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1. 发明授权

US6054023A Method of making inverted merged MR head with track width defining first pole tip component constructed on a side wall 失效
标题翻译：制造具有轨道宽度的反向合并MR头的方法，其限定在侧壁上构造的第一极尖部分
公开(公告)号：US6054023A
公开(公告)日：2000-04-25
申请号：US361392
申请日：1999-07-26
申请人： Thomas Young Chang , Jyh-Shuey Jerry Lo
发明人： Thomas Young Chang , Jyh-Shuey Jerry Lo
IPC分类号： G11B5/012 , G11B5/31 , G11B5/39 , C23C14/34 , G11B5/127 , H04R31/00
CPC分类号： G11B5/3967 , G11B5/3116 , G11B5/313 , G11B5/3163 , G11B5/012 , Y10T29/49043
摘要： A method of making provides an inverted merged MR head wherein frame plating is not required for forming a highly defined submicron track width of a top first pole tip portion. A forming structure is formed on a bottom first pole tip portion with a vertical wall located at a site where one of the edges of the top first pole tip is to be located. The top first pole tip is sputtered or plated on the vertical wall of the forming structure with a thickness that defines the track width of the write head. A mask with a recessed portion may be employed for forming the top first pole tip with a back wall that defines a zero throat height of the head. In a preferred embodiment a forming layer is formed adjacent an opposite edge of the top first pole tip and then the top surfaces of the top first pole tip, the forming layer and the forming structure are lapped until these top surfaces are flush with one another. The material of the top first pole tip has an ion milling rate that is greater than the ion milling rates of the forming layer and the forming structure. Ion milling is then employed to ion mill the top of the top first pole tip at a greater rate than the other layers causing a recess which is centered above the top surface of the top first pole tip. After depositing a write gap layer and a seedlayer in the recess the second pole tip is deposited in the recess causing the base of the second pole tip to be substantially aligned with the top surface of the top first pole tip. Sloping surfaces extending from the base of the second pole tip are similar to notching of a first pole piece in the prior art which promotes flux transfer between the pole tips and minimizes stray flux from the second pole tip to the bottom first pole tip.
摘要翻译：一种制造方法提供反向合并的MR头，其中不需要框架电镀以形成顶部第一极尖端部分的高度限定的亚微米轨道宽度。形成结构形成在底部第一极尖端部分上，其中垂直壁位于顶部第一极尖端的一个边缘将被定位的位置处。顶部的第一极尖被溅射或镀在成形结构的垂直壁上，其厚度限定了写入头的轨道宽度。可以采用具有凹陷部分的掩模来形成具有限定头部的零喉部高度的后壁的顶部第一极尖端。在优选实施例中，形成层邻近顶部第一极尖端的相对边缘形成，然后上顶部第一极尖端，成形层和成形结构的顶表面被研磨直到这些顶部表面彼此齐平。顶部第一极尖的材料的离子研磨速率大于成形层和成形结构的离子研磨速率。然后使用离子铣削以比其它层更大的速率将顶部第一极尖的顶部离子磨，从而形成位于顶部第一极尖顶部顶部的中心的凹部。在凹槽中沉积写间隙层和种子层之后，第二极尖沉积在凹槽中，使得第二极尖的基部与顶部第一极尖的顶表面基本上对准。从第二极尖的基部延伸的斜面类似于现有技术中的第一极靴的切口，其促进极尖之间的磁通传递并使从第二极尖到底部第一极尖的杂散磁通最小化。

