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1. 发明授权

US07304716B2 Method for purging an optical lens 有权
标题翻译：清洗光学透镜的方法
公开(公告)号：US07304716B2
公开(公告)日：2007-12-04
申请号：US11127304
申请日：2005-05-12
申请人： Thorsten Schedel , Sebastian Schmidt , Günter Hraschan
发明人： Thorsten Schedel , Sebastian Schmidt , Günter Hraschan
IPC分类号： G03B27/52 , G03B27/42
CPC分类号： G03F7/70883 , G03F7/70925 , G03F7/70933
摘要： By a unit for determining fractions of a substance in a gas or gas mixture, measurements are carried out on the gas or gas mixture for purging a lens in a projection apparatus for projecting patterns onto a substrate. The results of a first measurement on the gas fed to the lens are compared with the results of a measurement of the gas removed from the lens. If, the substance is a contaminating substance that leads to a deposit on the lens under the influence of high-energy radiation from an illumination source, the difference is used to infer photochemical reactions on the surface of the lens that lead disadvantageously to the deposition. A signal is generated as a consequence of the comparison and is used to take preventive measures against a degradation of the lens. Mass spectrometers, electric or optical sensors and other known methods for substance analysis are used as measurement units.
摘要翻译：通过用于确定气体或气体混合物中物质的分数的单元，在气体或气体混合物上进行测量，以在用于将图案投影到基板上的投影设备中清洗透镜。将进料到透镜的气体进行第一次测量的结果与从透镜去除的气体的测量结果进行比较。如果物质是在照射源的高能量辐射的影响下导致在透镜上的沉积物的污染物质，则该差异用于推导出对沉积不利的导致的透镜表面的光化学反应。作为比较的结果产生信号，并且用于采取防止透镜劣化的预防措施。质谱仪，电子或光学传感器和其他已知的物质分析方法被用作测量单位。

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