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1. 发明申请

US20080268289A1 Perpendicular magnetic recording medium and manufacturing method thereof 有权
标题翻译：垂直磁记录介质及其制造方法
公开(公告)号：US20080268289A1
公开(公告)日：2008-10-30
申请号：US12150165
申请日：2008-04-25
申请人： Tomoo Yamamoto , Joe Inagaki , Takuya Kojima , Das Sarbanoo
发明人： Tomoo Yamamoto , Joe Inagaki , Takuya Kojima , Das Sarbanoo
IPC分类号： G11B5/733 , C23C14/34
CPC分类号： G11B5/8404 , C23C14/205 , G11B5/65 , G11B5/66 , G11B5/732 , G11B5/7325 , G11B5/851
摘要： Embodiments of the present invention provide a perpendicular magnetic recording medium with less medium noise, excellent overwrite characteristics, and scratch resistance. According to one embodiment, when an Ar gas with addition of a micro-amount of oxygen is used upon forming an upper Ru intermediate layer, a micro-structure of a magnetic layer formed thereon can be formed in a state where no magnetic oxide region is segregated and the magnetic crystal grains are isolated. In this case, a gas pressure for forming the upper intermediate layer is set to 5 Pa or more and 12 Pa or less which is a region much higher compared with 0.5 Pa or more and 1 Pa for the lower Ru intermediate layer. Since writing by a head becomes difficult remarkably in the perpendicular magnetic medium having magnetic crystal grains promoted for isolation, a second magnetic layer for facilitating magnetization reversal by lowering the oxide concentration and somewhat strengthening coupling between particles only in the magnetic layer on the side of the surface is formed to a layer above the first magnetic layer as a main part.
摘要翻译：本发明的实施例提供了具有较少中等噪声，优异的重写特性和耐擦伤性的垂直磁记录介质。根据一个实施方案，当形成上Ru中间层时使用添加微量氧的Ar气体时，可以在不形成氧化物区域的状态下形成其上形成的磁性层的微结构分离，磁性晶粒分离。在这种情况下，用于形成上部中间层的气体压力被设定为5Pa以上且12Pa以下，与下述Ru中间层的0.5Pa以上且1Pa相比，区域高得多。由于在具有促进隔离的磁性晶粒的垂直磁性介质中，头部的写入变得困难，所以通过降低氧化物浓度促进磁化反转的第二磁性层和仅仅在表面形成为第一磁性层上方的层作为主要部分。

2. 发明授权

US08647755B2 Perpendicular magnetic recording medium and manufacturing method thereof 有权
标题翻译：垂直磁记录介质及其制造方法
公开(公告)号：US08647755B2
公开(公告)日：2014-02-11
申请号：US12150165
申请日：2008-04-25
申请人： Tomoo Yamamoto , Joe Inagaki , Takuya Kojima , Das Sarbanoo
发明人： Tomoo Yamamoto , Joe Inagaki , Takuya Kojima , Das Sarbanoo
IPC分类号： G11B5/66
CPC分类号： G11B5/8404 , C23C14/205 , G11B5/65 , G11B5/66 , G11B5/732 , G11B5/7325 , G11B5/851
摘要： Embodiments of the present invention provide a perpendicular magnetic recording medium with less medium noise, excellent overwrite characteristics, and scratch resistance. According to one embodiment, when an Ar gas with addition of a micro-amount of oxygen is used upon forming an upper Ru intermediate layer, a micro-structure of a magnetic layer formed thereon can be formed in a state where no magnetic oxide region is segregated and the magnetic crystal grains are isolated. In this case, a gas pressure for forming the upper intermediate layer is set to 5 Pa or more and 12 Pa or less which is a region much higher compared with 0.5 Pa or more and 1 Pa for the lower Ru intermediate layer. Since writing by a head becomes difficult remarkably in the perpendicular magnetic medium having magnetic crystal grains promoted for isolation, a second magnetic layer for facilitating magnetization reversal by lowering the oxide concentration and somewhat strengthening coupling between particles only in the magnetic layer on the side of the surface is formed to a layer above the first magnetic layer as a main part.
摘要翻译：本发明的实施例提供了具有较少中等噪声，优异的重写特性和耐擦伤性的垂直磁记录介质。根据一个实施方案，当形成上Ru中间层时使用添加微量氧的Ar气体时，可以在不形成氧化物区域的状态下形成其上形成的磁性层的微结构分离，磁性晶粒分离。在这种情况下，用于形成上部中间层的气体压力被设定为5Pa以上且12Pa以下，与下述Ru中间层的0.5Pa以上且1Pa相比，区域高得多。由于在具有促进隔离的磁性晶粒的垂直磁性介质中，头部的写入变得困难，所以通过降低氧化物浓度促进磁化反转的第二磁性层和仅仅在表面形成为第一磁性层上方的层作为主要部分。

