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    • 2. 发明申请
    • WIRE BONDER AND METHOD OF CALIBRATING A WIRE BONDER
    • 电线接头和校准线接头的方法
    • US20140209663A1
    • 2014-07-31
    • US14162336
    • 2014-01-23
    • Keng Yew SONGWai Wah LEEYi Bin WANG
    • Keng Yew SONGWai Wah LEEYi Bin WANG
    • H01L23/00
    • H01L24/78H01L24/48H01L24/85H01L2224/48247H01L2224/78268H01L2224/78301H01L2224/78801H01L2224/85045H01L2224/85205H01L2224/859H01L2924/00014H01L2924/12042H01L2224/45099H01L2224/05599H01L2924/00
    • Disclosed is a wire bonder comprising: a processor; a bond head coupled to the processor, the processor being configured to control motion of the bond head; a bonding tool mounted to the bond head, the bonding tool being drivable by the bond head to form an electrical interconnection between a semiconductor die and a substrate to which the semiconductor die is mounted using a bonding wire; and a measuring device coupled to the bond head, the measuring device being operable to measure a deformation of a bonding portion of the bonding wire as the bonding tool is driven by the bond head to connect the bonding wire to the semiconductor die via the bonding portion. Specifically, the processor is configured to derive at least one correlation between the measured deformation of the bonding portion and an operating parameter of the wire bonder; compare the at least one derived correlation against a predetermined correlation between the operating parameter of the wire bonder and a desired deformation of the bonding portion; and calibrate the operating parameter of the wire bonder based on the comparison between the at least one derived correlation and the predetermined correlation of the deformation of the bonding portion against the operating parameter of the wire bonder. A method of calibrating a wire bonder is also disclosed.
    • 公开了一种引线键合机,包括:处理器; 耦合到所述处理器的接合头,所述处理器被配置为控制所述接合头的运动; 粘合工具安装到接合头,所述接合工具可由所述接合头驱动,以在半导体管芯和使用接合线安装所述半导体管芯的衬底之间形成电互连; 以及耦合到所述接合头的测量装置,所述测量装置可操作以在所述接合工具由所述接合头驱动时测量所述接合线的接合部的变形,以通过所述接合部将所述接合线连接到所述半导体管芯 。 具体地,处理器被配置为导出测量的接合部分的变形与引线接合器的操作参数之间的至少一个相关性; 将所述至少一个导出相关性与所述引线接合器的操作参数与所述接合部分的期望变形之间的预定相关性进行比较; 并且基于所述至少一个导出的相关性与所述接合部的变形与所述引线接合器的操作参数的预定相关性之间的比较来校准所述引线接合器的操作参数。 还公开了一种校准引线接合器的方法。