2. 发明授权

US6158107A Inverted merged MR head with plated notched first pole tip and self-aligned second pole tip 失效
标题翻译：反向合并磁头与电镀缺口的第一极端和自对准的第二极端
公开(公告)号：US6158107A
公开(公告)日：2000-12-12
申请号：US54055
申请日：1998-04-02
申请人： Thomas Young Chang , Jyh-Shuey Jerry Lo
发明人： Thomas Young Chang , Jyh-Shuey Jerry Lo
IPC分类号： G11B5/23 , G11B5/31 , G11B5/39 , G11B5/127 , G11B5/187
CPC分类号： G11B5/3116 , G11B5/3163 , G11B5/232 , G11B5/3967 , Y10T29/49032 , Y10T29/49044 , Y10T29/49046
摘要： A method makes an inverted merged MR head with a second pole tip which is self-aligned with a top first pole tip. After forming a bottom first pole tip layer a top first pole tip is frame plated thereon with a width that defines a track width of the merged MR head. A photoresist layer, which is employed in the frame plating of the top first pole tip, is then soft baked which causes a photoresist opening above the top first pole tip to have sloping side edges which form a recess. An electrically-conductive sacrificial layer, such as copper, is then plated into the recess on top of the top first pole tip and the photoresist is removed. A forming layer, such as alumina, is then deposited and lapped so that the forming layer and the sacrificial layer have top surfaces that are flush with respect to one another. The sacrificial layer is then removed by an etchant that will not attack the materials of the pole tips and the forming layer. The forming layer now has a recess with sloping edges into which a gap layer, a seedlayer and a second pole tip layer are deposited. By this method the second pole tip is self-aligned with the top first pole tip with the second pole tip having a bottom that is substantially the same width as the top of the top first pole tip.
摘要翻译：一种方法使得具有与顶部第一极尖自身对准的第二极尖的反向合并MR头。在形成底部第一极尖端层之后，顶部第一极端部被框架镀覆在其上，其宽度限定了合并的MR头的轨道宽度。用于顶部第一极尖端的框架电镀中的光致抗蚀剂层然后被软烘烤，这使得顶部第一极尖端上方的光致抗蚀剂开口具有形成凹部的倾斜侧边缘。然后将诸如铜的导电牺牲层电镀到顶部第一极尖顶部的凹部中，并且去除光致抗蚀剂。然后沉积和研磨诸如氧化铝的成形层，使得成形层和牺牲层具有相对于彼此齐平的顶表面。然后通过不会攻击极尖和成形层的材料的蚀刻剂去除牺牲层。成形层现在具有倾斜边缘的凹部，间隙层，籽晶层和第二极尖端层沉积到该凹部中。通过该方法，第二极尖与顶部第一极尖自对准，第二极尖具有与顶部第一极尖的顶部基本相同的宽度的底部。

3. 发明授权

US06747850B1 Merged magnetic head with a first pole piece notching layer 失效
标题翻译：合并磁头与第一极片刻痕层
公开(公告)号：US06747850B1
公开(公告)日：2004-06-08
申请号：US09721853
申请日：2000-11-24
申请人： Thomas Young Chang , Edward Hinpong Lee , Jyh-Shuey Jerry Lo
发明人： Thomas Young Chang , Edward Hinpong Lee , Jyh-Shuey Jerry Lo
IPC分类号： G11B539
CPC分类号： G11B5/3967 , G11B5/024 , G11B5/23 , G11B5/232 , G11B5/3116 , G11B5/3163 , Y10T29/49044 , Y10T29/49046
摘要： A single-sided, notched write head is provided for writing narrow erase band servo tracks as well as a double-notched write head, and for writing data tracks better than a double-notched write head. The single-sided, notched write head writes a narrow erase band on the notched side and a wide erase band on the unnotched side. In one embodiment, only one side of the first pole piece layer is notched, and in another embodiment a first side of the first pole piece layer is notched more than a second side. By writing servo tracks only a fraction of the track width of the write head, a wide erase band region is overwritten so that a narrow erase band is on each side of the servo track. Data tracks are written with a narrow erase band on one side and a wide erase band on the other side. The wide erase band on one side of the data track allows more flexibility in spacing the read head from adjacent tracks. The single-sided, notched write head can be manufactured with methods that require less processing time than a double-notched write head. In one method, a notching layer is employed where removal of a small corner of the notching layer provides the first pole piece with a notch. Other methods employ photoresist to protect the side of the first pole piece that is not to be notched, and/or oscillating the workpiece less than 360° so that milling is more concentrated at the notch site.
摘要翻译：提供单面，带缺口的写入头，用于写入窄擦除带伺服磁道以及双切口写入头，并且用于比双切口写入头更好地写入数据轨道。单面缺口写头在缺口侧写入窄擦除带，并在无缺口侧写入宽擦除带。在一个实施例中，仅第一极靴层的一侧被切口，而在另一实施例中，第一极靴层的第一侧比第二侧更多地被切口。通过仅将写入磁道的磁道宽度的一部分写入伺服磁道，将覆盖宽的擦除带区域，使得在伺服磁道的每一侧上存在窄的擦除带。数据磁道在一侧写入窄的擦除频带，另一侧写入宽的擦除频带。在数据轨道的一侧上的宽擦除带允许在读取头与相邻轨道间隔距离方面更加灵活。单面，缺口写头可以使用比双切口写头要少的处理时间的方法制造。在一种方法中，采用切口层，其中切口凹陷层的小角的移除为第一极片提供凹口。其他方法使用光致抗蚀剂来保护第一极靴的不被切口的一侧和/或使工件摆动小于360°，使得铣削更集中在切口部位。

