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1. 发明申请

US20180242949A1 ULTRASONIC TRANSDUCER ELECTRODE ASSEMBLY 审中-公开
公开(公告)号：US20180242949A1
公开(公告)日：2018-08-30
申请号：US15965385
申请日：2018-04-27
申请人： VOLCANO CORPORATION
发明人： Cheryl Rice , Dongjuan Chris Xi
IPC分类号： A61B8/00 , B06B1/06 , H01L41/047 , H01L41/08 , H01L41/09 , H01L41/29 , H01L41/31
CPC分类号： A61B8/4483 , A61B8/0891 , A61B8/12 , A61B8/445 , A61B8/4461 , B06B1/0662 , B06B1/0688 , H01L41/047 , H01L41/0472 , H01L41/0477 , H01L41/0825 , H01L41/0973 , H01L41/098 , H01L41/29 , H01L41/31 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49155
摘要： The present disclosure provides a method of fabricating an ultrasound transducer. A substrate having a first side and a second side opposite the first side is provided. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.

2. 发明申请

US20140187956A1 Ultrasonic Transducer Electrode Assembly 有权
公开(公告)号：US20140187956A1
公开(公告)日：2014-07-03
申请号：US14106897
申请日：2013-12-16
申请人： VOLCANO CORPORATION
发明人： Cheryl Rice , Dongjuan Chris Xi
IPC分类号： A61B8/00 , H01L41/25 , A61B8/12 , H01L41/04
CPC分类号： A61B8/4483 , A61B8/0891 , A61B8/12 , A61B8/445 , A61B8/4461 , B06B1/0662 , B06B1/0688 , H01L41/047 , H01L41/0472 , H01L41/0477 , H01L41/0825 , H01L41/0973 , H01L41/098 , H01L41/29 , H01L41/31 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49155
摘要： The present disclosure provides a method of fabricating an ultrasound transducer. A substrate having a first side and a second side opposite the first side is provided. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.

3. 发明授权

US09312470B2 Method of manufacturing an ultrasonic transducer electrode assembly 有权
标题翻译：制造超声波换能器电极组件的方法
公开(公告)号：US09312470B2
公开(公告)日：2016-04-12
申请号：US14106897
申请日：2013-12-16
申请人： Volcano Corporation
发明人： Cheryl Rice , Dongjuan Chris Xi
IPC分类号： H01L41/31 , B06B1/06 , A61B8/00 , H01L41/047 , H01L41/09 , H01L41/29 , A61B8/12 , A61B8/08
CPC分类号： A61B8/4483 , A61B8/0891 , A61B8/12 , A61B8/445 , A61B8/4461 , B06B1/0662 , B06B1/0688 , H01L41/047 , H01L41/0472 , H01L41/0477 , H01L41/0825 , H01L41/0973 , H01L41/098 , H01L41/29 , H01L41/31 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49155
摘要： A method of fabricating an ultrasound transducer includes providing a substrate having a first side and a second side opposite the first side. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.
摘要翻译：制造超声换能器的方法包括提供具有第一侧和与第一侧相对的第二侧的基底。底部电极形成在衬底的第一侧上。在底部电极上形成压电元件。压电元件具有倒角侧壁。顶部电极形成在压电元件上。在靠近压电元件的倒角侧壁的顶部电极的一部分上形成阶梯金属元件。

4. 发明授权

US10357225B2 Ultrasonic transducer electrode assembly 有权
公开(公告)号：US10357225B2
公开(公告)日：2019-07-23
申请号：US15965385
申请日：2018-04-27
申请人： VOLCANO CORPORATION
发明人： Cheryl Rice , Dongjuan Chris Xi
IPC分类号： H01L41/047 , H01L41/09 , A61B8/00 , A61B8/12 , H01L41/31 , H01L41/29 , B06B1/06 , H01L41/08 , A61B8/08
摘要： The present disclosure provides a method of fabricating an ultrasound transducer. A substrate having a first side and a second side opposite the first side is provided. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.

5. 发明申请

US20160220230A1 Ultrasonic Transducer Electrode Assembly 有权
标题翻译：超声波传感器电极组件
公开(公告)号：US20160220230A1
公开(公告)日：2016-08-04
申请号：US15094717
申请日：2016-04-08
申请人： Volcano Corporation
发明人： Cheryl Rice , Dongjuan Chris Xi
IPC分类号： A61B8/00 , H01L41/08 , H01L41/047 , A61B8/12 , H01L41/29
CPC分类号： A61B8/4483 , A61B8/0891 , A61B8/12 , A61B8/445 , A61B8/4461 , B06B1/0662 , B06B1/0688 , H01L41/047 , H01L41/0472 , H01L41/0477 , H01L41/0825 , H01L41/0973 , H01L41/098 , H01L41/29 , H01L41/31 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49155
摘要： The present disclosure provides a method of fabricating an ultrasound transducer. A substrate having a first side and a second side opposite the first side is provided. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.
摘要翻译：本公开提供了一种制造超声换能器的方法。提供具有第一侧和与第一侧相对的第二侧的基板。底部电极形成在衬底的第一侧上。在底部电极上形成压电元件。压电元件具有倒角侧壁。顶部电极形成在压电元件上。在靠近压电元件的倒角侧壁的顶部电极的一部分上形成阶梯金属元件。

6. 发明授权

US09974518B2 Ultrasonic transducer electrode assembly 有权
公开(公告)号：US09974518B2
公开(公告)日：2018-05-22
申请号：US15094717
申请日：2016-04-08
申请人： Volcano Corporation
发明人： Cheryl Rice , Dongjuan Chris Xi
IPC分类号： H01L41/08 , A61B8/00 , A61B8/12 , H01L41/31 , H01L41/047 , H01L41/09 , H01L41/29 , B06B1/06 , A61B8/08
CPC分类号： A61B8/4483 , A61B8/0891 , A61B8/12 , A61B8/445 , A61B8/4461 , B06B1/0662 , B06B1/0688 , H01L41/047 , H01L41/0472 , H01L41/0477 , H01L41/0825 , H01L41/0973 , H01L41/098 , H01L41/29 , H01L41/31 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49155
摘要： The present disclosure provides a method of fabricating an ultrasound transducer. A substrate having a first side and a second side opposite the first side is provided. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.

