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    • 1. 发明授权
    • Piezoelectric sensors
    • 压电传感器
    • US08102101B2
    • 2012-01-24
    • US12359486
    • 2009-01-26
    • Victor GiurgiutiuJames R. Kendall
    • Victor GiurgiutiuJames R. Kendall
    • H01L41/08
    • H01L41/1132B06B1/0692G01H11/08G01N29/043G01N29/069G01N29/2437G01N29/2475G01N29/262G01N2291/0258G01N2291/0427G01N2291/106Y10T29/42
    • A piezoelectric sensor having a plurality of electrodes deposited on a single surface of the dielectric medium is generally provided. The plurality of electrodes can define a plurality of square-shaped electrodes forming a grid on the first surface of the dielectric medium while the second electrode defines a continuous electrode. An electrode border surrounding the plurality of electrodes can be deposited on the first surface of the dielectric medium. Alternatively, the plurality of electrodes can define column-shaped electrodes, while the second electrode defines a plurality of row-shaped electrodes separated by etchings. The direction of orientation of each column-shaped electrode and the direction of orientation of each row-shaped electrode can be substantially perpendicular. A method of making a piezoelectric sensor is also provided.
    • 通常提供具有沉积在电介质的单个表面上的多个电极的压电传感器。 多个电极可以限定在电介质的第一表面上形成网格的多个方形电极,而第二电极限定连续电极。 围绕多个电极的电极边界可以沉积在电介质的第一表面上。 或者,多个电极可以限定列形电极,而第二电极限定多个通过蚀刻分隔的行状电极。 每个柱状电极的取向方向和每个行状电极的取向方向可以基本垂直。 还提供了制造压电传感器的方法。