4. 发明授权

US06278591B1 Inverted merged MR head having plated notched first pole tip and self-aligned second pole tip 失效
标题翻译：具有电镀缺口的第一极尖和自对准的第二极尖的反向合并MR头
公开(公告)号：US06278591B1
公开(公告)日：2001-08-21
申请号：US09592089
申请日：2000-06-12
申请人： Thomas Young Chang , Jyh-Shuey Jerry Lo
发明人： Thomas Young Chang , Jyh-Shuey Jerry Lo
IPC分类号： G11B531
CPC分类号： G11B5/3116 , G11B5/232 , G11B5/3163 , G11B5/3967 , Y10T29/49032 , Y10T29/49044 , Y10T29/49046
摘要： A method makes an inverted merged MR head with a second pole tip which is self-aligned with a top first pole tip. After forming a bottom first pole tip layer, a top first pole tip is frame plated thereon with a width that defines a track width of the merged MR head. A photoresist layer, which is employed in the frame plating of the top first pole tip, is then soft baked which causes a photoresist opening above the top first pole tip to have sloping side edges which form a recess. An electrically-conductive sacrificial layer, such as copper, is then plated into the recess on top of the top first pole tip and the photoresist is removed. A forming layer, such as alumina, is then deposited and lapped so that the forming layer and the sacrificial layer have top surfaces that are flush with respect to one another. The sacrificial layer is then removed by an etchant that will not attack the materials of the pole tips and the forming layer. The forming layer now has a recess with sloping edges into which a gap layer, a seedlayer and a second pole tip layer are deposited. By this method the second pole tip is self-aligned with the top first pole tip with the second pole tip having a bottom that is substantially the same width as the top of the top first pole tip.
摘要翻译：一种方法使得具有与顶部第一极尖自身对准的第二极尖的反向合并MR头。在形成底部第一极尖端层之后，顶部第一极尖端在其上被框架镀覆，其宽度限定了合并的MR头的轨道宽度。用于顶部第一极尖端的框架电镀中的光致抗蚀剂层然后被软烘烤，这使得顶部第一极尖端上方的光致抗蚀剂开口具有形成凹部的倾斜侧边缘。然后将诸如铜的导电牺牲层电镀到顶部第一极尖顶部的凹部中，并且去除光致抗蚀剂。然后沉积和研磨诸如氧化铝的成形层，使得成形层和牺牲层具有相对于彼此齐平的顶表面。然后通过不会攻击极尖和成形层的材料的蚀刻剂去除牺牲层。成形层现在具有倾斜边缘的凹部，间隙层，籽晶层和第二极尖端层沉积到该凹部中。通过该方法，第二极尖与顶部第一极尖自对准，第二极尖具有与顶部第一极尖的顶部基本相同的宽度的底部。

