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1. 发明授权

US08138473B2 Mass spectrometry unit 有权
标题翻译：质谱单位
公开(公告)号：US08138473B2
公开(公告)日：2012-03-20
申请号：US12599301
申请日：2008-04-14
申请人： Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Shuji Yoshida
发明人： Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Shuji Yoshida
IPC分类号： H01J49/26 , B01D59/44
CPC分类号： G01N27/62 , G01L21/30 , H01J41/10 , H01J49/0027
摘要： A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured. The mass spectrometry unit further includes: a control portion for preliminary storing a record of a mass-to-charge ratio of a specific gas that decreases a function of a specific portion of the mass spectrometry unit, in which if an ion current value with the mass-to-charge ratio of the specific gas detected by the mass spectrometry portion is not less than a predetermined value, the control portion outputs a warning signal denoting a functional decrease in the specific portion.
摘要翻译：本发明的质谱装置包括质量分数部，其根据质荷比检测待测气体的离子电流值，由此测定待测气体的分压。所述质谱装置还包括：控制部，用于预先存储降低所述质谱分析装置的特定部分的功能的特定气体的质荷比的记录，其中如果所述特定气体的离子电流值与由质谱部检测出的特定气体的质荷比不小于预定值，控制部分输出表示特定部分功能下降的警告信号。

2. 发明申请

US20100213363A1 MASS SPECTROMETRY UNIT 有权
标题翻译：质谱仪
公开(公告)号：US20100213363A1
公开(公告)日：2010-08-26
申请号：US12599301
申请日：2008-04-14
申请人： Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Shuji Yoshida
发明人： Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Shuji Yoshida
IPC分类号： H01J49/26
CPC分类号： G01N27/62 , G01L21/30 , H01J41/10 , H01J49/0027
摘要： A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured. The mass spectrometry unit further includes: a control portion for preliminary storing a record of a mass-to-charge ratio of a specific gas that decreases a function of a specific portion of the mass spectrometry unit, in which if an ion current value with the mass-to-charge ratio of the specific gas detected by the mass spectrometry portion is not less than a predetermined value, the control portion outputs a warning signal denoting a functional decrease in the specific portion.
摘要翻译：本发明的质谱装置包括质量分数部，其根据质荷比检测待测气体的离子电流值，由此测定待测气体的分压。所述质谱装置还包括：控制部，用于预先存储降低所述质谱分析装置的特定部分的功能的特定气体的质荷比的记录，其中如果所述特定气体的离子电流值与由质谱部检测出的特定气体的质荷比不小于预定值，控制部分输出表示特定部分功能下降的警告信号。

3. 发明申请

US20100133429A1 METHOD OF CONTROLLING MASS SPECTROMETER AND MASS SPECTROMETER 有权
标题翻译：控制质谱仪和质谱仪的方法
公开(公告)号：US20100133429A1
公开(公告)日：2010-06-03
申请号：US12595100
申请日：2008-04-14
申请人： Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Jiro Endo , Hitomi Obise
发明人： Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Jiro Endo , Hitomi Obise
IPC分类号： H01J49/26
CPC分类号： H01J49/0031
摘要： A method of controlling a mass spectrometer comprises the steps of: supplying a current to a cathode electrode of an ion source having the cathode electrode and an anode electrode, and ionizing a molecules of a gas to be measured; selecting ions generated in the ion source by mass-to-charge ratio; and detecting an ion current value of the selected ions. When a partial pressure of the gas to be measured is measured based on a detection result of the ion current value, a cathode current is supplied to the cathode electrode such that an emission current flowing between the cathode electrode and the anode electrode becomes constant. When a partial pressure of the gas to be measured is not measured, a constant current having a current value less than that of the cathode current is supplied to the cathode electrode.
摘要翻译：控制质谱仪的方法包括以下步骤：向具有阴极电极和阳极电极的离子源的阴极提供电流，并将待测气体分子电离; 选择通过质荷比在离子源中产生的离子; 以及检测所选离子的离子电流值。当基于离子电流值的检测结果测量要测量的气体的分压时，阴极电流被提供给阴极，使得在阴极电极和阳极电极之间流动的发射电流变得恒定。当未测量待测气体的分压时，向阴极供给电流值小于阴极电流的恒定电流。

