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    • 2. 发明授权
    • Microstructure gas valve control forming method
    • 微结构气阀控制成型方法
    • US5441597A
    • 1995-08-15
    • US230996
    • 1994-04-21
    • Ulrich BonneThomas R. Ohnstein
    • Ulrich BonneThomas R. Ohnstein
    • B81B3/00F15B13/04F15B13/043F15C5/00F16K99/00H01L21/306B44C1/22C23F1/00
    • F16K99/0001F15B13/0405F15B13/0431F15C5/00F16K99/0007F16K99/0051F16K99/0057F16K2099/0074F16K99/0034
    • A process for fabricating a flow control device which includes a housing with separate main flow and flow control (servo) passages between an inlet port and an exit port. A control chamber in the housing is in fluid communication with the servo passage. A flexible membrane forms a partition between the main flow passage and the control chamber. The servo passage includes a variable servo orifice upstream of the control chamber and a fixed orifice downstream of the chamber. When the servo valve is open to permit passage of fluid into the control chamber, the resultant pressure on the membrane maintains the main valve closed. The main valve opens in response to closing the servo valve. The fixed orifice has a profile sufficiently small to provide for an acceptable leak or continuous fluid flow through the device when the servo valve is open, and further provides for a soft start when the servo valve is closed to open the main valve. The fixed orifice, servo valve including a servo valve orifice and electrostatically controlled closure tabs, and a microbridge flow sensing device, are advantageously formed on a monolithic semiconductor chip mounted inside the housing. Significantly, a dielectric layer is deposited on a portion of the substrate surface surrounding the orifice formed therein to form the mesa and subsequently other dielectric and conductive layers are deposited with etching.
    • 一种用于制造流量控制装置的方法,其包括在入口和出口之间具有单独的主流量和流量控制(伺服)通道的壳体。 壳体中的控制室与伺服通道流体连通。 柔性膜在主流路和控制室之间形成隔板。 伺服通道包括在控制室上游的可变伺服孔和腔室下游的固定孔。 当伺服阀打开以允许流体进入控制室时,膜上产生的压力保持主阀关闭。 响应于关闭伺服阀,主阀打开。 固定孔具有足够小的轮廓,以在伺服阀打开时提供可接受的泄漏或连续流体流过装置,并且当伺服阀关闭以打开主阀时进一步提供软启动。 固定孔,包括伺服阀孔和静电控制闭合突片的伺服阀和微桥流量检测装置有利地形成在安装在壳体内部的单片半导体芯片上。 重要的是,介电层沉积在围绕形成在其中的孔的基底表面的一部分上以形成台面,随后蚀刻沉积其它介电层和导电层。
    • 3. 发明授权
    • Microstructure gas valve control
    • 微结构气阀控制
    • US5323999A
    • 1994-06-28
    • US955377
    • 1992-12-01
    • Ulrich BonneThomas R. Ohnstein
    • Ulrich BonneThomas R. Ohnstein
    • B81B3/00F15B13/04F15B13/043F15C5/00F16K99/00F16K31/00
    • F16K99/0001F15B13/0405F15B13/0431F15C5/00F16K99/0007F16K99/0051F16K99/0057F16K2099/0074F16K99/0034
    • A flow control device includes a housing with separate main flow and flow control (servo) passages between an inlet port and an exit port. A control chamber in the housing is in fluid communication with the servo passage. A flexible membrane forms a partition between the main flow passage and the control chamber. The servo passage includes a variable servo orifice upstream of the control chamber and a fixed orifice downstream of the chamber. When the servo valve is open to permit passage of fluid into the control chamber, the resultant pressure on the membrane maintains the main valve closed. The main valve opens in response to closing the servo valve. The fixed orifice has a profile sufficiently small to provide for an acceptable leak or continuous fluid flow through the device when the servo valve is open, and further provides for a soft start when the servo valve is closed to open the main valve. The fixed orifice, servo valve including a servo valve orifice and electrostatically controlled closure tabs, and a microbridge flow sensing device, are advantageously formed on a monolithic semiconductor chip mounted inside the housing.
    • 流量控制装置包括在入口和出口之间具有单独的主流量和流量控制(伺服)通道的壳体。 壳体中的控制室与伺服通道流体连通。 柔性膜在主流路和控制室之间形成隔板。 伺服通道包括在控制室上游的可变伺服孔和腔室下游的固定孔。 当伺服阀打开以允许流体进入控制室时,膜上产生的压力保持主阀关闭。 响应于关闭伺服阀,主阀打开。 固定孔具有足够小的轮廓,以在伺服阀打开时提供可接受的泄漏或连续流体流过装置,并且当伺服阀关闭以打开主阀时进一步提供软启动。 固定孔,包括伺服阀孔和静电控制闭合突片的伺服阀和微桥流量检测装置有利地形成在安装在壳体内部的单片半导体芯片上。
    • 4. 发明授权
    • Microstructure gas valve control
    • 微结构气阀控制
    • US5176358A
    • 1993-01-05
    • US742368
    • 1991-08-08
    • Ulrich BonneThomas R. Ohnstein
    • Ulrich BonneThomas R. Ohnstein
    • B81B3/00F15B13/04F15B13/043F15C5/00F16K99/00
    • F16K99/0001F15B13/0405F15B13/0431F15C5/00F16K99/0007F16K99/0051F16K99/0057F16K2099/0074F16K99/0034
    • A flow control device includes a housing with separate main flow and flow control (servo) passages between an inlet port and an exit port. A control chamber in the housing is in fluid communication with the servo passage. A flexible membrane forms a partition between the main flow passage and the control chamber. The servo passage includes a variable servo orifice upstream of the control chamber and a fixed orifice downstream of the chamber. When the servo valve is open to permit passage of fluid into the control chamber, the resultant pressure on the membrane maintains the main valve closed. The main valve opens in response to closing the servo valve. The fixed orifice has a profile sufficiently small to provide for an acceptable leak or continuous fluid flow through the device when the servo valve is open, and further provides for a soft start when the servo valve is closed to open the main valve. The fixed orifice, servo valve including a servo valve orifice and electrostatically controlled closure tabs, and a microbridge flow sensing device, are advantageously formed on a monolithic semiconductor chip mounted inside the housing.
    • 流量控制装置包括在入口和出口之间具有单独的主流量和流量控制(伺服)通道的壳体。 壳体中的控制室与伺服通道流体连通。 柔性膜在主流路和控制室之间形成隔板。 伺服通道包括在控制室上游的可变伺服孔和腔室下游的固定孔。 当伺服阀打开以允许流体进入控制室时,膜上产生的压力保持主阀关闭。 响应于关闭伺服阀,主阀打开。 固定孔具有足够小的轮廓,以在伺服阀打开时提供可接受的泄漏或连续流体流过装置,并且当伺服阀关闭以打开主阀时进一步提供软启动。 固定孔,包括伺服阀孔和静电控制闭合突片的伺服阀和微桥流量检测装置有利地形成在安装在壳体内部的单片半导体芯片上。