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    • 2. 发明授权
    • Injection cold emitter with negative electron affinity based on wide-gap semiconductor structure with controlling base
    • 基于具有控制基极的宽间隙半导体结构的具有负电子亲和力的注入冷发射体
    • US06577058B2
    • 2003-06-10
    • US09974818
    • 2001-10-12
    • Viatcheslav V. OssipovAlexandre M. BratkovskiHenryk Birecki
    • Viatcheslav V. OssipovAlexandre M. BratkovskiHenryk Birecki
    • H01L2912
    • H01J1/308
    • A cold electron emitter may include a heavily n+ doped wide band gap (WBG) substrate, a p-doped WBG region, and a low work function metallic layer (n+-p-M structure). A modification of this structure includes heavily p+ doped region between p region and M metallic layer (n+-p-p+-M structure). These structures make it possible to combine high current emission with stable (durable) operation. The high current density is possible because the p-doped (or p+ heavily doped) WBG region acts as a negative electron affinity material when in contact with low work function metals. The injection emitters with the n+-p-M and n+-p-p+-M structures are stable since the emitters make use of relatively low extracting electric field and are not affected by contamination and/or absorption from accelerated ions. In addition, the structures may be fabricated with current state-of-the-art technology.
    • 冷电子发射器可以包括重n +掺杂宽带隙(WBG)衬底,p掺杂WBG区和低功函数金属层(n + -p-M结构)。 该结构的修改包括p区和M金属层(n + -p-p + -M结构)之间的重p +掺杂区。 这些结构使得可以将高电流发射与稳定(耐用)操作相结合。 高电流密度是可能的,因为当与低功函数金属接触时,p掺杂(或p +重掺杂)WBG区域充当负电子亲和材料。 具有n + -p-M和n + -p-p + -M结构的注入发射体是稳定的,因为发射体使用相对低的提取电场,并且不受来自加速离子的污染和/或吸收的影响。 此外,结构可以用当前最先进的技术制造。