and uses in atomic force microscopy 有权
标题翻译：压电微悬臂梁和原子力显微镜的应用
公开(公告)号：US07992431B2
公开(公告)日：2011-08-09
申请号：US11946534
申请日：2007-11-28
申请人： Wan Y. Shih , Wei-Heng Shih , Zuyan Shen , Qing Zhu
发明人： Wan Y. Shih , Wei-Heng Shih , Zuyan Shen , Qing Zhu
IPC分类号： G01B5/28
CPC分类号： G01Q60/38 , B82Y35/00 , G01B9/04 , G01Q10/045 , G01Q20/04 , Y10T29/42
摘要： The invention is direct to a piezoelectric microcantilever for static contact and dynamic noncontact atomic force microscopy which may be carried out in solution. The piezoelectric microcantilever, which includes a piezoelectric layer and a non-piezoelectric layer is capable of self actuation and detection. The piezoelectric layer may be constructed from a lead magnesium niobate-lead titanate (Pb(Mg1/3Nb2/3)O3)0.65—(PbTiO3)0.35(PMN0.65-PT0.35)(PMN-PT), zirconate titanate (PZT)/SiO2 or from any lead-free piezoelectric materials such as doped sodium-potassium niobate-lithium niobate. The piezoelectric layers of the microcantilevers may have dielectric constants of from 1600-3000 and thicknesses below 10 μm. Also disclosed are methods for fabricating microcantilever sensors and methods for atomic force microscopy employing the microcantilevers.
摘要翻译：本发明直接用于静态接触和动态非接触原子力显微镜的压电微悬臂梁，其可以在溶液中进行。包括压电层和非压电层的压电微悬臂梁能够自动启动和检测。压电层可以由铌酸铅镁酸铅（Pb（Mg1 / 3Nb2 / 3）O3）0.65-（PbTiO3）0.35（PMN0.65-PT0.35）（PMN-PT），锆钛酸铅（PZT））/ SiO 2或来自任何无铅压电材料如掺杂的铌酸钠 - 铌酸锂 - 铌酸锂。微悬臂梁的压电层可以具有1600-3000的介电常数和低于10μm的厚度。还公开了用于制造微悬臂梁传感器的方法和使用微悬臂梁的原子力显微镜的方法。

3. 发明申请

US20100051447A1 SOL-GEL PRECURSORS AND METHODS FOR MAKING LEAD-BASED PEROVSKITE FILMS 有权
标题翻译： SOL-GEL前身和制备基于铅的PEROVSKITE膜的方法
公开(公告)号：US20100051447A1
公开(公告)日：2010-03-04
申请号：US12513308
申请日：2007-11-06
申请人： Wei-Heng Shih , Wan Y. Shih , Zuyan Shen , Huidong Li , Xiaotong Gao
发明人： Wei-Heng Shih , Wan Y. Shih , Zuyan Shen , Huidong Li , Xiaotong Gao
IPC分类号： C23C14/08 , B05D3/02
CPC分类号： H01L41/318 , H01L41/094 , H01L41/0973 , H01L41/1875
摘要： A simple, economical sol-gel method was invented to produce thick and dense lead zirconate titanate (PZT) thin films that exhibit the stoichiometric chemical composition and unprecedented electrical and dielectric properties. The PZT films are the foundation of many microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) for micro/nano sensors and actuators applications.
摘要翻译：发明了一种简单经济的溶胶 - 凝胶法，以生产厚而致密的锆钛酸铅（PZT）薄膜，其表现出化学计量的化学成分和前所未有的电和介电性能。 PZT薄膜是用于微/纳米传感器和致动器应用的许多微机电系统（MEMS）和纳米机电系统（NEMS）的基础。

