会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明申请
    • Method for preparing focus-adjustment data for focusing lens system of optical defect-inspection apparatus, and focus adjustment wafer used in such method
    • 光学缺陷检查装置的聚焦透镜系统的聚焦调整数据的准备方法以及用于该方法的聚焦调整用晶片
    • US20070229811A1
    • 2007-10-04
    • US11730571
    • 2007-04-02
    • Kenichi Sanada
    • Kenichi Sanada
    • G01N21/88
    • G01N21/9501G01N21/956
    • In a method for preparing focus-adjustment data for a focusing lens system of an optical defect-inspection apparatus, a wafer having a plurality of defects is positioned in place with respect to a focal plane defined by the focusing lens system at a positioning step, and the detects on the wafer are optically and electronically detected at a detecting step. Then, defects having a predetermined size are extracted among the detected defects at extracting step, and a number of the extracted defects is counted as defect-number data. The positioning, detecting, extracting and counting steps are repeated whenever the focus-adjustment wafer is relatively shifted from the focal plane by a predetermined distance, and a defect-number distribution is produced based on the defect-number data thus obtained.
    • 在用于准备光学缺陷检查装置的聚焦透镜系统的聚焦调整数据的方法中,具有多个缺陷的晶片相对于由聚焦透镜系统在定位步骤中限定的焦平面位于适当的位置, 并且在检测步骤中光学地和电子地检测晶片上的检测。 然后,在提取步骤中,在检测到的缺陷中提取具有预定大小的缺陷,并将所提取的缺陷数作为​​缺陷数数据计数。 只要聚焦调整晶片从焦平面相对移位预定距离,就重复定位,检测,提取和计数步骤,并且基于由此获得的缺陷数数据产生缺陷数分布。
    • 5. 发明授权
    • Method for preparing focus-adjustment data for focusing lens system of optical defect-inspection apparatus, and focus adjustment wafer used in such method
    • 光学缺陷检查装置的聚焦透镜系统的聚焦调整数据的准备方法以及用于该方法的聚焦调整用晶片
    • US07817264B2
    • 2010-10-19
    • US11730571
    • 2007-04-02
    • Kenichi Sanada
    • Kenichi Sanada
    • G01N21/00
    • G01N21/9501G01N21/956
    • In a method for preparing focus-adjustment data for a focusing lens system of an optical defect-inspection apparatus, a wafer having a plurality of defects is positioned in place with respect to a focal plane defined by the focusing lens system at a positioning step, and the detects on the wafer are optically and electronically detected at a detecting step. Then, defects having a predetermined size are extracted among the detected defects at extracting step, and a number of the extracted defects is counted as defect-number data. The positioning, detecting, extracting and counting steps are repeated whenever the focus-adjustment wafer is relatively shifted from the focal plane by a predetermined distance, and a defect-number distribution is produced based on the defect-number data thus obtained.
    • 在用于准备光学缺陷检查装置的聚焦透镜系统的聚焦调整数据的方法中,具有多个缺陷的晶片相对于由聚焦透镜系统在定位步骤中限定的焦平面位于适当的位置, 并且在检测步骤中光学地和电子地检测晶片上的检测。 然后,在提取步骤中,在检测到的缺陷中提取具有预定大小的缺陷,并将所提取的缺陷数作为​​缺陷数数据计数。 只要聚焦调整晶片从焦平面相对移位预定距离,就重复定位,检测,提取和计数步骤,并且基于由此获得的缺陷数数据产生缺陷数分布。