会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明申请
    • THIN-FILM MANUFACTURING EQUIPMENT, METHOD FOR MANUFACTURING THIN FILM, AND METHOD FOR MAINTAINING THIN-FILM MANUFACTURING EQUIPMENT
    • 薄膜制造设备,制造薄膜的方法和用于维护薄膜制造设备的方法
    • US20120315395A1
    • 2012-12-13
    • US13579881
    • 2011-02-09
    • Eiji KuribeTakeyoshi Takahashi
    • Eiji KuribeTakeyoshi Takahashi
    • C23C16/458B65H29/00H01L21/677H01L31/18
    • H01L21/67781H01L21/67724H01L21/67736
    • The present invention aims to provide thin-film manufacturing equipment, a method for manufacturing a thin film, and a method for maintaining thin-film manufacturing equipment, which are capable of depositing with high productivity even in the occurrence of unexpected failure. Thin-film manufacturing equipment provided herein includes a group of deposition chambers that is a collection of deposition chambers each provided with a deposition compartment, in which a thin film is deposited on a substrate, a movable chamber designed to convey a substrate, and more than two substrate temporary holding devices each for temporarily holding a substrate, wherein the movable device is designed to deliver and receive the substrate to and from each of the deposition chambers and designed to perform at least one action selected from the group consisting of receiving and discharging of the substrate from and to each of the more than two substrate temporary holding devices.
    • 本发明的目的在于提供薄膜制造设备,薄膜制造方法以及保持薄膜制造设备的方法,即使在出现意外的故障的情况下也能够以高生产率进行存储。 本文提供的薄膜制造设备包括一组沉积室,每个沉积室各自设置有沉积室,沉积室中沉积有薄膜,设计成输送基板的可移动室,以及多于 两个用于临时保持基板的基板临时保持装置,其中可移动装置被设计成向每个沉积室输送和接收基板,并被设计成执行选自以下的至少一个动作:接收和排出 基板从多于两个的基板临时保持装置中的每一个到基板。