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1. 发明申请

US20060169026A1 Method of measuring gas barrier property of plastic molding 审中-公开
标题翻译：测量塑料成型的气体阻隔性能的方法
公开(公告)号：US20060169026A1
公开(公告)日：2006-08-03
申请号：US10546982
申请日：2004-02-25
申请人： Tsuyoshi Kage , Takumi Kobayashi , Kazuaki Mizokami , Akiyoshi Kobayashi
发明人： Tsuyoshi Kage , Takumi Kobayashi , Kazuaki Mizokami , Akiyoshi Kobayashi
IPC分类号： C23C16/52 , G01N15/08 , B28B7/38 , B05D3/02
CPC分类号： G01M3/226 , G01N15/0826
摘要： Object of present invention to overcome a problem of a dispersion of an evaluation of gas barrier property depending on absorbed moisture of plastic, and carry out measurements in which a measurement value response is good and accuracy is good, wherein from the beginning of a container the gas barrier property of a plastic molded body does not depend on the amount of moisture absorbed thereof. A method of measuring the gas barrier property of the plastic molded body such as a plastic container, a plastic sheet or a plastic film or the like which uses a gas analyzer to measure the amount of permeation of a measurement object gas permeating through the plastic molded body, comprising: a heat drying process which heats and dries said plastic molded body in a temperature range which does not cause deformation or heat deterioration.
摘要翻译：本发明的目的是为了克服根据吸收的塑料的湿气的气体阻隔性的评价的分散性的问题，并且进行测量值响应良好并且精度良好的测量，其中从容器的开始处塑料成型体的阻气性不依赖于吸收的水分量。测量塑料成型体（塑料容器，塑料片或塑料薄膜等）的气体阻隔性的方法，该方法使用气体分析器来测量渗透塑料模制品的测量对象气体的渗透量包括：在不引起变形或热劣化的温度范围内对所述塑料成型体进行加热和干燥的加热干燥方法。

2. 发明授权

US5485016A Atmospheric pressure ionization mass spectrometer 失效
标题翻译：大气压电离质谱仪
公开(公告)号：US5485016A
公开(公告)日：1996-01-16
申请号：US231847
申请日：1994-04-25
申请人： Takashi Irie , Yasuhiro Mitsui , Kazuaki Mizokami , Katsumi Kuriyama
发明人： Takashi Irie , Yasuhiro Mitsui , Kazuaki Mizokami , Katsumi Kuriyama
IPC分类号： G01N27/62 , H01J49/04 , H01J49/10 , H01J49/26
CPC分类号： H01J49/168 , H01J49/0422 , H01J49/145
摘要： A mass spectrometer for analyzing trace impurities on a level between ppt and ppb contained in silicon material gas such as monosilane gas. The mass spectrometer includes an ion formation region, reaction region, and mass analysis region. Ion formation gas is introduced into the ion formation region and sample gas (silicon material gas) is introduced into the reaction region. The ion formation region ionizes ion formation gas by an ionizer and forms primary ions. When the pressure of ion formation gas is made higher than the pressure of sample gas, the ion formation gas flows into the reaction region from the ion formation region together with primary ions and is mixed with the sample gas. In the reaction region, an ion-molecule reaction is produced between the primary ions and trace impurities contained in the sample gas and the trace impurities contained in the sample gas are ionized. The ion intensity of trace impunities, the concentration of trace impurities in the sample gas is determined using a calibration curve. When the gas pressure in the reaction region is kept at almost 1 atmosphere, the reaction is promoted and when the ion-molecule reaction time is optimized according to the size of the reaction region and the voltage condition, impurities on a level between ppt and ppb can be detected and determined.
摘要翻译：用于分析硅材料气体（如硅烷气体）中含有的ppt和ppb之间的痕量杂质的质谱仪。质谱仪包括离子形成区域，反应区域和质量分析区域。将离子形成气体引入离子形成区域，并将样品气体（硅材料气体）引入反应区域。离子形成区域通过离子发生器离子化形成气体并形成初级离子。当离子形成气体的压力高于样品气体的压力时，离子形成气体与一次离子一起从离子形成区域流入反应区域，并与样品气体混合。在反应区域中，在原料离子和样品气体中含有的微量杂质之间产生离子分子反应，并将样品气体中所含的痕量杂质离子化。使用校准曲线确定痕量缺陷的离子强度，样品气体中微量杂质的浓度。当反应区域的气体压力保持在大致1气道时，促进反应，当根据反应区域的大小和电压条件优化离子分子反应时间时，ppt与ppb之间的杂质可以被检测和确定。

