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1. 发明授权

US4440618A Gas discharge device comprising a pressure controller for controlling a pressure over a wide range 失效
标题翻译：气体放电装置包括用于在宽范围内控制压力的压力控制器
公开(公告)号：US4440618A
公开(公告)日：1984-04-03
申请号：US475862
申请日：1983-03-16
申请人： Toshiyuki Suzuki , Kazuo Nakamura
发明人： Toshiyuki Suzuki , Kazuo Nakamura
IPC分类号： B01J19/08 , C08F2/52 , C23C14/54 , C23C16/44 , C23C16/455 , C23C16/50 , H01J37/18 , H01J37/34 , H01L21/203 , H01L21/205 , C23C15/00
CPC分类号： H01J37/32449 , C23C14/54 , H01J37/18 , H01J37/34
摘要： In a gas discharge device for causing a gas discharge to start at a first pressure in a hollow space between a pair of electrodes and to continue at a second pressure lower than the first pressure therein, a gas pressure adjusting part is coupled to the hollow space to adjust a pressure between the first and the second pressures. The adjusting part comprises a needle valve which is controllable between the first and the second pressures and which has a double tapered orifice portion. Alternatively, the adjusting part comprises first and second sections for allowing a gas to flow at higher and lower flow rates so as to provide the first and the second pressures, respectively. The first section may comprise an additional hollow space controlled by a pair of solenoid controlled valves. The adjusting part cooperates with at least one of a gas introducing system and a gas exhausting system.
摘要翻译：在气体放电装置中，气体放电在一对电极之间的中空空间中以第一压力开始并且在低于其中的第一压力的第二压力下继续，气体压力调节部分连接到中空空间以调节第一和第二压力之间的压力。调节部件包括可在第一和第二压力之间控制并具有双锥形孔口部分的针阀。或者，调节部分包括用于允许气体以更高和更低流速流动的第一和第二部分，以分别提供第一和第二压力。第一部分可以包括由一对电磁控制阀控制的另外的中空空间。调节部件与气体导入系统和排气系统中的至少一个配合。

2. 发明授权

US08802334B2 Surface treatment method for a mask blank, method of manufacturing a mask blank, and method of manufacturing a mask 有权
标题翻译：面罩坯料的表面处理方法，掩模坯料的制造方法以及掩模的制造方法
公开(公告)号：US08802334B2
公开(公告)日：2014-08-12
申请号：US13440539
申请日：2012-04-05
申请人： Takeyuki Yamada , Toshiyuki Suzuki , Masahiro Hashimoto , Yasunori Yokoya
发明人： Takeyuki Yamada , Toshiyuki Suzuki , Masahiro Hashimoto , Yasunori Yokoya
IPC分类号： G03F1/00
CPC分类号： G03F1/68 , G03F1/80
摘要： Provided is a mask blank surface treatment method for surface-treating, using a treatment liquid, a surface of a thin film, to be formed into a transfer pattern, of a mask blank having the thin film on a substrate. The thin film is made of a material that can be etched by ion-based dry etching. The concentration of an etching inhibitor contained in the treatment liquid is 0.3 ppb or less.
摘要翻译：提供了一种掩模坯料表面处理方法，用于将具有薄膜的掩模坯料在基板上进行表面处理，使用处理液，形成转印图案的薄膜表面。该薄膜由可以通过基于离子的干蚀刻蚀刻的材料制成。包含在处理液中的蚀刻抑制剂的浓度为0.3ppb以下。

3. 发明授权

US08777347B2 Liquid discharging apparatus, inspection method, and medium having recorded program 有权
标题翻译：液体排放装置，检查方法和记录程序的介质
公开(公告)号：US08777347B2
公开(公告)日：2014-07-15
申请号：US13445992
申请日：2012-04-13
申请人： Osamu Shinkawa , Toshiyuki Suzuki
发明人： Osamu Shinkawa , Toshiyuki Suzuki
IPC分类号： B41J29/38
CPC分类号： B41J2/0451 , B41J2/04581
摘要： A printer has a plurality of dischargers for discharging ink, a detector for detecting an electric signal SW, and an inspector unit for inspecting the dischargers on the basis of the electric signal SW; and a grounding terminal connecting a drive element of a discharger being inspected is electrically disconnected from another grounding terminal and a grounding line GL when the electric signal SW is detected by the detector.
摘要翻译：打印机具有用于排出墨的多个放电器，用于检测电信号SW的检测器和用于基于电信号SW检查放电器的检查单元; 并且当检测器检测到电信号SW时，连接被检查的放电器的驱动元件的接地端子与另一接地端子和接地线GL电连接。

