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    • 2. 发明申请
    • Protective Cover for an Acoustic Wave Device and Fabrication Method Thereof
    • 声波装置的保护罩及其制造方法
    • US20170077899A1
    • 2017-03-16
    • US15070383
    • 2016-03-15
    • WIN Semiconductors Corp.
    • Cheng-Kuo LinShu-Hsiao TsaiRong-Hao SyuYi-Ling LiuRe-Ching LinPei-Chun Liao
    • H03H9/10
    • H03H9/1071H03H9/1014
    • A protective cover for an acoustic wave device and a fabrication method thereof, for protecting an acoustic wave device having a resonant area during a packaging operation so as to avoid molding compound flowing onto the resonant area of the acoustic wave device. The fabrication method comprises: defining a sacrificial area on the acoustic wave device; forming a sacrificial layer on the sacrificial area; covering a metal covering layer on the sacrificial layer and connecting a bottom rim of the metal covering layer to the acoustic wave device and forming an opening between the bottom rim of the metal covering layer and the acoustic wave device; and removing the sacrificial layer to form a cavity between the metal covering layer and the resonant area by using a chemical solution, wherein the chemical solution enters from the opening between the metal covering layer and the acoustic wave device.
    • 一种用于在包装操作期间保护具有共振区域的声波装置的声波装置保护罩及其制造方法,以避免模制化合物流入声波装置的谐振区域。 制造方法包括:在声波装置上限定牺牲区域; 在牺牲区上形成牺牲层; 覆盖牺牲层上的金属覆盖层,并将金属覆盖层的底边缘连接到声波器件,并在金属覆盖层的底边缘与声波器件之间形成开口; 并且通过使用化学溶液去除牺牲层以在金属覆盖层和谐振区域之间形成空腔,其中化学溶液从金属覆盖层和声波器件之间的开口进入。