3. 发明授权

US08381587B2 Gas sensor, gas measuring system using the gas sensor, and gas detection module for the gas sensor 有权
标题翻译：气体传感器，使用气体传感器的气体测量系统和气体传感器的气体检测模块
公开(公告)号：US08381587B2
公开(公告)日：2013-02-26
申请号：US12599268
申请日：2008-05-08
申请人： Yasuhiko Kasama , Kenji Omote , Kuniyoshi Yokoo , Yuzo Mizobuchi , Haruna Oizumi , Morihiko Saida , Hiroyuki Sagami , Kazuaki Mizokami , Takeo Furukawa
发明人： Yasuhiko Kasama , Kenji Omote , Kuniyoshi Yokoo , Yuzo Mizobuchi , Haruna Oizumi , Morihiko Saida , Hiroyuki Sagami , Kazuaki Mizokami , Takeo Furukawa
IPC分类号： G01N27/22
CPC分类号： G01N27/226 , G01N27/12
摘要： A gas sensor, which is extremely compact to be arranged for separated gas piping in semiconductor device manufacturing equipment, a gas measuring system using such gas sensor, and a gas detection module for the gas measuring system. The gas sensor has a gas detection device containing a dielectric semiconductor, the electric conductivity of the gas detection device varying in response to the degree of adsorption of gases to the gas detection device, a capacitive element connected in series to the gas detection device, and a pair of electrodes which are connected to electric terminals of an electric element comprising the gas detection device and the capacitive element, wherein the gas sensor is capable of detecting the degree of adsorption of gases to the gas detection device from an electrical response to a voltage which is applied to the electrodes and which periodically varies and reverses in polarity.
摘要翻译：一种非常紧凑的气体传感器，用于半导体器件制造设备中的分离的气体管道，使用这种气体传感器的气体测量系统和用于气体测量系统的气体检测模块。气体传感器具有包含电介质半导体的气体检测装置，气体检测装置的导电性响应于气体到气体检测装置的吸附程度而变化，与气体检测装置串联连接的电容元件，以及连接到包括气体检测装置和电容元件的电气元件的电端子的一对电极，其中气体传感器能够从对电压的电响应检测气体到气体检测装置的吸附程度其被施加到电极并且其极性周期性地变化和反转。

4. 发明授权

US5482524A Atmospheric pressure, elevated temperature gas desorption apparatus 失效
标题翻译：大气压，高温气体解吸装置
公开(公告)号：US5482524A
公开(公告)日：1996-01-09
申请号：US285421
申请日：1994-08-03
申请人： Kazuo Nakano , Kazuaki Mizokami , Keiji Hasumi , Katsuhiko Itoh , Michimasa Funabashi , Yasuhiro Mitsui , Takashi Irie , Takeshi Tajima , Sadao Matsuoka
发明人： Kazuo Nakano , Kazuaki Mizokami , Keiji Hasumi , Katsuhiko Itoh , Michimasa Funabashi , Yasuhiro Mitsui , Takashi Irie , Takeshi Tajima , Sadao Matsuoka
IPC分类号： G01N1/02 , G01N1/00 , G01N1/22 , G01N1/28 , G01N30/00 , H01L21/324 , H01L21/66 , B01D53/04 , B01D35/18
CPC分类号： G01N30/00 , G01N1/2214 , G01N2001/2264 , G01N2030/008
摘要： An atmospheric pressure, elevated temperature gas desorption apparatus which enables quanitiative analysis of impurities absorbed in or on the surface of a solid sample (semiconductor wafer, optical disc, etc.) is disclosed. The atmospheric pressure, elevated temperature gas desorption apparatus for desorbing impurities absorbed in or on the surface of a plate-like solid sample 18 into a carrier gas 19 in a chamber 6 under an atmospheric pressure while increasing the temperature of the solid sample 18 includes a desorption room 7A provided in the chamber 6 and connected through to a first gas supply system 1 for supplying the carrier gas 19, for desorbing impurities absorbed in or on the surface of the solid sample 18 into the carrier gas 19. A sample support room 7B is provided in the chamber 6 and is separated from the desorption room 7A by a partition member 6A. The solid sample 18 is in close contact with the partition member 6A. A heater 8 for heating the solid sample 18 is in close contact with the partition member 6A. A reserve room 9 is connected to the sample support room 7B and to a second gas supply system 13 for supplying a purge gas.
摘要翻译：公开了一种大气压高温气体解吸装置，其能够对固体样品（半导体晶片，光盘等）表面中或表面上吸收的杂质进行量化分析。吸附在板状固体样品18中的表面上或其上的杂质的大气压高温气体解吸装置在大气压下在室6中的载气19中同时增加固体样品18的温度包括解吸室7A设置在室6中，并连接到用于供给载气19的第一气体供应系统1，用于将吸收在固体样品18中或其表面上的杂质解吸到载体气体19中。样品支撑室7B 设置在室6中，并通过分隔构件6A与解吸室7A分离。固体样品18与分隔构件6A紧密接触。用于加热固体样品18的加热器8与分隔构件6A紧密接触。预备室9连接到样品支撑室7B和用于供给吹扫气体的第二气体供给系统13。