4. 发明授权

US08663876B2 Photomask blank, method of manufacturing the same, photomask, and method of manufacturing the same 有权
标题翻译：光掩模坯料，其制造方法，光掩模及其制造方法
公开(公告)号：US08663876B2
公开(公告)日：2014-03-04
申请号：US13201368
申请日：2010-02-04
申请人： Masahiro Hashimoto , Toshiyuki Suzuki , Hiroyuki Iwashita
发明人： Masahiro Hashimoto , Toshiyuki Suzuki , Hiroyuki Iwashita
IPC分类号： C23C16/34 , G03F1/22
CPC分类号： G03F1/50 , G03F1/32 , G03F1/54
摘要： A photomask blank for use in the manufacture of a photomask adapted to be applied with exposure light having a wavelength of 200 nm or less has a thin film on a transparent substrate. The thin film is made of a material containing a transition metal, silicon, and carbon and comprising silicon carbide and/or a transition metal carbide.
摘要翻译：用于制造适用于具有200nm以下的波长的曝光光的光掩模的光掩模坯料在透明基板上具有薄膜。薄膜由含有过渡金属，硅和碳的材料制成，并且包含碳化硅和/或过渡金属碳化物。

5. 发明授权

US08663875B2 Method of manufacturing a photomask 有权
标题翻译：制造光掩模的方法
公开(公告)号：US08663875B2
公开(公告)日：2014-03-04
申请号：US13201148
申请日：2010-01-29
申请人： Yasushi Okubo , Toshiyuki Suzuki , Masahiro Hashimoto
发明人： Yasushi Okubo , Toshiyuki Suzuki , Masahiro Hashimoto
IPC分类号： G03F1/48
CPC分类号： G03F1/48 , G03F1/32 , G03F1/54
摘要： A thin film composed of a material containing a metal and silicon is formed on a transparent substrate, and a thin film pattern is formed by patterning the thin film. Then, the main surface and the side walls of the thin film pattern are previously modified so as to prevent the transfer characteristics of the thin film pattern from changing more than predetermined even in the case where exposure light with a wavelength of 200 nm or less is cumulatively applied onto the thin film pattern which has been formed. The main surface and the side walls are modified by, for instance, performing heat treatment to the main surface and the side walls at 450-900° C. in the atmosphere containing oxygen.
摘要翻译：在透明基板上形成由含有金属和硅的材料构成的薄膜，通过图案化薄膜形成薄膜图案。然后，预先修改薄膜图案的主表面和侧壁，以便即使在波长为200nm以下的曝光光为200nm以下的情况下，也能够防止薄膜图案的转印特性变化超过规定累积地施加到已经形成的薄膜图案上。主表面和侧壁通过例如在含有氧的气氛中在450-900℃下对主表面和侧壁进行热处理而进行改性。

