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    • 10. 发明授权
    • Apparatus for deposition of thin-film, solid state batteries
    • 用于沉积薄膜,固态电池的设备
    • US5411592A
    • 1995-05-02
    • US254392
    • 1994-06-06
    • Stanford R. OvshinskyHerbert OvshinskyRosa Young
    • Stanford R. OvshinskyHerbert OvshinskyRosa Young
    • C23C14/56C23C16/54H01M6/18H01M6/40H01M10/34C23C16/00H01M4/00H01M6/00
    • C23C14/562C23C16/545H01M6/188H01M10/345H01M6/181H01M6/40
    • A multi-chambered deposition apparatus for depositing solid-state, thin-film battery materials onto substrate material. The apparatus minimally includes at least three distinct evacuable deposition chambers, which are physically interconnected in series. The first deposition chamber is adapted to deposit a layer of battery electrode material having a first polarity onto the substrate. The second deposition chamber is adapted to deposit a layer of solid-state electrolyte material onto the layer of battery electrode material deposited in the first chamber. The third deposition chamber is adapted to deposit a layer of battery electrode material having an opposite polarity from that deposited in the first chamber onto the solid-state electrolyte. The deposition chambers are interconnected by gas gates such that the substrate material is allowed to proceed from one deposition chamber to the next, while maintaining gaseous segregation between the chambers.
    • 一种用于将固态薄膜电池材料沉积到基底材料上的多室沉积设备。 该装置最低限度地包括至少三个不同的可抽空的沉积室,它们在物理上互相串联连接。 第一沉积室适于将具有第一极性的电池电极材料层沉积到衬底上。 第二沉积室适于将沉积在第一室中的电池电极材料层上沉积固体电解质材料层。 第三沉积室适于将具有与沉积在第一室中的极性相反极性的电池电极材料层沉积到固态电解质上。 沉积室通过气门互连,使得允许衬底材料从一个沉积室进入下一个沉积室,同时保持室之间的气体分离。