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    • 2. 发明授权
    • Manufacturing method for a thin-film high-pressure sensor
    • 薄膜高压传感器的制造方法
    • US06725724B2
    • 2004-04-27
    • US09911644
    • 2001-07-20
    • Joachim Glück
    • Joachim Glück
    • G01L708
    • G01L9/0051Y10T29/49007
    • A method for manufacturing a sensor component, in particular, a thin-film high-pressure sensor, as well as a sensor component, is described, in which at least one measuring element, in particular an expansion measuring strip is arranged on a membrane, and separated from the membrane through an electrically insulating film, the measuring element being arranged on an electrically insulating substrate, which is mounted in a subsequent step onto the membrane on the side that faces away from the measuring element, so that the electrically insulating substrate forms the electrically insulating film. The electrically insulating substrate performs both a carrier function during the application of the expansion measuring strip to the substrate as well as an insulation function after the mounting of the substrate onto the membrane. In this way, the application of a separate insulation film made of silicon dioxide becomes unnecessary.
    • 描述了一种用于制造传感器部件,特别是薄膜高压传感器以及传感器部件的方法,其中至少一个测量元件,特别是膨胀测量条布置在膜上, 并且通过电绝缘膜与膜分离,测量元件布置在电绝缘基板上,该电绝缘基板在随后的步骤中安装在离开测量元件的一侧上的膜上,使得电绝缘基板形成 电绝缘膜。 电绝缘基板在将扩展测量条应用于基板的同时执行载体功能以及在将基板安装到膜上之后的绝缘功能。 以这种方式,不需要施加由二氧化硅制成的单独的绝缘膜。