4. 发明授权

US08013291B2 Method of controlling mass spectrometer and mass spectrometer 有权
公开(公告)号：US08013291B2
公开(公告)日：2011-09-06
申请号：US12595100
申请日：2008-04-14
申请人： Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Jiro Endo , Hitomi Obise
发明人： Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Jiro Endo , Hitomi Obise
IPC分类号： H01J49/16
摘要： A method of controlling a mass spectrometer comprises the steps of: supplying a current to a cathode electrode of an ion source having the cathode electrode and an anode electrode, and ionizing a molecules of a gas to be measured; selecting ions generated in the ion source by mass-to-charge ratio; and detecting an ion current value of the selected ions. When a partial pressure of the gas to be measured is measured based on a detection result of the ion current value, a cathode current is supplied to the cathode electrode such that an emission current flowing between the cathode electrode and the anode electrode becomes constant. When a partial pressure of the gas to be measured is not measured, a constant current having a current value less than that of the cathode current is supplied to the cathode electrode.

5. 发明授权

US08115166B2 Method of controlling mass spectrometer and mass spectrometer 有权
标题翻译：控制质谱仪和质谱仪的方法
公开(公告)号：US08115166B2
公开(公告)日：2012-02-14
申请号：US12595100
申请日：2008-04-14
申请人： Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Jiro Endo , Hitomi Obise
发明人： Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Jiro Endo , Hitomi Obise
IPC分类号： H01J49/16
CPC分类号： H01J49/0031
摘要： A method of controlling a mass spectrometer comprises the steps of: supplying a current to a cathode electrode of an ion source having the cathode electrode and an anode electrode, and ionizing a molecules of a gas to be measured; selecting ions generated in the ion source by mass-to-charge ratio; and detecting an ion current value of the selected ions. When a partial pressure of the gas to be measured is measured based on a detection result of the ion current value, a cathode current is supplied to the cathode electrode such that an emission current flowing between the cathode electrode and the anode electrode becomes constant. When a partial pressure of the gas to be measured is not measured, a constant current having a current value less than that of the cathode current is supplied to the cathode electrode.
摘要翻译：控制质谱仪的方法包括以下步骤：向具有阴极电极和阳极电极的离子源的阴极提供电流，并将待测气体分子电离; 选择通过质荷比在离子源中产生的离子; 以及检测所选离子的离子电流值。当基于离子电流值的检测结果测量要测量的气体的分压时，阴极电流被提供给阴极，使得在阴极电极和阳极电极之间流动的发射电流变得恒定。当未测量待测气体的分压时，将具有比阴极电流小的电流值的恒定电流供给到阴极电极。

6. 发明申请

US20120280122A1 QUADRUPOLE MASS SPECTROMETER 有权
标题翻译： QUADRUPOLE质谱仪
公开(公告)号：US20120280122A1
公开(公告)日：2012-11-08
申请号：US13519928
申请日：2011-02-15
申请人： Toyoaki Nakajima , Yuujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka
发明人： Toyoaki Nakajima , Yuujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka
IPC分类号： H01J49/26
CPC分类号： H01J49/4215
摘要： A quadrupole mass spectrometer for use in analyzing gas components in a test piece is made in a constitution in which resistance heating of a grid is materialized, and in which a high-accuracy analysis of the gas components is possible at a low cost while preventing the sensitivity from lowering. A quadrupole mass spectrometer is provided with a sensor section which can be detachably fitted to the test piece. Supposing that the direction of fitting the sensor section to the test piece is in an upward direction, the sensor section is provided with: a predetermined shape of supporting body which is provided at a lower end of the sensor section; an ion source which is provided on the supporting body and which has a filament and a grid for ionizing the gas; a quadrupole section which is provided on the ion source and in which four columnar electrodes are disposed at a predetermined circumferential distance from one another; and an ion detection section which is disposed on the quadrupole section and which collects predetermined ions that have passed through the quadrupole section by applying DC and AC voltages between opposite electrodes.
摘要翻译：用于分析试验片中的气体成分的四极杆质谱仪是以电网的电阻加热实现的结构，其中可以低成本地进行气体成分的高精度分析，同时防止灵敏度降低。四极质谱仪设置有可拆卸地安装在试件上的传感器部分。假设将传感器部分装配到测试件上的方向是向上的，传感器部分设置有：设置在传感器部分的下端的支撑体的预定形状; 离子源，其设置在所述支撑体上，并且具有用于电离所述气体的灯丝和栅格; 四极部，其设置在所述离子源上，并且其中四个柱状电极彼此以预定的周向距离设置; 以及离子检测部，其设置在四极部上并且通过在相对电极之间施加DC电压和AC电压来收集已经通过四极部的预定离子。

