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    • 8. 发明申请
    • LIGHT EMITTING DEVICE LIGHT-AMPLIFIED WITH GRAPHENE AND METHOD FOR MANUFACTURING SAME
    • 用石墨放大的发光装置及其制造方法
    • US20160056340A1
    • 2016-02-25
    • US14779448
    • 2013-06-21
    • UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY
    • Suk Ho ChoiChang Oh KimSung Kim
    • H01L33/40
    • H01L33/40H01L33/42H01L2933/0016
    • The purpose of the present invention is to provide a method for manufacturing a light-amplified optoelectronic in device, on which pristine or doped graphene is transferred. Specifically, the method includes the steps of: depositing a first electrode, as a thin film, on the light emitting device; transferring pristine or doped graphene on the electrode thin film; etching the light emitting device in contact with the electrode thin film on which the transferred graphene has been transferred, thereby removing a part of the electrode thereon; spin-coating photoresist on the etched light emitting device; removing the photoresist from the spin-coated light emitting device, thereby forming an electrode thin film in a spin form and the pristine transferred to or graphene doped to the electrode thin film; and depositing metal on a second electrode.
    • 本发明的目的是提供一种用于制造器件中的光放大光电子器件的方法,其中原始或掺杂的石墨烯被转移到其上。 具体地说,该方法包括以下步骤:将第一电极作为薄膜沉积在发光器件上; 在电极薄膜上转移原始或掺杂的石墨烯; 蚀刻与已转印的转印石墨烯的电极薄膜接触的发光器件,从而去除其上的电极的一部分; 在蚀刻的发光器件上的旋涂光致抗蚀剂; 从旋转涂覆的发光器件去除光致抗蚀剂,由此形成旋转形式的电极薄膜,并将原始转移到或者被掺杂到电极薄膜上的石墨烯; 以及在第二电极上沉积金属。