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1. 发明授权

US07460923B2 Substrate processing system managing apparatus information of substrate processing apparatus 有权
标题翻译：基板处理系统管理基板处理装置的装置信息
公开(公告)号：US07460923B2
公开(公告)日：2008-12-02
申请号：US11368586
申请日：2006-03-06
申请人： Toru Kitamoto , Kenji Kamei , Hidekazu Inoue , Tetsuya Hamada
发明人： Toru Kitamoto , Kenji Kamei , Hidekazu Inoue , Tetsuya Hamada
IPC分类号： G06F19/00
CPC分类号： H01L21/67276 , G05B19/4184 , G05B23/0264 , G05B2219/31337 , G05B2219/31365 , G05B2219/31402 , G05B2219/32207 , Y02P90/14 , Y02P90/18
摘要： A substrate processing system comprises a substrate processing apparatus, an information storage server and a support computer, which are connected to a network respectively. When the substrate processing apparatus causes a failure, an alarm processing part extracts a necessary relevant log file and stores the same in a hard disk of the information storage server. A failure information generation part generates failure information, which in turn is finally stored in the hard disk of the information storage servers as a failure information database. An apparatus information uncasing part renders the relevant log file and the failure information database readable from the support computer located in a remote place. Thus, the relevant log file and the failure information database can be immediately read. In other words, provided is a substrate processing system rendering operation information immediately readable from a remote place when the substrate processing apparatus causes a failure.
摘要翻译：基板处理系统包括分别连接到网络的基板处理装置，信息存储服务器和支持计算机。当基板处理装置发生故障时，报警处理部分提取必要的相关日志文件并将其存储在信息存储服务器的硬盘中。故障信息生成部生成作为故障信息数据库而最终存储在信息存储服务器的硬盘中的故障信息。设备信息解除部分使相关日志文件和故障信息数据库从位于远程位置的支持计算机可读。因此，可以立即读取相关日志文件和故障信息数据库。换句话说，提供了当基板处理装置导致故障时，从远程位置立即读取操作信息的基板处理系统。

2. 发明授权

US07333867B2 Substrate processing system managing apparatus information of substrate processing apparatus 有权
标题翻译：基板处理系统管理基板处理装置的装置信息
公开(公告)号：US07333867B2
公开(公告)日：2008-02-19
申请号：US11368862
申请日：2006-03-06
申请人： Toru Kitamoto , Kenji Kamei , Hidekazu Inoue , Tetsuya Hamada
发明人： Toru Kitamoto , Kenji Kamei , Hidekazu Inoue , Tetsuya Hamada
IPC分类号： G06F19/00
CPC分类号： H01L21/67276 , G05B19/4184 , G05B23/0264 , G05B2219/31337 , G05B2219/31365 , G05B2219/31402 , G05B2219/32207 , Y02P90/14 , Y02P90/18
摘要： A substrate processing system comprises a substrate processing apparatus and a support computer, which are connected to a network respectively. Updated countermeasure information is accumulated in the support computer by a system administrator. When the substrate processing apparatus causes a failure, content of the failure is displayed on a display part while an alarm processing part controls process according to an alarm definition file. Further, a countermeasure information acquisition part requires updated countermeasure information against the failure from the support computer. In response to this, countermeasure information distribution part of the support computer transmits updated countermeasure information. Thus, updated countermeasure information can be read instantly when a failure occurs.
摘要翻译：基板处理系统包括分别连接到网络的基板处理装置和支撑计算机。更新的对策信息由系统管理员在支持计算机中累积。当基板处理装置导致故障时，故障的内容显示在显示部分上，而报警处理部分根据报警定义文件来控制处理。此外，对策信息获取部件需要针对来自支持计算机的故障的更新的对策信息。响应于此，支持计算机的对策信息分发部分发送更新的对策信息。因此，当发生故障时，可以立即读取更新的对策信息。