4. 发明授权

US07458265B2 Piezoelectric cantilever sensors 有权
标题翻译：压电悬臂传感器
公开(公告)号：US07458265B2
公开(公告)日：2008-12-02
申请号：US10595570
申请日：2004-10-27
申请人： Wan Y. Shih , Wei-Heng Shih , Zuyan Shen
发明人： Wan Y. Shih , Wei-Heng Shih , Zuyan Shen
IPC分类号： G01N5/04 , G01N25/08
CPC分类号： G01N29/022 , G01N5/02 , G01N29/036 , G01N2291/0255 , G01N2291/0256 , G01N2291/02818 , G01N2291/0422 , G01N2291/0426 , G01N2291/0427
摘要： A piezoelectric cantilever with a non-piezoelectric, or piezoelectric tip useful as mass and viscosity sensors. The change in the cantilever mass can be accurately quantified by monitoring a resonance frequency shift of the cantilever. For bio-detection, antibodies or other specific receptors of target antigens may be immobilized on the cantilever surface, preferably on the non-piezoelectric tip. For chemical detection, high surface-area selective absorbent materials are coated on the cantilever tip. Binding of the target antigens or analytes to the cantilever surface increases the cantilever mass. Detection of target antigens or analytes is achieved by monitoring the cantilever's resonance frequency and determining the resonance frequency shift that is due to the mass of the adsorbed target antigens on the cantilever surface. The use of a piezoelectric unimorph cantilever allows both electrical actuation and electrical sensing. Incorporating a non-piezoelectric tip (14) enhances the sensitivity of the sensor. In addition, the piezoelectric cantilever can withstand damping in highly viscous liquids and can be used as a viscosity sensor in wide viscosity range.
摘要翻译：具有非压电或压电尖端的压电悬臂，可用作质量和粘度传感器。通过监测悬臂的共振频率偏移可以准确量化悬臂质量的变化。为了生物检测，靶抗原的抗体或其他特异性受体可以固定在悬臂表面上，优选地固定在非压电尖端上。对于化学检测，高表面积选择性吸收材料涂覆在悬臂尖端。目标抗原或分析物与悬臂表面的结合增加了悬臂质量。通过监测悬臂的共振频率并确定由于悬臂表面上吸附的靶抗原的质量而引起的共振频移，实现了靶抗原或分析物的检测。使用压电单块悬臂可以实现电致动和电感测。结合非压电尖端（14）增强了传感器的灵敏度。此外，压电悬臂可以承受高粘度液体中的阻尼，可用作宽粘度范围内的粘度传感器。

5. 发明授权

US08927259B2 Piezoelectric microcantilever sensors for biosensing 有权
标题翻译：用于生物传感的压电微悬臂传感器
公开(公告)号：US08927259B2
公开(公告)日：2015-01-06
申请号：US12514941
申请日：2007-11-28
申请人： Wan Y. Shih , Wei-Heng Shih , Zuyan Shen , John-Paul Mcgovern , Qing Zhu , Joseph Capobianco
发明人： Wan Y. Shih , Wei-Heng Shih , Zuyan Shen , John-Paul Mcgovern , Qing Zhu , Joseph Capobianco
IPC分类号： C12M1/34 , C12M3/00 , C12M1/00 , G01F15/00
CPC分类号： G01N29/022 , B82Y5/00 , B82Y35/00 , G01N29/036 , G01N29/245 , G01N33/54306 , G01N33/57415 , G01N2291/0255 , G01N2291/0256 , G01N2291/0257 , G01N2291/0427
摘要： A piezoelectric microcantilever for sensing compounds or molecules. The piezoelectric microcantilever, may include at least one electrode, an insulation layer, a receptor, an immobilization layer, a non-piezoelectric layer and a piezoelectric layer. The sensor is capable of self actuation and detection. The piezoelectric layer may be constructed from a highly piezoelectric thin lead magnesium niobate-lead titanate film, a highly piezoelectric thin zirconate titanate film, a highly piezoelectric lead-free film. Methods of using the sensors and flow cells and arrays including the sensors are also described.
摘要翻译：用于感测化合物或分子的压电微悬臂梁。压电微悬臂梁可以包括至少一个电极，绝缘层，受体，固定层，非压电层和压电层。传感器能够自我启动和检测。压电层可以由高压电薄铌酸铅铅钛酸铅膜，高压电性薄锆钛酸盐膜，高压电无铅膜构成。还描述了使用传感器和流动池和包括传感器的阵列的方法。

6. 发明授权

US09431598B2 Sol-gel precursors and methods for making lead-based perovskite films 有权
标题翻译：溶胶凝胶前体和制备铅基钙钛矿薄膜的方法
公开(公告)号：US09431598B2
公开(公告)日：2016-08-30
申请号：US12513308
申请日：2007-11-06
申请人： Wei-Heng Shih , Wan Y. Shih , Zuyan Shen , Huidong Li , Xiaotong Gao
发明人： Wei-Heng Shih , Wan Y. Shih , Zuyan Shen , Huidong Li , Xiaotong Gao
IPC分类号： H01L41/00 , H01L41/318 , H01L41/187 , H01L41/09
CPC分类号： H01L41/318 , H01L41/094 , H01L41/0973 , H01L41/1875
摘要： A simple, economical sol-gel method was invented to produce thick and dense lead zirconate titanate (PZT) thin films that exhibit the stoichiometric chemical composition and unprecedented electrical and dielectric properties. The PZT films are the foundation of many microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) for micro/nano sensors and actuators applications.
摘要翻译：发明了一种简单经济的溶胶 - 凝胶法，以生产厚而致密的锆钛酸铅（PZT）薄膜，其表现出化学计量的化学成分和前所未有的电和介电性能。 PZT薄膜是用于微/纳米传感器和致动器应用的许多微机电系统（MEMS）和纳米机电系统（NEMS）的基础。