7. 发明授权

US08674298B2 Quadrupole mass spectrometer 有权
标题翻译：四极质谱仪
公开(公告)号：US08674298B2
公开(公告)日：2014-03-18
申请号：US13519928
申请日：2011-02-15
申请人： Toyoaki Nakajima , Yuujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka
发明人： Toyoaki Nakajima , Yuujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka
IPC分类号： H01J49/26
CPC分类号： H01J49/4215
摘要： A quadrupole mass spectrometer for use in analyzing gas components in a test piece is made in a constitution in which resistance heating of a grid is materialized, and in which a high-accuracy analysis of the gas components is possible at a low cost while preventing the sensitivity from lowering. A quadrupole mass spectrometer is provided with a sensor section which can be detachably fitted to the test piece. Supposing that the direction of fitting the sensor section to the test piece is in an upward direction, the sensor section is provided with: a predetermined shape of supporting body which is provided at a lower end of the sensor section; an ion source which is provided on the supporting body and which has a filament and a grid for ionizing the gas; a quadrupole section which is provided on the ion source and in which four columnar electrodes are disposed at a predetermined circumferential distance from one another; and an ion detection section which is disposed on the quadrupole section and which collects predetermined ions that have passed through the quadrupole section by applying DC and AC voltages between opposite electrodes.
摘要翻译：用于分析试验片中的气体成分的四极杆质谱仪是以电网的电阻加热实现的结构，其中可以低成本地进行气体成分的高精度分析，同时防止灵敏度降低。四极质谱仪设置有可拆卸地安装在试件上的传感器部分。假设将传感器部分装配到测试件上的方向是向上的，传感器部分设置有：设置在传感器部分的下端的支撑体的预定形状; 离子源，其设置在所述支撑体上，并且具有用于电离所述气体的灯丝和栅格; 四极部，其设置在所述离子源上，并且其中四个柱状电极彼此以预定的周向距离设置; 以及离子检测部，其设置在四极部上并且通过在相对电极之间施加DC电压和AC电压来收集已经通过四极部的预定离子。

8. 发明申请

US20110315872A1 OXYGEN DETECTION METHOD, AIR LEAKAGE DETERMINATION METHOD, GAS COMPONENT DETECTION DEVICE, AND VACUUM PROCESSING APPARATUS 有权
标题翻译：氧气检测方法，空气泄漏测定方法，气体成分检测装置和真空处理装置
公开(公告)号：US20110315872A1
公开(公告)日：2011-12-29
申请号：US13125385
申请日：2010-03-16
申请人： Toyoaki Nakajima , Takeshi Miyashita , Yasushi Nagata , Yasufumi Uchida , Hideki Yoshizawa
发明人： Toyoaki Nakajima , Takeshi Miyashita , Yasushi Nagata , Yasufumi Uchida , Hideki Yoshizawa
IPC分类号： H01J49/26 , G01N27/70
CPC分类号： G01N27/66 , G01M3/202
摘要： An oxygen detection method, includes: preparing a grid, an ion collector, and a filament in which an oxide are formed on a surface of metal; controlling a filament current flowing to the filament so that an emission current becomes constant; discharging thermionic electrons which are caused by heat generation by applying the filament current, and generating ions by ionizing a gas; capturing the ions with the ion collector; and detecting oxygen being present in a vacuum processing chamber by measuring a filament current value.
摘要翻译：氧检测方法包括：制备栅格，离子收集器和在金属表面上形成氧化物的长丝; 控制流向灯丝的灯丝电流，使得发射电流变得恒定; 通过施加灯丝电流来放出由发热引起的热离子电子，并通过电离气体产生离子; 用离子收集器捕获离子; 并且通过测量灯丝电流值来检测存在于真空处理室中的氧气。