3. 发明申请

US20060241803A1 Substrate processing system managing apparatus information of substrate processing apparatus 有权
公开(公告)号：US20060241803A1
公开(公告)日：2006-10-26
申请号：US11368862
申请日：2006-03-06
申请人： Toru Kitamoto , Kenji Kamei , Hidekazu Inoue , Tetsuya Hamada
发明人： Toru Kitamoto , Kenji Kamei , Hidekazu Inoue , Tetsuya Hamada
IPC分类号： G06F19/00
CPC分类号： H01L21/67276 , G05B19/4184 , G05B23/0264 , G05B2219/31337 , G05B2219/31365 , G05B2219/31402 , G05B2219/32207 , Y02P90/14 , Y02P90/18
摘要： A substrate processing system comprises a substrate processing apparatus, an information storage server and a support computer, which are connected to a network respectively. When the substrate processing apparatus causes a failure, an alarm processing part extracts a necessary relevant log file and stores the same in a hard disk of the information storage server. A failure information generation part generates failure information, which in turn is finally stored in the hard disk of the information storage servers as a failure information database. An apparatus information uncasing part renders the relevant log file and the failure information database readable from the support computer located in a remote place. Thus, the relevant log file and the failure information database can be immediately read. In other words, provided is a substrate processing system rendering operation information immediately readable from a remote place when the substrate processing apparatus causes a failure.

4. 发明申请

US20060206229A1 Substrate processing system managing apparatus information of substrate processing apparatus 有权
公开(公告)号：US20060206229A1
公开(公告)日：2006-09-14
申请号：US11368586
申请日：2006-03-06
申请人： Toru Kitamoto , Kenji Kamei , Hidekazu Inoue , Tetsuya Hamada
发明人： Toru Kitamoto , Kenji Kamei , Hidekazu Inoue , Tetsuya Hamada
IPC分类号： G06F19/00
CPC分类号： H01L21/67276 , G05B19/4184 , G05B23/0264 , G05B2219/31337 , G05B2219/31365 , G05B2219/31402 , G05B2219/32207 , Y02P90/14 , Y02P90/18
摘要： A substrate processing system comprises a substrate processing apparatus, an information storage server and a support computer, which are connected to a network respectively. When the substrate processing apparatus causes a failure, an alarm processing part extracts a necessary relevant log file and stores the same in a hard disk of the information storage server. A failure information generation part generates failure information, which in turn is finally stored in the hard disk of the information storage servers as a failure information database. An apparatus information uncasing part renders the relevant log file and the failure information database readable from the support computer located in a remote place. Thus, the relevant log file and the failure information database can be immediately read. In other words, provided is a substrate processing system rendering operation information immediately readable from a remote place when the substrate processing apparatus causes a failure.

5. 发明授权

US07698107B2 Managing apparatus for substrate processing system 有权
标题翻译：管理基板处理系统的装置
公开(公告)号：US07698107B2
公开(公告)日：2010-04-13
申请号：US11839134
申请日：2007-08-15
申请人： Toru Kitamoto , Kenji Kamei , Hidekazu Inoue , Tetsuya Hamada
发明人： Toru Kitamoto , Kenji Kamei , Hidekazu Inoue , Tetsuya Hamada
IPC分类号： G06F11/30 , G21C17/00
CPC分类号： G05B19/41865 , G05B19/418 , G05B2219/31333 , G05B2219/31379 , Y02P90/14 , Y02P90/18 , Y02P90/185 , Y02P90/20 , Y02P90/86
摘要： A substrate processing apparatus and an information storage server are connected with each other through a network. A storage part of the substrate processing apparatus stores set information and a control program, for controlling operation of the substrate processing apparatus according to the set information and the control program. The substrate processing apparatus is provided with a schedule function, for transmitting a backup instructional command according to the schedule. In response to this instructional command, the substrate processing apparatus generates a duplicate of specified information stored in the aforementioned storage part and transfers the duplicate information to the information storage server through the network. The information storage server stores the received duplicate information in a hard disk as backup data. The information storage server can also store only differential data of the duplicate information. Thus, information for controlling the operation of the substrate processing apparatus can be efficiently backed up without burdening the user.
摘要翻译：基板处理装置和信息存储服务器通过网络相互连接。基板处理装置的存储部分存储设定信息和控制程序，用于根据设定信息和控制程序控制基板处理装置的操作。衬底处理装置具有调度功能，用于根据时间表发送备份指令命令。响应于该指示命令，基板处理装置生成存储在上述存储部中的指定信息的副本，并通过网络将重复信息传送到信息存储服务器。信息存储服务器将接收的重复信息存储在硬盘中作为备份数据。信息存储服务器还可以仅存储重复信息的差分数据。因此，可以有效地备份用于控制基板处理装置的操作的信息，而不会使用户负担。

