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    • 4. 发明授权
    • Method for manufacturing perpendicular magnetic recording head
    • 制造垂直磁记录头的方法
    • US08137571B2
    • 2012-03-20
    • US12381972
    • 2009-03-17
    • Tomohiro OkadaHisashi KimuraTaku ShintaniTadashi Umezawa
    • Tomohiro OkadaHisashi KimuraTaku ShintaniTadashi Umezawa
    • B44C1/22
    • G11B5/1278G11B5/3116G11B5/3163
    • Embodiments of the present invention help to provide a method for manufacturing a perpendicular magnetic recording head including a main magnetic pole having a width that does not generally vary. According to one embodiment, a magnetic film, a first inorganic mask film, an organic film, a second inorganic mask film, and a resist pattern are formed in this order. Reactive ion etching (RIE) is performed using the resist pattern as a mask to etch the second inorganic mask film and the organic film and form a mask for the subsequent step. A flow rate of an Ar gas is then controlled, and ion milling is performed, to correct a difference between the width of the mask located at the central portion of the wafer and the width of the mask located at the outer peripheral portion of the wafer. The magnetic film is processed to have a uniform track width. Ion milling is then performed to form the main magnetic pole having an inverted trapezoidal shape.
    • 本发明的实施例有助于提供一种用于制造垂直磁记录头的方法,所述垂直磁记录头包括具有通常不变化的宽度的主磁极。 根据一个实施例,依次形成磁性膜,第一无机掩模膜,有机膜,第二无机掩模膜和抗蚀剂图案。 使用抗蚀剂图案作为掩模进行反应离子蚀刻(RIE),以蚀刻第二无机掩模膜和有机膜并形成用于后续步骤的掩模。 然后控制Ar气体的流量,进行离子铣削,以校正位于晶片中心部分的掩模的宽度与位于晶片外周部分的掩模的宽度之间的差异 。 磁膜被处理成具有均匀的轨迹宽度。 然后进行离子铣削以形成具有倒梯形形状的主磁极。
    • 6. 发明授权
    • Method of manufacturing a magnetic head
    • 制造磁头的方法
    • US07716812B2
    • 2010-05-18
    • US11408429
    • 2006-04-20
    • Atsushi KatoNorihiro OokawaHisashi Kimura
    • Atsushi KatoNorihiro OokawaHisashi Kimura
    • G11B5/187
    • G11B5/3163G11B5/1278G11B5/3116Y10T29/49041Y10T29/49043Y10T29/49046Y10T29/4906
    • A main magnetic pole of a recording head is formed in an inverted trapezoidal shape by ion milling but, the long milling time poses a problem of variations in the inverted trapezoidal shape and the dimensional variations in track width. In one embodiment of the invention, a recording head is formed by first forming a lower magnetic pole, a gap layer, and conductor coils, forming an upper magnetic yoke over the gap layer at a position recessed from the air bearing surface, and forming an inorganic insulative layer in the recessed portion. A back magnetic pole connected with the upper magnetic yoke is formed on the back of the lower electrode. Successively, the upper surfaces of the inorganic insulative layer and the upper magnetic yoke are planarized, on which an underlayer film such as of Rh is formed. A magnetic layer is formed by stacking a plurality of thin magnetic films by sputtering over the underlayer film from the air bearing surface as far as the position overlapping the upper magnetic yoke. Successively, ion milling is applied to form a main magnetic pole of an inverted trapezoidal shape having a taper on the lateral surface as viewed from the air bearing surface.
    • 记录头的主磁极通过离子铣削形成倒梯形形状,但是长铣削时间带来了倒梯形形状的变化和轨道宽度的尺寸变化的问题。 在本发明的一个实施例中,通过首先形成下磁极,间隙层和导体线圈形成记录头,在空隙支承表面凹陷的位置上在间隙层上形成上磁轭,并形成 无机绝缘层。 与上磁轭连接的后磁极形成在下电极的背面。 接着,无机绝缘层和上磁轭的上表面被平坦化,在其上形成诸如Rh的下层膜。 通过从空气轴承表面溅射下层膜而形成多个薄磁性膜,只要与上磁轭重叠的位置即可形成磁性层。 接着,从空气轴承表面观察,施加离子铣削以形成具有在侧面上的锥形的倒梯形形状的主磁极。
    • 8. 发明申请
    • POLYESTER RESIN PARTICLE AND METHOD FOR PRODUCING THE SAME
    • 聚酯树脂颗粒及其生产方法
    • US20090263661A1
    • 2009-10-22
    • US12301725
    • 2007-08-02
    • Michiko YoshidaTakeyuki DoiNaoya MaedaHisashi Kimura
    • Michiko YoshidaTakeyuki DoiNaoya MaedaHisashi Kimura
    • B32B27/36C08G63/78
    • C08G63/80C08G63/85C08K5/0091C08K5/56Y10T428/2998
    • Polyester resin particles are provided as those capable of providing a highly transparent molded product by thermoforming, while suppressing fusion of the polyester prepolymer particles in a heat treatment thereof such as crystallization or solid-phase polycondensation, without reduction in a solid-phase polycondensation rate.The present invention provides a method for producing a polyester resin, comprising carrying out a hot-water treatment and a heat treatment, in this order, of polyester prepolymer particles obtained by melt polycondensation of a dicarboxylic acid component and a diol component. The hot-water treatment comprises bringing the polyester prepolymer particles with an intrinsic viscosity of from at least 0.10 dL/g to at most 1.0 dL/g and with a density of at most 1.36 g/cm3 into contact with hot water at a temperature higher than the glass transition temperature of the polyester prepolymer particles and less than 100° C., under the condition satisfying the following formula (1): 40≦(T−Tg)t≦6000  (1) wherein t is a hot-water treatment time (second), T is the temperature of the hot water (° C.) and Tg is the glass transition temperature (° C.) of the polyester prepolymer particles.
    • 提供聚酯树脂颗粒作为能够通过热成型提供高透明模塑产品的那些,同时抑制聚酯预聚物颗粒在其热处理如结晶或固相缩聚中的熔融,而不降低固相缩聚率。 本发明提供一种聚酯树脂的制造方法,其包括依次通过二羧酸成分和二醇成分的熔融缩聚得到的聚酯预聚物粒子进行热水处理和热处理。 热水处理包括使特性粘度为至少0.10dL / g至至多1.0dL / g,密度至多为1.36g / cm 3的聚酯预聚物颗粒在较高温度下与热水接触 在满足下列公式(1)的条件下:聚酯预聚物颗粒的玻璃化转变温度小于100℃,其中t是热水处理时间(秒),40℃-TT)t6000(1) T是热水的温度(℃),Tg是聚酯预聚物颗粒的玻璃化转变温度(℃)。