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    • 4. 发明授权
    • Method of forming wiring pattern and method of forming gate electrode for TFT
    • 形成布线图案的方法和形成TFT的栅电极的方法
    • US07678411B2
    • 2010-03-16
    • US11206802
    • 2005-08-19
    • Toshimitsu HiraiShinri Sakai
    • Toshimitsu HiraiShinri Sakai
    • B05D5/12
    • H01L51/0022C23C24/00H01L51/055H05K3/125H05K2201/09727H05K2201/09909H05K2203/013
    • The invention provides a method of forming a wiring pattern in which a conductive material layer is formed in a pattern formation region having a first region, which is bordered by a bank pattern and has a first width, and a second region, which touches the first region and has a second width smaller than the first width, on a substrate, by discharging a droplet of a conductive material in a liquid phase using a droplet discharge device. The method includes forming the conductive material layer to cover the first region and the second region, by discharging the droplet having a diameter smaller than the first width and greater than the second width toward the first region. In this case, the droplet is discharged such that the droplet lands at a position that faces a boundary line between the first region and the second region.
    • 本发明提供一种形成布线图案的方法,其中在具有第一区域的图案形成区域中形成导电材料层,所述第一区域由堤形图案界定并具有第一宽度,第二区域与第一区域接触, 并且在基板上通过使用液滴喷射装置以液相排出导电材料的液滴而具有小于第一宽度的第二宽度。 该方法包括通过将具有小于第一宽度的直径小于第二宽度的墨滴排出第一区域,形成覆盖第一区域和第二区域的导电材料层。 在这种情况下,液滴被排出,使得液滴在面对第一区域和第二区域之间的边界线的位置处着落。
    • 7. 发明授权
    • Pattern forming method, method of manufacturing electronic apparatus, and method of manufacturing substrate
    • 图案形成方法,电子设备的制造方法以及基板的制造方法
    • US07300132B2
    • 2007-11-27
    • US11207931
    • 2005-08-22
    • Toshimitsu HiraiShinri Sakai
    • Toshimitsu HiraiShinri Sakai
    • B41J29/393B41J29/38H01L21/00H01L21/20
    • H05K3/125B41J29/393H05K2201/09909H05K2203/013
    • A pattern forming method is a method of forming a pattern on a surface of an object by using a droplet discharge device that discharges a first droplet and a second droplet from nozzles. The pattern forming method includes when coordinates on the object surface are represented by integers m and n, and two integers other than zero are represented by i and j, forming a bank pattern that borders a pattern formation region such that a range of a first projection image of the first droplet when a landable position with a coordinate (m, n) substantially coincides with the center of the first projection image and a range of a second projection image of the second droplet when a landable position with a coordinate (m+i, n+j) substantially coincides with the center of the second projection image fall within the pattern formation region on the surface of the object; and forming a pattern that covers the pattern formation region by discharging the first droplet to the landable position with the coordinate (m, n) and by discharging the second droplet to the landable position with the coordinate (m+i, n+j). Further, the distance between the landable position with the coordinate (m, n) and the landable position with the coordinate (m+i, n+j) is determined such that the first droplet and the second droplet flow into each other after the first and second droplets spread on the pattern formation region.
    • 图案形成方法是通过使用从喷嘴排出第一液滴和第二液滴的液滴排出装置在物体的表面上形成图案的方法。 图案形成方法包括:当物体表面上的坐标由整数m和n表示时,除了零之外的两个整数由i和j表示,形成与图案形成区域相邻的排列图案,使得第一投影 当具有坐标(m,n)的可着陆位置与第一投影图像的中心大致重合的第一液滴的图像和第二液滴的第二投影图像的范围时,具有坐标(m + i ,n + j)基本上与第二投影图像的中心一致,落在物体表面上的图案形成区域内; 通过以坐标(m,n)排出第一液滴到着落位置,并以坐标(m + i,n + j)排出第二液滴到可着落位置,形成覆盖图案形成区域的图案。 此外,确定具有坐标(m,n)的可着陆位置与具有坐标(m + i,n + j)的可着陆位置之间的距离,使得第一液滴和第二液滴在第一液滴和第二液滴之后彼此流动 并且第二液滴扩散在图案形成区域上。