7. 发明授权

US08857248B2 Piezoelectric microcantilevers and uses in atomic force microscopy 有权
标题翻译：压电微悬臂梁和原子力显微镜的应用
公开(公告)号：US08857248B2
公开(公告)日：2014-10-14
申请号：US13160304
申请日：2011-06-14
申请人： Wan Y. Shih , Wei-Heng Shih , Zuyan Shen , Qing Zhu
发明人： Wan Y. Shih , Wei-Heng Shih , Zuyan Shen , Qing Zhu
IPC分类号： G01B5/28 , G01B9/04 , G01Q10/04 , G01Q20/04 , G01Q60/38 , B82Y35/00
CPC分类号： G01Q60/38 , B82Y35/00 , G01B9/04 , G01Q10/045 , G01Q20/04 , Y10T29/42
摘要： The invention is direct to a piezoelectric microcantilever for static contact and dynamic noncontact atomic force microscopy which may be carried out in solution. The piezoelectric microcantilever, which includes a piezoelectric layer and a non-piezoelectric layer is capable of self actuation and detection. The piezoelectric layer may be constructed from a lead magnesium niobate-lead titanate (Pb(Mg1/3Nb2/3)O3)0.65—(PbTiO3)0.35(PMN0.65-PT0.35) (PMN-PT), zirconate titanate (PZT)/SiO2 or from any lead-free piezoelectric materials such as doped sodium-potassium niobate-lithium niobate. The piezoelectric layers of the microcantilevers may have dielectric constants of from 1600-3000 and thicknesses below 10 μm. Also disclosed are methods for fabricating microcantilever sensors and methods for atomic force microscopy employing the microcantilevers.
摘要翻译：本发明直接用于静态接触和动态非接触原子力显微镜的压电微悬臂梁，其可以在溶液中进行。包括压电层和非压电层的压电微悬臂梁能够自动启动和检测。压电层可以由铌酸铅镁酸铅（Pb（Mg1 / 3Nb2 / 3）O3）0.65-（PbTiO3）0.35（PMN0.65-PT0.35）（PMN-PT），锆钛酸铅（PZT））/ SiO 2或来自任何无铅压电材料如掺杂的铌酸钠 - 铌酸锂 - 铌酸锂。微悬臂梁的压电层可以具有1600-3000的介电常数和低于10μm的厚度。还公开了用于制造微悬臂梁传感器的方法和使用微悬臂梁的原子力显微镜的方法。

8. 发明申请

US20100068697A1 PIEZOELECTRIC MICROCANTILEVER SENSORS FOR BIOSENSING 有权
标题翻译：用于生物传感的压电微型传感器
公开(公告)号：US20100068697A1
公开(公告)日：2010-03-18
申请号：US12514941
申请日：2007-11-28
申请人： Wan Y. Shih , Wei-Heng Shih , Zuyan Shen , John-Paul Mcgovern , Qing Zhu , Joseph Capobianco
发明人： Wan Y. Shih , Wei-Heng Shih , Zuyan Shen , John-Paul Mcgovern , Qing Zhu , Joseph Capobianco
IPC分类号： C12Q1/70 , G01N30/00 , G01N33/566 , C12Q1/00 , C12Q1/02
CPC分类号： G01N29/022 , B82Y5/00 , B82Y35/00 , G01N29/036 , G01N29/245 , G01N33/54306 , G01N33/57415 , G01N2291/0255 , G01N2291/0256 , G01N2291/0257 , G01N2291/0427
摘要： A piezoelectric microcantilever for sensing compounds or molecules. The piezoelectric microcantilever, may include at least one electrode, an insulation layer, a receptor, an immobilization layer, a non-piezoelectric layer and a piezoelectric layer The sensor is capable of self actuation and detection. The piezoelectric layer may be constructed from a highly piezoelectric thin lead magnesium niobate-lead titanate film, a highly piezoelectric thin zirconate titanate film, a highly piezoelectric lead-free film. Methods of using the sensors and flow cells and arrays including the sensors are also described.
摘要翻译：用于感测化合物或分子的压电微悬臂梁。压电微悬臂梁可以包括至少一个电极，绝缘层，接收器，固定层，非压电层和压电层。传感器能够自我启动和检测。压电层可以由高压电薄铌酸铅铅钛酸铅膜，高压电性薄锆钛酸盐膜，高压电无铅膜构成。还描述了使用传感器和流动池和包括传感器的阵列的方法。