7. 发明申请

US20140187957A1 Ultrasonic Transducer Electrode Assembly 审中-公开
标题翻译：超声波传感器电极组件
公开(公告)号：US20140187957A1
公开(公告)日：2014-07-03
申请号：US14105787
申请日：2013-12-13
申请人： Volcano Corporation
发明人： Cheryl Rice , Dongjuan Chris Xi
IPC分类号： A61B8/00 , H01L41/31 , H01L41/04
CPC分类号： A61B8/4483 , A61B8/0891 , A61B8/12 , A61B8/445 , A61B8/4461 , B06B1/0662 , B06B1/0688 , H01L41/047 , H01L41/0472 , H01L41/0477 , H01L41/0825 , H01L41/0973 , H01L41/098 , H01L41/29 , H01L41/31 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49155
摘要： The present disclosure provides a method of fabricating an ultrasound transducer. A substrate having a first side and a second side opposite the first side is provided. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.
摘要翻译：本公开提供了一种制造超声换能器的方法。提供具有第一侧和与第一侧相对的第二侧的基板。底部电极形成在衬底的第一侧上。在底部电极上形成压电元件。压电元件具有倒角侧壁。顶部电极形成在压电元件上。在靠近压电元件的倒角侧壁的顶部电极的一部分上形成阶梯金属元件。

8. 发明申请

US20140184027A1 Layout and Method of Singulating Miniature Ultrasonic Transducers 审中-公开
公开(公告)号：US20140184027A1
公开(公告)日：2014-07-03
申请号：US14106899
申请日：2013-12-16
申请人： VOLCANO CORPORATION
发明人： Cheryl Rice , Dongjuan Chris Xi
IPC分类号： H01L41/04 , H01L41/332 , H01L41/16
CPC分类号： H01L41/332 , B06B1/0651 , B06B1/0685 , H01L41/098 , H01L41/193 , H01L41/338
摘要： The present disclosure provides a method of singulating a plurality of miniature ultrasound transducers from a wafer. The method includes receiving a wafer on which a plurality of miniature ultrasound transducers is formed. The miniature ultrasound transducers each include a transducer membrane containing a piezoelectric material. The method includes etching, from a front side of the wafer, a plurality of trenches into the wafer. Each trench at least partially encircles a respective one of the miniature ultrasound transducers in a top view. Each trench includes an approximately rounded segment. The method includes thinning the wafer from a back side opposite the front side. The thinning the wafer is performed such that the trenches are open to the back side. The method includes performing a dicing process to the wafer to separate the miniature ultrasound transducers from one another. The dicing process is performed without making crossing cuts in the wafer.

9. 发明申请

US20140184023A1 Layout and Method of Singulating Miniature Ultrasonic Transducers 审中-公开
标题翻译：微型超声波传感器的布局和方法
公开(公告)号：US20140184023A1
公开(公告)日：2014-07-03
申请号：US14105902
申请日：2013-12-13
申请人： Volcano Corporation
发明人： Cheryl Rice , Dongjuan Chris Xi
IPC分类号： H01L41/04 , H01L41/332 , B06B1/06 , H01L41/053 , H01L41/16
CPC分类号： H01L41/332 , B06B1/0651 , B06B1/0685 , H01L41/098 , H01L41/193 , H01L41/338
摘要： The present disclosure provides a method of singulating a plurality of miniature ultrasound transducers from a wafer. The method includes receiving a wafer on which a plurality of miniature ultrasound transducers is formed. The miniature ultrasound transducers each include a transducer membrane containing a piezoelectric material. The method includes etching, from a front side of the wafer, a plurality of trenches into the wafer. Each trench at least partially encircles a respective one of the miniature ultrasound transducers in a top view. Each trench includes an approximately rounded segment. The method includes thinning the wafer from a back side opposite the front side. The thinning the wafer is performed such that the trenches are open to the back side. The method includes performing a dicing process to the wafer to separate the miniature ultrasound transducers from one another. The dicing process is performed without making crossing cuts in the wafer.
摘要翻译：本公开提供了一种从晶片分离多个微型超声换能器的方法。该方法包括接收其上形成有多个微型超声换能器的晶片。微型超声波换能器包括含有压电材料的换能器膜。该方法包括从晶片的前侧蚀刻多个沟槽进入晶片。在顶视图中，每个沟槽至少部分地围绕相应的一个微型超声换能器。每个沟槽包括近似圆形的段。该方法包括从与前侧相反的背面使晶片变薄。执行晶片的薄化，使得沟槽向后侧开放。该方法包括对晶片执行切割处理以将微型超声换能器彼此分离。切割过程在晶片上不进行交叉切割的情况下进行。

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