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    • 2. 发明申请
    • Slow wave optical waveguide for velocity matched semiconductor modulators
    • 用于速度匹配半导体调制器的慢波光波导
    • US20050094917A1
    • 2005-05-05
    • US10700245
    • 2003-11-03
    • Wenshen WangDavid ScottElizabeth Kunkee
    • Wenshen WangDavid ScottElizabeth Kunkee
    • G02B6/26G02B6/42G02F1/025G02F1/295
    • B82Y20/00B82Y10/00G02F1/025G02F2201/127G02F2201/307G02F2202/32
    • A PIN electro-optical traveling wave modulator (10) including diffraction gratings (34, 36) positioned at opposing sides of an optical waveguide (20) that act to change the propagation pattern of the waveguide (20). The modulator (10) includes an N-type layer (14), a P-type layer (18) and an intrinsic layer (16) acting as the waveguide (20). A metal electrode (26) is in electrical contact with the N-type layer (14), and a metal electrode (30) is in electrical contact with the P-type layer (18). The electrodes (26, 30) define an RF transmission line. An optical wave (22) propagates along the waveguide (20) and interacts with the gratings (34, 36) which slow the optical wave (22) to match its speed to the speed of the RF wave in the transmission line. In one embodiment, the gratings (34, 36) are 2-D gratings formed by vertical holes (38) in the waveguide (20).
    • 一种PIN电光行波调制器(10),其包括位于光波导(20)的相对侧的衍射光栅(34,36),其用于改变波导(20)的传播图案。 调制器(10)包括N型层(14),P型层(18)和用作波导(20)的本征层(16)。 金属电极(26)与N型层(14)电接触,金属电极(30)与P型层(18)电接触。 电极(26,30)限定RF传输线。 光波(22)沿着波导(20)传播并与光栅(34,36)相互作用,光栅(34,36)使光波(22)的速度与传输线中的RF波的速度相匹配。 在一个实施例中,光栅(34,36)是由波导(20)中的垂直孔(38)形成的2-D光栅。