6. 发明授权

US08659305B2 Detection device for detecting impedance of sensor element in gas sensor and sensor unit equipped with detection device 有权
标题翻译：用于检测气体传感器中传感器元件阻抗的检测装置和配备检测装置的传感器单元
公开(公告)号：US08659305B2
公开(公告)日：2014-02-25
申请号：US13108091
申请日：2011-05-16
申请人： Toshiyuki Suzuki
发明人： Toshiyuki Suzuki
IPC分类号： G01R27/04 , G01R27/00 , G01R27/08
CPC分类号： G01N27/4065
摘要： In a sensor control circuit, an impedance signal output unit has a HPF, a P/H circuit, a LPF, etc., and detects an element impedance of a sensor element on the basis of an impedance response signal which is alternately changed in response to an alternating current signal supplied to the sensor element. The P/H circuit has an input comparator which inputs an impedance detection voltage Vz after the HPF, a rectifying element connected to the P/H circuit, and a hold capacitor which is charged by the output of the input comparator. The input comparator has a constant current circuit and a transistor. The constant current circuit limits an updating value of a hold voltage value Vph of the hold capacitor every alternating current period. The sensor control device detects the element impedance of the sensor element with high accuracy while preventing influence of noise.
摘要翻译：在传感器控制电路中，阻抗信号输出单元具有HPF，P / H电路，LPF等，并且基于响应中交替改变的阻抗响应信号来检测传感器元件的元件阻抗提供给传感器元件的交流信号。 P / H电路具有输入比较器，其在HPF之后输入阻抗检测电压Vz，连接到P / H电路的整流元件和由输入比较器的输出充电的保持电容器。输入比较器具有恒流电路和晶体管。恒流电路每交流电流限制保持电容器的保持电压值Vph的更新值。传感器控制装置以高精度检测传感器元件的元件阻抗，同时防止噪声的影响。

7. 发明授权

US08216742B2 Fuel cell and gas separator for fuel cell 有权
公开(公告)号：US08216742B2
公开(公告)日：2012-07-10
申请号：US12531366
申请日：2008-11-17
申请人： Yoshinori Yamamoto , Toshiyuki Suzuki , Haruyuki Aono , Junichi Shirahama
发明人： Yoshinori Yamamoto , Toshiyuki Suzuki , Haruyuki Aono , Junichi Shirahama
IPC分类号： H01M8/04 , H01M2/38
CPC分类号： H01M8/0254 , H01M8/0258 , H01M8/0265
摘要： In at least one of flow distribution areas 35 provided on a separator 15, plurality of first projections 46 formed in a region corresponding to a first section (parted regions 32a and 32c) of a center area (including parted regions 32a through 32c) having a relatively high flow rate of a first fluid (refrigerant) are designed to have a larger diameter of a cross section than plurality of first projections 46 formed in a region corresponding to a second section (parted region 32b) of the center area having a relatively low flow rate of the first fluid. This arrangement effectively attains a substantially uniform flow rate distribution of a fluid in a fluid flow path formed on a separator, which is configured to have concavo-convex structures formed in a mutually reversed relation on two opposed sides thereof.

8. 发明授权

US08100491B2 Liquid jet apparatus and printing apparatus 有权
公开(公告)号：US08100491B2
公开(公告)日：2012-01-24
申请号：US11780357
申请日：2007-07-19
申请人： Atsushi Oshima , Kunio Tabata , Toshiyuki Suzuki , Osamu Shinkawa , Tomoki Hatano
发明人： Atsushi Oshima , Kunio Tabata , Toshiyuki Suzuki , Osamu Shinkawa , Tomoki Hatano
IPC分类号： B41J29/38
摘要： A liquid jet apparatus includes a plurality of nozzles provided to the liquid jet head, an actuator provided corresponding to each of the nozzles, drive unit that applies a drive signal to the actuator, drive waveform signal generation unit that generates a drive waveform signal providing a reference of a signal for controlling the actuator, modulator unit that pulse-modulates the drive waveform signal generated by the drive waveform signal generation unit, a digital power amplifier for power-amplifying the modulated signal, which is pulse-modulated by the modulator unit, and a low-pass filter provided individually corresponding to the actuator and for supplying the actuator with the power amplified modulated signal power-amplified by the digital power amplifier as a drive signal after smoothing.