3. 发明授权

US07545604B2 Magnetic recording medium having a cobalt-based alloy film for high density recording and magnetic storage device using same 有权
标题翻译：具有用于高密度记录的钴基合金膜和使用它的磁存储装置的磁记录介质
公开(公告)号：US07545604B2
公开(公告)日：2009-06-09
申请号：US11317344
申请日：2005-12-22
申请人： Tatsuya Hinoue , Yotsuo Yahisa , Tomoo Yamamoto , Joe Inagaki , Hiroyuko Suzuki , Hidekazu Kashiwase
发明人： Tatsuya Hinoue , Yotsuo Yahisa , Tomoo Yamamoto , Joe Inagaki , Hiroyuko Suzuki , Hidekazu Kashiwase
IPC分类号： G11B5/66 , B32B3/02
CPC分类号： G11B5/65 , G11B5/656 , G11B5/66 , H01F10/16 , H01F10/265
摘要： In one embodiment, a magnetic recording medium comprises an underlying film, a magnetic film and a protective film formed in this order on a substrate. The magnetic film is a cobalt-base alloy film containing chromium and has a plurality of magnetic layers stacked without interposition of any non-magnetic layer. The plural magnetic layers comprise first, second and third magnetic layers. The first magnetic layer is disposed between the underlying film and the second magnetic layer. The second magnetic layer is disposed between the first magnetic layer and the third magnetic layer. The third magnetic layer is disposed between the second magnetic layer and the protective film. The concentration of chromium contained in the first magnetic layer is lower than that of chromium contained in the second magnetic layer. The thickness of the first magnetic layer is smaller than that of the second magnetic layer. The magnetic layers which overlie the first magnetic layer further contain platinum and boron. The concentration of chromium contained in the third magnetic layer is lower than that of chromium contained in the second magnetic layer.
摘要翻译：在一个实施例中，磁记录介质包括在衬底上依次形成的下面的膜，磁性膜和保护膜。磁性膜是含有铬的钴基合金膜，并且具有堆叠而不插入任何非磁性层的多个磁性层。多个磁性层包括第一，第二和第三磁性层。第一磁性层设置在下面的膜和第二磁性层之间。第二磁性层设置在第一磁性层和第三磁性层之间。第三磁性层设置在第二磁性层和保护膜之间。第一磁性层中含有的铬的浓度低于第二磁性层中含有的铬的浓度。第一磁性层的厚度小于第二磁性层的厚度。覆盖在第一磁性层上的磁性层还含有铂和硼。第三磁性层中含有的铬的浓度低于第二磁性层中含有的铬的浓度。

4. 发明申请

US20090258253A1 Magnetic recording medium for high density recording and magnetic storage device using same 有权
标题翻译：用于高密度记录和磁存储装置的磁记录介质
公开(公告)号：US20090258253A1
公开(公告)日：2009-10-15
申请号：US12387164
申请日：2009-04-28
申请人： Tatsuya Hinoue , Yotsuo Yahisa , Tomoo Yamamoto , Joe Inagaki , Hiroyuko Suzuki , Hidekazu Kashiwase
发明人： Tatsuya Hinoue , Yotsuo Yahisa , Tomoo Yamamoto , Joe Inagaki , Hiroyuko Suzuki , Hidekazu Kashiwase
IPC分类号： G11B5/66
CPC分类号： G11B5/65 , G11B5/656 , G11B5/66 , H01F10/16 , H01F10/265
摘要： In one embodiment, a magnetic recording medium comprises an underlying film, a magnetic film and a protective film formed in this order on a substrate. The magnetic film is a cobalt-base alloy film containing chromium and has a plurality of magnetic layers stacked without interposition of any non-magnetic layer. The plural magnetic layers comprise first, second and third magnetic layers. The first magnetic layer is disposed between the underlying film and the second magnetic layer. The second magnetic layer is disposed between the first magnetic layer and the third magnetic layer. The third magnetic layer is disposed between the second magnetic layer and the protective film. The concentration of chromium contained in the first magnetic layer is lower than that of chromium contained in the second magnetic layer. The thickness of the first magnetic layer is smaller than that of the second magnetic layer. The magnetic layers which overlie the first magnetic layer further contain platinum and boron. The concentration of chromium contained in the third magnetic layer is lower than that of chromium contained in the second magnetic layer.
摘要翻译：在一个实施例中，磁记录介质包括在衬底上依次形成的下面的膜，磁性膜和保护膜。磁性膜是含有铬的钴基合金膜，并且具有堆叠而不插入任何非磁性层的多个磁性层。多个磁性层包括第一，第二和第三磁性层。第一磁性层设置在下面的膜和第二磁性层之间。第二磁性层设置在第一磁性层和第三磁性层之间。第三磁性层设置在第二磁性层和保护膜之间。第一磁性层中含有的铬的浓度低于第二磁性层中含有的铬的浓度。第一磁性层的厚度小于第二磁性层的厚度。覆盖在第一磁性层上的磁性层还含有铂和硼。第三磁性层中含有的铬的浓度低于第二磁性层中含有的铬的浓度。

