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    • 2. 发明申请
    • SEMICONDUCTOR INTEGRATED CIRCUIT
    • 半导体集成电路
    • US20080224176A1
    • 2008-09-18
    • US12048837
    • 2008-03-14
    • Kazuyuki NakanishiHidetoshi NishimuraTomoaki Ikegami
    • Kazuyuki NakanishiHidetoshi NishimuraTomoaki Ikegami
    • H01L27/10
    • H01L27/0203H01L27/11807
    • A semiconductor integrated circuit is provided which entails no increase in the correction time of OPC and in which non-uniformity in the gate lengths due to the optical proximity effects is surely suppressed. A plurality of standard cells (C1, C2, C3, . . . ), each including gates G extended in the vertical direction, are aligned in the transverse direction to form a standard cell row. A plurality of the standard cell rows are located side by side in the vertical direction to form a standard cell group. Each of the standard cell rows has a terminal standard cell Ce at least one end of the standard cell row. The terminal standard cell Ce includes two or more supplementary gates, each of which is any of a dummy gate and a gate of an inactive transistor.
    • 提供了一种半导体集成电路,其不需要增加OPC的校正时间,并且可靠地抑制由于光学邻近效应引起的栅极长度的不均匀性。 在垂直方向上延伸的包括栅极G的多个标准单元(C 1,C 2,C 3,...)在横向方向上排列以形成标准单元行。 多个标准单元行在垂直方向上并排设置以形成标准单元组。 每个标准单元行在标准单元行的至少一端具有端子标准单元Ce。 终端标准单元Ce包括两个或更多个辅助栅极,每个补充栅极是无源晶体管的伪栅极和栅极中的任一个。
    • 4. 发明申请
    • SEMICONDUCTOR INTEGRATED CIRCUIT
    • 半导体集成电路
    • US20100308377A1
    • 2010-12-09
    • US12857926
    • 2010-08-17
    • Kazuyuki NAKANISHIHidetoshi NishimuraTomoaki Ikegami
    • Kazuyuki NAKANISHIHidetoshi NishimuraTomoaki Ikegami
    • H01L27/10
    • H01L27/0203H01L27/11807
    • A semiconductor integrated circuit is provided which entails no increase in the correction time of OPC and in which non-uniformity in the gate lengths due to the optical proximity effects is surely suppressed. A plurality of standard cells (C1, C2, C3, . . . ), each including gates G extended in the vertical direction, are aligned in the transverse direction to form a standard cell row. A plurality of the standard cell rows are located side by side in the vertical direction to form a standard cell group. Each of the standard cell rows has a terminal standard cell Ce at least one end of the standard cell row. The terminal standard cell Ce includes two or more supplementary gates, each of which is any of a dummy gate and a gate of an inactive transistor.
    • 提供了一种半导体集成电路,其不需要增加OPC的校正时间,并且可靠地抑制由于光学邻近效应引起的栅极长度的不均匀性。 多个标准单元(C1,C2,C3 ...)各自包括在垂直方向上延伸的栅极G,在横向方向上排列以形成标准单元行。 多个标准单元行在垂直方向上并排设置以形成标准单元组。 每个标准单元行在标准单元行的至少一端具有端子标准单元Ce。 终端标准单元Ce包括两个或更多个辅助栅极,每个补充栅极是无源晶体管的伪栅极和栅极中的任一个。
    • 6. 发明授权
    • Semiconductor integrated circuit
    • 半导体集成电路
    • US07800140B2
    • 2010-09-21
    • US12048837
    • 2008-03-14
    • Kazuyuki NakanishiHidetoshi NishimuraTomoaki Ikegami
    • Kazuyuki NakanishiHidetoshi NishimuraTomoaki Ikegami
    • H01L27/10
    • H01L27/0203H01L27/11807
    • A semiconductor integrated circuit is provided which entails no increase in the correction time of OPC and in which non-uniformity in the gate lengths due to the optical proximity effects is surely suppressed. A plurality of standard cells (C1, C2, C3, . . . ), each including gates G extended in the vertical direction, are aligned in the transverse direction to form a standard cell row. A plurality of the standard cell rows are located side by side in the vertical direction to form a standard cell group. Each of the standard cell rows has a terminal standard cell Ce at least one end of the standard cell row. The terminal standard cell Ce includes two or more supplementary gates, each of which is any of a dummy gate and a gate of an inactive transistor.
    • 提供了一种半导体集成电路,其不需要增加OPC的校正时间,并且可靠地抑制由于光学邻近效应引起的栅极长度的不均匀性。 多个标准单元(C1,C2,C3 ...)各自包括在垂直方向上延伸的栅极G,在横向方向上排列以形成标准单元行。 多个标准单元行在垂直方向上并排设置以形成标准单元组。 每个标准单元行在标准单元行的至少一端具有端子标准单元Ce。 终端标准单元Ce包括两个或更多个辅助栅极,每个补充栅极是无源晶体管的伪栅极和栅极中的任一个。
    • 8. 发明授权
    • Semiconductor integrated circuit device
    • 半导体集成电路器件
    • US09373611B2
    • 2016-06-21
    • US13427188
    • 2012-03-22
    • Hidetoshi NishimuraTomoaki Ikegami
    • Hidetoshi NishimuraTomoaki Ikegami
    • H01L23/52H01L27/02H01L27/118H03K3/356
    • H01L27/0207H01L27/11807H01L2027/11875H01L2027/11879H01L2027/11881H03K3/356121
    • First, second, and third power wirings and plurality of first signal wirings are formed on the upper layer of a semiconductor substrate, and at least one second signal wiring is formed on the upper layer of the plurality of first signal wirings. First and second power wirings are mutually separated in the cell height direction and extended in the cell width direction. Third power wiring extends between the first and second power wirings in the cell width direction. The plurality of first signal wirings are separated from first, second, and third power wirings, and electrically connected to at least one of the plurality of circuit elements. At least one second signal wiring extends in the cell width direction, and electrically connected to at least one of the plurality of circuit elements and the plurality of first signal wirings.
    • 第一,第二和第三功率布线和多个第一信号布线形成在半导体衬底的上层上,并且至少一个第二信号布线形成在多个第一信号布线的上层上。 第一和第二功率布线在单元高度方向上相互分离并在单元宽度方向上延伸。 第三功率布线在单元宽度方向上在第一和第二布线之间延伸。 多个第一信号布线与第一,第二和第三电力布线分离,并且电连接到多个电路元件中的至少一个。 至少一个第二信号布线在单元宽度方向上延伸,并且电连接到多个电路元件和多个第一信号布线中的至少一个。