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    • 4. 发明申请
    • EXPOSURE HEAD AND EXPOSURE DEVICE
    • 曝光头和曝光装置
    • US20150009478A1
    • 2015-01-08
    • US14490638
    • 2014-09-18
    • V TECHNOLOGY CO., LTD.
    • Koichi KAJIYAMAMichinobu MIZUMURA
    • G03F7/20
    • G03F7/70191G03F7/201G03F7/2041G03F7/70341G03F7/70891
    • An exposure head according to the invention includes: a transparent substrate; a plurality of exposure light sources which is formed in the transparent substrate and emits exposure light; at least one condensing lens which condenses the exposure light from the exposure light sources on the exposure object; an imaging unit which is disposed on the opposite side to the condensing lens with the transparent substrate interposed therebetween and images the exposure object; and a control unit which controls the turning on of the exposure light sources based on image information imaged by the imaging unit. An exposure device according to the invention includes the exposure head according to the invention. By virtue of such a configuration, it is possible to improve alignment precision of the exposure object and to improve exposure precision of the exposure object.
    • 根据本发明的曝光头包括:透明基板; 多个曝光光源,其形成在所述透明基板中并且发射曝光光; 至少一个聚光透镜,其将来自曝光光源的曝光光凝结在曝光对象上; 成像单元,其设置在聚光透镜的相对侧,透明基板插入其间并对曝光对象进行成像; 以及控制单元,其基于由所述成像单元成像的图像信息来控制所述曝光光源的接通。 根据本发明的曝光装置包括根据本发明的曝光头。 通过这样的结构,能够提高曝光对象的对准精度,提高曝光对象的曝光精度。
    • 7. 发明申请
    • NONDESTRUCTIVE INSPECTION APPARATUS AND INSPECTION SYSTEM OF STRUCTURE
    • 非结构检查装置和结构检查系统
    • US20150063410A1
    • 2015-03-05
    • US14475327
    • 2014-09-02
    • V TECHNOLOGY CO., LTD.
    • Koichi KAJIYAMAMichinobu MIZUMURAYoshinori OGAWA
    • G01N25/72G01J5/02G01J5/08
    • G01N25/72G02B26/10
    • A nondestructive inspection apparatus of a structure includes: an inspection apparatus body 1 provided with an infrared light irradiation unit irradiating a structure 3 to be inspected with heating infrared light, a temperature variation measuring unit measuring a variation in temperature of the structure due to the irradiation with infrared light from the infrared light irradiation unit, a drive-control-and-accumulation unit performing drive control of the infrared light irradiation unit and the temperature variation measuring unit and performing data accumulation; and a self-running mechanism unit 2 enabling the inspection apparatus body 1 to move along the structure 3. The structure 3 is inspected for an internal defect by irradiating the structure 3 with heating infrared light while the apparatus moves along the structure 3 through the use of the self-running mechanism unit 2 and measuring the variation in temperature of the structure 3 due to the irradiation with infrared light.
    • 一种结构的非破坏性检查装置包括:检查装置主体1,其设置有用加热红外光照射被检查结构3的红外光照射单元;温度变化测量单元,其测量由于照射引起的结构的温度变化 利用来自红外光照射单元的红外光,驱动控制和累加单元执行红外光照射单元和温度变化测量单元的驱动控制并执行数据累积; 以及能够使检查装置主体1沿着结构体3移动的自行进机构单元2.通过在结构体3通过使用而沿着结构体3移动的同时,通过用加热红外光照射结构体3来检查结构3的内部缺陷 并且测量由红外线照射引起的结构3的温度变化。