5. 发明申请

US20080113225A1 Perpendicular magnetic recording medium and method for manufacturing the same 审中-公开
标题翻译：垂直磁记录介质及其制造方法
公开(公告)号：US20080113225A1
公开(公告)日：2008-05-15
申请号：US11983576
申请日：2007-11-09
申请人： Kiwamu Tanahashi , Yoshibumi Matsuda , Mineaki Kodama , Koji Sakamoto , Tomoo Yamamoto , Joe Inagaki
发明人： Kiwamu Tanahashi , Yoshibumi Matsuda , Mineaki Kodama , Koji Sakamoto , Tomoo Yamamoto , Joe Inagaki
IPC分类号： G11B5/66 , G11B5/84
CPC分类号： G11B5/66 , G11B5/65 , G11B5/851
摘要： Fluctuation of read/write characteristics during mass production is suppressed for a perpendicular magnetic recording medium having a perpendicular recording layer of a bi-layered structure, in which a first Co—Cr—Pt alloy magnetic layer containing an oxide and a second Co—Cr—Pt magnetic layer are formed successively. According to one embodiment, in a perpendicular magnetic recording medium, an adhesion layer, a soft magnetic underlayer, a seed layer, an intermediate layer, a perpendicular recording layer, a protective layer, and a lubricating layer are successively formed on a substrate. The perpendicular recording layer has a bi-layered structure in which a first Co—Cr—Pt alloy magnetic layer containing an oxide and a second Co—Cr—Pt alloy magnetic layer containing a marker element for measurement of a thickness selected from Mo, Mn, and V are successively formed, and the content of the marker element for measurement of thickness is about 1.5 at % or more and about 5 at % or less.
摘要翻译：对于具有双层结构的垂直记录层的垂直磁记录介质，抑制了批量生产期间读/写特性的波动，其中含有氧化物的第一Co-Cr-Pt合金磁性层和第二Co-Cr - 磁层依次形成。根据一个实施例，在垂直磁记录介质中，在基板上依次形成粘合层，软磁性底层，种子层，中间层，垂直记录层，保护层和润滑层。垂直记录层具有双层结构，其中含有氧化物的第一Co-Cr-Pt合金磁性层和含有用于测量选自Mo，Mn的标记元素的第二Co-Cr-Pt合金磁性层，V依次形成，厚度测定用标记要素的含量为1.5at％以上约5at％以下。

6. 发明申请

US20060139806A1 Magnetic recording medium for high density recording and magnetic storage device using same 有权
公开(公告)号：US20060139806A1
公开(公告)日：2006-06-29
申请号：US11317344
申请日：2005-12-22
申请人： Tatsuya Hinoue , Yotsuo Yahisa , Tomoo Yamamoto , Joe Inagaki , Hiroyuko Suzuki , Hidekazu Kashiwase
发明人： Tatsuya Hinoue , Yotsuo Yahisa , Tomoo Yamamoto , Joe Inagaki , Hiroyuko Suzuki , Hidekazu Kashiwase
IPC分类号： G11B5/82
CPC分类号： G11B5/65 , G11B5/656 , G11B5/66 , H01F10/16 , H01F10/265
摘要： In one embodiment, a magnetic recording medium comprises an underlying film, a magnetic film and a protective film formed in this order on a substrate. The magnetic film is a cobalt-base alloy film containing chromium and has a plurality of magnetic layers stacked without interposition of any non-magnetic layer. The plural magnetic layers comprise first, second and third magnetic layers. The first magnetic layer is disposed between the underlying film and the second magnetic layer. The second magnetic layer is disposed between the first magnetic layer and the third magnetic layer. The third magnetic layer is disposed between the second magnetic layer and the protective film. The concentration of chromium contained in the first magnetic layer is lower than that of chromium contained in the second magnetic layer. The thickness of the first magnetic layer is smaller than that of the second magnetic layer. The magnetic layers which overlie the first magnetic layer further contain platinum and boron. The concentration of chromium contained in the third magnetic layer is lower than that of chromium contained in the second magnetic layer.