9. 发明申请

US20110217635A1 METHOD OF MANUFACTURING TRANSFER MASK AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 有权
标题翻译：制造转移掩模的方法和制造半导体器件的方法
公开(公告)号：US20110217635A1
公开(公告)日：2011-09-08
申请号：US13122680
申请日：2010-10-08
申请人： Masahiro Hashimoto , Kazuya Sakai , Toshiyuki Suzuki , Kazunori Ono
发明人： Masahiro Hashimoto , Kazuya Sakai , Toshiyuki Suzuki , Kazunori Ono
IPC分类号： G03F1/00
CPC分类号： G03F1/46 , G03F1/54 , G03F1/80 , G03F1/82
摘要： The present invention is a method of manufacturing a transfer mask with use of a mask blank in which a thin film for pattern formation and a chromium-based thin film made of a material containing chromium are stacked on a transparent substrate in this order. The thin film for pattern formation is made of material containing silicon and a transition metal other than chromium. The chromium-based thin film is made of a material containing chromium. Exposure light having a wavelength of 200 nm or less is applied to the transfer mask. In the manufacturing method, the transfer mask is produced by performing, in the following order, a process of forming a resist film having a transfer pattern on the chromium-based thin film, a process of forming a transfer pattern in the chromium-based thin film with use of a mask of the resist film having the transfer pattern, a process of forming a transfer pattern in the thin film for pattern formation with use of a mask of the chromium-based thin film having the transfer pattern, and a process of removing the chromium-based thin film by etching. The manufacturing method further includes a cleaning process of at least one of alkali solution cleaning, hot water cleaning, and ozone-containing water cleaning on the produced transfer mask until a width of the transfer pattern of the thin film for pattern formation is reduced by 4 nm or a space width of the thin film for pattern formation is increased by 4 nm.
摘要翻译：本发明是一种使用掩模坯料制造转印掩模的方法，其中用于图案形成的薄膜和由含铬材料制成的铬基薄膜依次层叠在透明基板上。用于图案形成的薄膜由含有硅和除铬以外的过渡金属的材料制成。铬基薄膜由含铬的材料制成。将具有200nm以下波长的曝光光施加到转印掩模。在制造方法中，通过以下顺序，通过在铬系薄膜上形成具有转印图案的抗蚀剂膜的工序来制造转印掩模，在铬系薄膜中形成转印图案的工序使用具有转印图案的抗蚀剂膜的掩模的膜，使用具有转印图案的铬基薄膜的掩模在图案形成用薄膜中形成转印图案的工序，以及通过蚀刻去除铬基薄膜。该制造方法还包括在制造的转印掩模上进行碱溶液清洗，热水清洗和含臭氧水清洗中的至少一种的清洗处理，直到图案形成用薄膜的转印图案的宽度减少4 nm或用于图案形成的薄膜的空间宽度增加4nm。

10. 发明授权

US07981265B2 Gas concentration measuring apparatus designed to enhance measurement accuracy in desired range 有权
标题翻译：气体浓度测量仪设计用于提高所需范围内的测量精度
公开(公告)号：US07981265B2
公开(公告)日：2011-07-19
申请号：US11797961
申请日：2007-05-09
申请人： Tomoo Kawase , Eiichi Kurokawa , Satoshi Hada , Toshiyuki Suzuki , Katsuhide Akimoto
发明人： Tomoo Kawase , Eiichi Kurokawa , Satoshi Hada , Toshiyuki Suzuki , Katsuhide Akimoto
IPC分类号： G01N27/41
CPC分类号： G01N27/419 , F02D41/1454 , F02D41/28 , G01R1/203 , G01R15/08 , G01R19/0092
摘要： A gas concentration measuring apparatus for use in air-fuel ratio control of automotive engines is designed to determine the concentration of oxygen within a wide and a narrow range using a sensor current flowing through a sensor element. The apparatus includes an amplifier circuit equipped with an operational amplifier and a plurality of amplifying resistors and a switch. The switch is responsive to a request signal to switch a relation in electrical connection between an operational amplifier and the amplifying resistors to distribute the amplifying resistors into an input resistor and a feedback resistor for the operational amplifier to change an amplification factor of the amplifier circuit. This results in a change in resolution of measurement of the concentration of oxygen, thereby ensuring enhanced accuracy in determining the concentration of oxygen in a selected one of the narrow and wide ranges.
摘要翻译：用于汽车发动机的空燃比控制的气体浓度测量装置设计成使用流过传感器元件的传感器电流来确定宽范围和窄范围内的氧浓度。该装置包括配备有运算放大器和多个放大电阻器和开关的放大器电路。开关响应于请求信号以在运算放大器和放大电阻之间的电气连接中切换关系，以将放大电阻器分配到输入电阻器和用于运算放大器的反馈电阻器以改变放大器电路的放大系数。这导致测量氧浓度的分辨率的变化，从而确保在选定的窄范围和宽范围内确定氧气浓度的提高的准确性。

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