9. 发明授权

US08288715B2 Oxygen detection method, air leakage determination method, gas component detection device, and vacuum processing apparatus 有权
标题翻译：氧气检测方法，漏气测定方法，气体成分检测装置和真空处理装置
公开(公告)号：US08288715B2
公开(公告)日：2012-10-16
申请号：US13125385
申请日：2010-03-16
申请人： Toyoaki Nakajima , Takeshi Miyashita , Yasushi Nagata , Yasufumi Uchida , Hideki Yoshizawa
发明人： Toyoaki Nakajima , Takeshi Miyashita , Yasushi Nagata , Yasufumi Uchida , Hideki Yoshizawa
IPC分类号： H01J49/26
CPC分类号： G01N27/66 , G01M3/202
摘要： An oxygen detection method, includes: preparing a grid, an ion collector, and a filament in which an oxide are formed on a surface of metal; controlling a filament current flowing to the filament so that an emission current becomes constant; discharging thermionic electrons which are caused by heat generation by applying the filament current, and generating ions by ionizing a gas; capturing the ions with the ion collector; and detecting oxygen being present in a vacuum processing chamber by measuring a filament current value.
摘要翻译：氧检测方法包括：制备栅格，离子收集器和在金属表面上形成氧化物的长丝; 控制流向灯丝的灯丝电流，使得发射电流变得恒定; 通过施加灯丝电流来放出由发热引起的热离子电子，并通过电离气体产生离子; 用离子收集器捕获离子; 并且通过测量灯丝电流值来检测存在于真空处理室中的氧气。

10. 发明申请

US20090090854A1 Mass Spectrometer and Method of Using the Same 审中-公开
标题翻译：质谱仪及其使用方法
公开(公告)号：US20090090854A1
公开(公告)日：2009-04-09
申请号：US11915301
申请日：2006-05-17
申请人： Toyoaki Nakajima , Hideki Yoshizawa
发明人： Toyoaki Nakajima , Hideki Yoshizawa
IPC分类号： B01D59/44
CPC分类号： G01N27/62 , G01M3/202 , H01J41/10 , H01J49/00
摘要： A mass spectrometer is provided which is mounted on a wall portion of a chamber and analyzes a gas to be analyzed existing in the chamber. The mass spectrometer includes: a measurement unit which is inserted into the chamber at the time of mounting the mass spectrometer to the chamber and measures each partial pressure of gaseous components in the gas to be analyzed with respect to mass-to-charge ratios; a control unit which is disposed outside of the wall portion at the time of mounting the mass spectrometer on the chamber and is used to manipulate the measurement unit; and a display unit which is disposed outside of the wall portion at the time of mounting the mass spectrometer on the chamber and displays the measurement result of the measurement unit. Here, the measurement unit, the control unit, and the display unit are disposed close to each other.
摘要翻译：提供了一种质谱仪，其安装在室的壁部分上并分析存在于腔室中的待分析气体。质谱仪包括：测量单元，其在将质谱仪安装到室时插入室中，并测量关于质荷比的待分析气体中的气体组分的每个分压; 控制单元，其在将所述质谱仪安装在所述室上时设置在所述壁部的外侧，并用于操纵所述测量单元; 以及显示单元，其在将质谱仪安装在室上时设置在壁部的外侧，并显示测量单元的测量结果。这里，测量单元，控制单元和显示单元彼此靠近配置。

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