7. 发明授权

US08679732B2 Method for removing resist and for producing a magnetic recording medium, and systems thereof 失效
标题翻译：去除抗蚀剂和制造磁记录介质的方法及其系统
公开(公告)号：US08679732B2
公开(公告)日：2014-03-25
申请号：US12820008
申请日：2010-06-21
申请人： Joe Inagaki , Hiroyuki Matsumoto , Kazuhiko Hasegawa
发明人： Joe Inagaki , Hiroyuki Matsumoto , Kazuhiko Hasegawa
IPC分类号： G03F7/42
CPC分类号： G11B5/855 , G03F7/423 , G03F7/427
摘要： In one embodiment, a method for removing a resist includes irradiating, with an UV light having a wavelength of less than about 240 nm, a structure having a resist on a pattern surface in an atmosphere having oxygen. The resist is used as a mask as it remains above the pattern after the pattern has been transferred to a magnetic recording medium surface having a magnetic film thereon, and the irradiating is performed during production of the magnetic recording medium. In another embodiment, a method for forming a magnetic recording medium includes applying a resist to a surface of a magnetic film above a substrate, curing the resist by irradiating the resist with first UV light to form a pattern, transferring the pattern to the magnetic film using the pattern, and removing the resist by irradiating using second UV light having a shorter wavelength in an atmosphere including oxygen.
摘要翻译：在一个实施方案中，用于除去抗蚀剂的方法包括用波长小于约240nm的UV光照射在具有氧气的气氛中的图案表面上具有抗蚀剂的结构。抗蚀剂在将图案转印到其上具有磁性膜的磁记录介质表面之后，作为掩模用作掩模，并且在制造磁记录介质期间进行照射。在另一个实施例中，形成磁记录介质的方法包括在基片上方的磁性膜的表面上施加抗蚀剂，通过用第一UV光照射抗蚀剂来固化抗蚀剂以形成图案，将图案转印到磁性膜使用图案，并通过在包括氧气的气氛中使用具有较短波长的第二UV光照射来除去抗蚀剂。

8. 发明授权

US5906884A Magnetic recording medium 失效
标题翻译：磁记录介质
公开(公告)号：US5906884A
公开(公告)日：1999-05-25
申请号：US518391
申请日：1995-08-15
申请人： Yotsuo Yahisa , Yoshibumi Matsuda , Joe Inagaki , Enji Fujita , Takao Yonekawa , Mitsuhiro Shoda , Akira Kato , Yuzuru Hosoe , Masukazu Igarashi
发明人： Yotsuo Yahisa , Yoshibumi Matsuda , Joe Inagaki , Enji Fujita , Takao Yonekawa , Mitsuhiro Shoda , Akira Kato , Yuzuru Hosoe , Masukazu Igarashi
IPC分类号： G11B5/66 , G11B5/65 , G11B5/73 , G11B5/82 , G11B33/08
CPC分类号： G11B5/7315 , G11B5/7325 , G11B5/82 , G11B33/08 , Y10S428/90
摘要： A magnetic recording medium has a substrate made of a nonmetal nonmagnetic material whose coefficient of linear expansion lies within a range from 0.000013/deg to 0.0001/deg. A magnetic layer is formed on the substrate as a thin polycrystalline film or a thin amorphous film. The magnetic layer has Co as a main component, which exhibits a negative magnetostrictive constant so that its coercive force rises in the direction of compressive strain. The magnetic layer is subjected to an in-plane compressive strain from the substrate due to a difference between the coefficient of thermal expansion of the substrate and the magnetic layer so that high coercivity is obtained in the magnetic layer.
摘要翻译：磁记录介质具有由非金属非磁性材料制成的基板，其线性膨胀系数在0.000013 / deg至0.0001 / deg的范围内。作为薄多晶膜或薄的无定形膜，在基板上形成磁性层。磁性层具有Co作为主要成分，其表现出负的磁致伸缩常数，使其矫顽力沿压缩应变的方向上升。由于衬底的热膨胀系数与磁性层之间的差异，磁性层受到来自衬底的面内压缩应变，从而在磁性层中获得高的矫顽力。

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