6. 发明授权

US07280883B2 Substrate processing system managing apparatus information of substrate processing apparatus 有权
标题翻译：基板处理系统管理基板处理装置的装置信息
公开(公告)号：US07280883B2
公开(公告)日：2007-10-09
申请号：US10232319
申请日：2002-08-29
申请人： Toru Kitamoto , Kenji Kamei , Hidekazu Inoue , Tetsuya Hamada
发明人： Toru Kitamoto , Kenji Kamei , Hidekazu Inoue , Tetsuya Hamada
IPC分类号： G06F19/00
CPC分类号： G05B19/41865 , G05B19/418 , G05B2219/31333 , G05B2219/31379 , Y02P90/14 , Y02P90/18 , Y02P90/185 , Y02P90/20 , Y02P90/86
摘要： A substrate processing apparatus and an information storage server are connected with each other through a network. A storage part of the substrate processing apparatus stores set information and a control program, for controlling operation of the substrate processing apparatus according to the set information and the control program. The substrate processing apparatus is provided with a schedule function, for transmitting a backup instructional command according to the schedule. In response to this instructional command, the substrate processing apparatus generates a duplicate of specified information stored in the aforementioned storage part and transfers the duplicate information to the information storage server through the network. The information storage server stores the received duplicate information in a hard disk as backup data. The information storage server can also store only differential data of the duplicate information. Thus, information for controlling the operation of the substrate processing apparatus can be efficiently backed up without burdening the user.
摘要翻译：基板处理装置和信息存储服务器通过网络相互连接。基板处理装置的存储部分存储设定信息和控制程序，用于根据设定信息和控制程序控制基板处理装置的操作。衬底处理装置具有调度功能，用于根据时间表发送备份指令命令。响应于该指示命令，基板处理装置生成存储在上述存储部中的指定信息的副本，并通过网络将重复信息传送到信息存储服务器。信息存储服务器将接收的重复信息存储在硬盘中作为备份数据。信息存储服务器还可以仅存储重复信息的差分数据。因此，可以有效地备份用于控制基板处理装置的操作的信息，而不会对用户造成负担。

7. 发明授权

US07047100B2 Substrate processing system managing apparatus information of substrate processing apparatus 有权
公开(公告)号：US07047100B2
公开(公告)日：2006-05-16
申请号：US10189975
申请日：2002-07-02
申请人： Toru Kitamoto , Kenji Kamei , Hidekazu Inoue , Tetsuya Hamada
发明人： Toru Kitamoto , Kenji Kamei , Hidekazu Inoue , Tetsuya Hamada
IPC分类号： G06F19/00
CPC分类号： H01L21/67276 , G05B19/4184 , G05B23/0264 , G05B2219/31337 , G05B2219/31365 , G05B2219/31402 , G05B2219/32207 , Y02P90/14 , Y02P90/18
摘要： A substrate processing system comprises a substrate processing apparatus, an information storage server and a support computer, which are connected to a network respectively. When the substrate processing apparatus causes a failure, an alarm processing part extracts a necessary relevant log file and stores the same in a hard disk of the information storage server. A failure information generation part generates failure information, which in turn is finally stored in the hard disk of the information storage servers as a failure information database. An apparatus information uncasing part renders the relevant log file and the failure information database readable from the support computer located in a remote place. Thus, the relevant log file and the failure information database can be immediately read. In other words, provided is a substrate processing system rendering operation information immediately readable from a remote place when the substrate processing apparatus causes a failure.

8. 发明授权

US5867389A Substrate processing management system with recipe copying functions 失效
标题翻译：基材加工管理系统配方复印功能
公开(公告)号：US5867389A
公开(公告)日：1999-02-02
申请号：US757069
申请日：1996-11-26
申请人： Tetsuya Hamada , Hidekazu Inoue
发明人： Tetsuya Hamada , Hidekazu Inoue
IPC分类号： G11B7/26 , G05B19/418 , H01L21/02 , H01L21/66 , H01L21/677 , G06F19/00
CPC分类号： H01L22/20 , G05B19/41865 , G05B2219/31151 , G05B2219/31206 , G05B2219/32129 , G05B2219/45031 , Y02P90/18 , Y02P90/20
摘要： A substrate processing system includes a plurality of processing stations for processing substrates, and a management station connected with the plurality of processing stations to constitute a computer network. Each processing station includes a plurality of processing units for treating the substrates, first storage device for storing processing recipes, and inter-station recipe copy unit for copying a desired processing recipe from another processing station and storing the copied processing recipe into the first storage device. Each processing recipe defines an order of conveyance of each substrate among the plurality of processing units and processing conditions in each processing unit. The management station includes second storage means for storing processing recipes for the plurality of processing stations, and specification upload/download means for transferring a desired processing recipe between the second storage means and the first storage means included in each of the plurality of processing stations and for storing the transferred processing recipe therein.
摘要翻译：基板处理系统包括用于处理基板的多个处理站，以及与多个处理站连接以构成计算机网络的管理站。每个处理站包括用于处理基板的多个处理单元，用于存储处理配方的第一存储装置和用于从另一个处理站复制所需处理配方的站间配方复制单元，并将复制的处理配方存储到第一存储装置。每个处理配方确定多个处理单元中的每个基板的输送顺序和每个处理单元中的处理条件。管理站包括用于存储多个处理站的处理配方的第二存储装置和用于在第二存储装置和包括在多个处理站中的每个处理站中的第一存储装置之间传送所需处理配方的规范上载/下载装置，以及用于存储转移的处理配方。