5. 发明申请

US20130061660A1 Gas Sensor, Gas Measuring System Using the Gas Sensor, and Gas Detection Module for the Gas Sensor 审中-公开
标题翻译：气体传感器，使用气体传感器的气体测量系统和气体传感器的气体检测模块
公开(公告)号：US20130061660A1
公开(公告)日：2013-03-14
申请号：US13617178
申请日：2012-09-14
申请人： Yasuhiko Kasama , Kenji Omote , Kuniyoshi Yokoo , Yuzo Mizobuchi , Haruna Oizumi , Morihiko Saida , Hiroyuki Sagami , Kazuaki Mizokami , Takeo Furukawa
发明人： Yasuhiko Kasama , Kenji Omote , Kuniyoshi Yokoo , Yuzo Mizobuchi , Haruna Oizumi , Morihiko Saida , Hiroyuki Sagami , Kazuaki Mizokami , Takeo Furukawa
IPC分类号： G01N27/22
CPC分类号： G01N27/226 , G01N27/12
摘要： A gas sensor, which is extremely compact to be arranged for separated gas piping in semiconductor device manufacturing equipment, a gas measuring system using such gas sensor, and a gas detection module for the gas measuring system. The gas sensor has a gas detection device containing a dielectric semiconductor, the electric conductivity of the gas detection device varying in response to the degree of adsorption of gases to the gas detection device, a capacitive element connected in series to the gas detection device, and a pair of electrodes which are connected to electric terminals of an electric element comprising the gas detection device and the capacitive element, wherein the gas sensor is capable of detecting the degree of adsorption of gases to the gas detection device from an electrical response to a voltage which is applied to the electrodes and which periodically varies and reverses in polarity.
摘要翻译：一种非常紧凑的气体传感器，用于半导体器件制造设备中的分离的气体管道，使用这种气体传感器的气体测量系统和用于气体测量系统的气体检测模块。气体传感器具有包含电介质半导体的气体检测装置，气体检测装置的导电性响应于气体到气体检测装置的吸附程度而变化，与气体检测装置串联连接的电容元件，以及连接到包括气体检测装置和电容元件的电气元件的电端子的一对电极，其中气体传感器能够从对电压的电响应检测气体到气体检测装置的吸附程度其被施加到电极并且其极性周期性地变化和反转。

6. 发明申请

US20100206049A1 Gas Sensor, Gas Measuring System Using the Gas Sensor, and Gas Detection Module for the Gas Sensor 有权
标题翻译：气体传感器，使用气体传感器的气体测量系统和气体传感器的气体检测模块
公开(公告)号：US20100206049A1
公开(公告)日：2010-08-19
申请号：US12599268
申请日：2008-05-08
申请人： Yasuhiko Kasama , Kenji Omote , Kuniyoshi Yokoo , Yuzo Mizobuchi , Haruna Oizumi , Morihiko Saida , Hiroyuki Sagami , Kazuaki Mizokami , Takeo Furukawa
发明人： Yasuhiko Kasama , Kenji Omote , Kuniyoshi Yokoo , Yuzo Mizobuchi , Haruna Oizumi , Morihiko Saida , Hiroyuki Sagami , Kazuaki Mizokami , Takeo Furukawa
IPC分类号： G01N7/00
CPC分类号： G01N27/226 , G01N27/12
摘要： A gas sensor, which is extremely compact to be arranged for separated gas piping in semiconductor device manufacturing equipment, a gas measuring system using such gas sensor, and a gas detection module for the gas measuring system. The gas sensor has a gas detection device containing a dielectric semiconductor, the electric conductivity of the gas detection device varying in response to the degree of adsorption of gases to the gas detection device, a capacitive element connected in series to the gas detection device, and a pair of electrodes which are connected to electric terminals of an electric element comprising the gas detection device and the capacitive element, wherein the gas sensor is capable of detecting the degree of adsorption of gases to the gas detection device from an electrical response to a voltage which is applied to the electrodes and which periodically varies and reverses in polarity.
摘要翻译：一种非常紧凑的气体传感器，用于半导体器件制造设备中的分离的气体管道，使用这种气体传感器的气体测量系统和用于气体测量系统的气体检测模块。气体传感器具有包含电介质半导体的气体检测装置，气体检测装置的导电性响应于气体到气体检测装置的吸附程度而变化，与气体检测装置串联连接的电容元件，以及连接到包括气体检测装置和电容元件的电气元件的电端子的一对电极，其中气体传感器能够从对电压的电响应检测气体到气体检测装置的吸附程度其被施加到电极并且其极性周期性地变化和反转。

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