9. 发明申请

US20070089515A1 Piezoelectric cantilever sensors 有权
标题翻译：压电悬臂传感器
公开(公告)号：US20070089515A1
公开(公告)日：2007-04-26
申请号：US10595570
申请日：2004-10-27
申请人： Wan Shih , Wei-Heng Shih , Zuyan Shen
发明人： Wan Shih , Wei-Heng Shih , Zuyan Shen
IPC分类号： G01H13/00
CPC分类号： G01N29/022 , G01N5/02 , G01N29/036 , G01N2291/0255 , G01N2291/0256 , G01N2291/02818 , G01N2291/0422 , G01N2291/0426 , G01N2291/0427
摘要： A piezoelectric cantilever with a non-piezoelectric, or piezoelectric tip useful as mass and viscosity sensors. The change in the cantilever mass can be accurately quantified by monitoring a resonance frequency shift of the cantilever. For bio-detection, antibodies or other specific receptors of target antigens may be immobilized on the cantilever surface, preferably on the non-piezoelectric tip. For chemical detection, high surface-area selective absorbent materials are coated on the cantilever tip. Binding of the target antigens or analytes to the cantilever surface increases the cantilever mass. Detection of target antigens or analytes is achieved by monitoring the cantilever's resonance frequency and determining the resonance frequency shift that is due to the mass of the adsorbed target antigens on the cantilever surface. The use of a piezoelectric unimorph cantilever allows both electrical actuation and electrical sensing. Incorporating a non-piezoelectric tip (14) enhances the sensitivity of the sensor. In addition, the piezoelectric cantilever can withstand damping in highly viscous liquids and can be used as a viscosity sensor in wide viscosity range.
摘要翻译：具有非压电或压电尖端的压电悬臂，可用作质量和粘度传感器。通过监测悬臂的共振频率偏移可以准确量化悬臂质量的变化。为了生物检测，靶抗原的抗体或其他特异性受体可以固定在悬臂表面上，优选地固定在非压电尖端上。对于化学检测，高表面积选择性吸收材料涂覆在悬臂尖端。目标抗原或分析物与悬臂表面的结合增加了悬臂质量。通过监测悬臂的共振频率并确定由于悬臂表面上吸附的靶抗原的质量而引起的共振频移，实现了靶抗原或分析物的检测。使用压电单块悬臂可以实现电致动和电感测。结合非压电尖端（14）增强了传感器的灵敏度。此外，压电悬臂可以承受高粘度液体中的阻尼，可用作宽粘度范围内的粘度传感器。

10. 发明申请

US20220128551A1 Piezoelectric Plate Sensor and Uses Thereof 有权
公开(公告)号：US20220128551A1
公开(公告)日：2022-04-28
申请号：US17567992
申请日：2022-01-04
申请人： Wan Y. Shih , Wei Wu , Wei-Heng Shih , Mehmet Cagri Soylu , Haitao Guo , Suresh G. Joshi , Ceyhun Ekrim Kirimli , Ying-Hsiu Su
发明人： Wan Y. Shih , Wei Wu , Wei-Heng Shih , Mehmet Cagri Soylu , Haitao Guo , Suresh G. Joshi , Ceyhun Ekrim Kirimli , Ying-Hsiu Su
IPC分类号： G01N33/543 , G01N29/02 , G01N29/036 , C12Q1/6825
摘要： A piezoelectric plate sensor comprising a piezoelectric layer; two electrodes; and an insulation layer. The insulation layer is produced by soaking the piezoelectric layer and two electrodes in a mercaptopropyltrimethoxysilane solution with an amount of water from 0.1 v/v. % to about 1 v/v % and at pH from about 8 to about 150 for a period from about 8 to about 15 hours, and the mercaptopropyltrimethoxysilane solution has a concentration of mercaptopropyltrimethoxysilane from about 0.01 v/v % to about 0.5 v/v %. A method of detecting a biomolecule in a sample using the piezoelectric plate sensor in particular, that of detecting a genetic marker with PCR sensitivity and specificity without the need of DNA isolation or amplification is also provided. The piezoelectric plate sensor may be used to diagnose various diseases including breast cancer, myocardial infarction, diarrhea, Clostridium difficile infection, and hepatitis B infection.

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