9. 发明申请

US20070270419A1 PYRIDINYLPYRAZOLOPYRIMIDINONE DERIVATIVES AS PDE 7 INHIBITORS 失效
标题翻译：作为PDE 7抑制剂的吡啶基二吡咯并吡啶酮衍生物
公开(公告)号：US20070270419A1
公开(公告)日：2007-11-22
申请号：US11748421
申请日：2007-05-14
申请人： Hidekazu Inoue , Hidenobu Murafuji , Yasuhiro Hayashi
发明人： Hidekazu Inoue , Hidenobu Murafuji , Yasuhiro Hayashi
IPC分类号： A61K31/519 , A61K31/496 , A61K31/5377 , A61K31/551 , A61P1/00 , A61P11/00 , A61P9/00 , C07D401/14 , C07D413/14 , C07D487/04
CPC分类号： C07D487/04
摘要： To provide the compounds inhibiting PDE 7 selectively, and therefore, enhance cellular cAMP level. Consequently, the compound is useful for treating various kinds of disease such as allergic disease, inflammatory disease or immunologic disease. The compound is pyridinylpyrazolo-pyrimidinone compound represented by the following formula (IA) or (IB): especially, R1 is cyclohexyl or cycloheptyl group, R2 is methyl; R3 is a group: —NR5R6 or —S(O)0-2R8;hydrogen atom; nitro group; cyano group; a halogen atom; heteroaryl group; and R4 is methoxy or ethoxy group.
摘要翻译：选择性地提供抑制PDE 7的化合物，从而提高细胞cAMP水平。因此，该化合物可用于治疗各种疾病如过敏性疾病，炎性疾病或免疫疾病。该化合物是由下式（IA）或（IB）表示的吡啶基吡唑并嘧啶酮化合物：特别地，R 1是环己基或环庚基，R 2是甲基; R 3是一个基团：-NR 5 R 6或-S（O）0-2 R 10， SUP> 8;氢原子; 硝基; 氰基; 卤素原子; 杂芳基; R 4是甲氧基或乙氧基。

10. 发明申请

US20060128728A1 Pyridinylpyrazolopyrimidinone derivatives as pde 7 inhibitors 审中-公开
标题翻译：吡啶基吡唑并嘧啶酮衍生物作为pde 7抑制剂
公开(公告)号：US20060128728A1
公开(公告)日：2006-06-15
申请号：US10560386
申请日：2004-06-11
申请人： Hidekazu Inoue , Hidenobu Murafuji , Yasuhiro Hayashi
发明人： Hidekazu Inoue , Hidenobu Murafuji , Yasuhiro Hayashi
IPC分类号： A61K31/519 , C07D487/02
CPC分类号： C07D487/04
摘要： To provide the compounds inhibiting PDE 7 selectively, and therefore, enhance cellular cAMP level. Consequently, the compound is useful for treating various kinds of disease such as allergic disease, inflammatory disease or immunologic disease. The compound is pyridinylpyrazolopyrimidinone compound represented by the following formula (IA) or (IB): especially, R1 is cyclohexyl or cycloheptyl group, R2 is methyl; R3 is a group: —NR5R6 or —S(O)0-2R8; hydrogen atom; nitro group; cyano group; a halogen atom; heteroaryl group; and R4 is methoxy or ethoxy group.
摘要翻译：选择性地提供抑制PDE 7的化合物，从而提高细胞cAMP水平。因此，该化合物可用于治疗各种疾病如过敏性疾病，炎性疾病或免疫疾病。化合物是由下式（IA）或（IB）表示的吡啶基吡唑并嘧啶酮化合物：特别地，R 1是环己基或环庚基，R 2是甲基; R 3是一个基团：-NR 5 R 6或-S（O）0-2 R 10， SUP> 8 氢原子; 硝基; 氰基; 卤素原子; 杂芳基; R 4是甲氧基或乙氧基。

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