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    • 3. 发明授权
    • Sensitive positive electron beam resists
    • 敏感正电子束抵抗
    • US4414313A
    • 1983-11-08
    • US363334
    • 1982-03-29
    • Juey H. Lai
    • Juey H. Lai
    • G03F7/039B05D3/06
    • G03F7/039
    • A process for making highly sensitive positive electron beam resists comprised of copolymers of methacrylic acid (MAA) and methyl .alpha.-chloroacrylate (MCA) is disclosed in which a thin film of high molecular weight MAA/MCA copolymer is applied to a suitable substrate. Prior to exposure, the copolymer is prebaked at a temperature below the decomposition temperature to improve the sensitivity and resolution of the resist. The exposed resist is developed by spraying with a suitable solvent. The positive electron resists produced in accordance with the present invention exhibit a high sensitivity and good submicron resolution.
    • 公开了一种制备由甲基丙烯酸(MAA)和α-氯丙烯酸甲酯(MCA)的共聚物构成的高敏感性正电子束抗蚀剂的方法,其中将高分子量MAA / MCA共聚物的薄膜施加到合适的基材上。 在曝光之前,共聚物在低于分解温度的温度下预烘烤,以提高抗蚀剂的灵敏度和分辨率。 曝光的抗蚀剂通过用合适的溶剂喷涂而显影。 根据本发明生产的正电子抗蚀剂表现出高灵敏度和良好的亚微米分辨率。