5. 发明授权

US6043960A Inverted merged MR head with track width defining first pole tip component constructed on a side wall 失效
标题翻译：反向合并MR磁头，轨道宽度限定在侧壁上构造的第一极端部分
公开(公告)号：US6043960A
公开(公告)日：2000-03-28
申请号：US995441
申请日：1997-12-22
申请人： Thomas Young Chang , Jyh-Shuey Jerry Lo
发明人： Thomas Young Chang , Jyh-Shuey Jerry Lo
IPC分类号： G11B5/012 , G11B5/31 , G11B5/39 , G11B5/147
CPC分类号： G11B5/3967 , G11B5/3116 , G11B5/313 , G11B5/3163 , G11B5/012 , Y10T29/49043
摘要： A method of making provides an inverted merged MR head wherein frame plating is not required for forming a highly defined submicron track width of a top first pole tip portion. A forming structure is formed on a bottom first pole tip portion with a vertical wall located at a site where one of the edges of the top first pole tip is to be located. The top first pole tip is sputtered or plated on the vertical wall of the forming structure with a thickness that defines the track width of the write head. A mask with a recessed portion may be employed for forming the top first pole tip with a back wall that defines a zero throat height of the head. In a preferred embodiment a forming layer is formed adjacent an opposite edge of the top first pole tip and then the top surfaces of the top first pole tip, the forming layer and the forming structure are lapped until these top surfaces are flush with one another. The material of the top first pole tip has an ion milling rate that is greater than the ion milling rates of the forming layer and the forming structure. Ion milling is then employed to ion mill the top of the top first pole tip at a greater rate than the other layers causing a recess which is centered above the top surface of the top first pole tip. After depositing a write gap layer and a seedlayer in the recess the second pole tip is deposited in the recess causing the base of the second pole tip to be substantially aligned with the top surface of the top first pole tip. Sloping surfaces extending from the base of the second pole tip are similar to notching of a first pole piece in the prior art which promotes flux transfer between the pole tips and minimizes stray flux from the second pole tip to the bottom first pole tip.
摘要翻译：一种制造方法提供反向合并的MR头，其中不需要框架电镀以形成顶部第一极尖端部分的高度限定的亚微米轨道宽度。形成结构形成在底部第一极尖端部分上，其中垂直壁位于顶部第一极尖端的一个边缘将被定位的位置处。顶部的第一极尖被溅射或镀在成形结构的垂直壁上，其厚度限定了写入头的轨道宽度。可以采用具有凹陷部分的掩模来形成具有限定头部的零喉部高度的后壁的顶部第一极尖端。在优选实施例中，形成层邻近顶部第一极尖端的相对边缘形成，然后上顶部第一极尖端，成形层和成形结构的顶表面被研磨直到这些顶部表面彼此齐平。顶部第一极尖的材料的离子研磨速率大于成形层和成形结构的离子研磨速率。然后使用离子铣削以比其它层更大的速率将顶部第一极尖的顶部离子磨，从而形成位于顶部第一极尖顶部顶部的中心的凹部。在凹槽中沉积写间隙层和种子层之后，第二极尖沉积在凹槽中，使得第二极尖的基部与顶部第一极尖的顶表面基本上对准。从第二极尖的基部延伸的斜面类似于现有技术中的第一极靴的切口，其促进极尖之间的磁通传递并使从第二极尖到底部第一极尖的杂散磁通最小化。

6. 发明授权

US06473276B1 Merged magnetic head which includes a write head with single-sided notched first pole piece 失效
标题翻译：合并磁头，包括带有单面缺口第一极片的写头
公开(公告)号：US06473276B1
公开(公告)日：2002-10-29
申请号：US09721850
申请日：2000-11-24
申请人： Thomas Young Chang , Edward Hinpong Lee , Jyh-Shuey Jerry Lo
发明人： Thomas Young Chang , Edward Hinpong Lee , Jyh-Shuey Jerry Lo
IPC分类号： G11B539
CPC分类号： G11B5/3967 , G11B5/024 , G11B5/23 , G11B5/232 , G11B5/3116 , G11B5/3163 , Y10T29/49044 , Y10T29/49046
摘要： A single-sided, notched write head is provided for writing narrow erase band servo tracks as well as a double-notched write head, and for writing data tracks better than a double-notched write head. The single-sided, notched write head writes a narrow erase band on the notched side and a wide erase band on the unnotched side. In one embodiment, only one side of the first pole piece layer is notched, and in another embodiment a first side of the first pole piece layer is notched more than a second side. By writing servo tracks only a fraction of the track width of the write head, a wide erase band region is overwritten so that a narrow erase band is on each side of the servo track. Data tracks are written with a narrow erase band on one side and a wide erase band on the other side. The wide erase band on one side of the data track allows more flexibility in spacing the read head from adjacent tracks. The single-sided, notched write head can be manufactured with methods that require less processing time than a double-notched write head. In one method, a notching layer is employed where removal of a small corner of the notching layer provides the first pole piece with a notch. Other methods employ photoresist to protect the side of the first pole piece that is not to be notched, and/or oscillating the workpiece less than 360°. so that milling is more concentrated at the notch site.
摘要翻译：提供单面，带缺口的写入头，用于写入窄擦除带伺服磁道以及双切口写入头，并且用于比双切口写入头更好地写入数据轨道。单面缺口写头在缺口侧写入窄擦除带，并在无缺口侧写入宽擦除带。在一个实施例中，仅第一极靴层的一侧被切口，而在另一实施例中，第一极靴层的第一侧比第二侧更多地被切口。通过仅将写入磁道的磁道宽度的一部分写入伺服磁道，将覆盖宽的擦除带区域，使得在伺服磁道的每一侧上存在窄的擦除带。数据磁道在一侧写入窄的擦除频带，另一侧写入宽的擦除频带。在数据轨道的一侧上的宽擦除带允许在读取头与相邻轨道间隔距离方面更加灵活。单面，缺口写头可以使用比双切口写头要少的处理时间的方法制造。在一种方法中，采用切口层，其中切口凹陷层的小角的移除为第一极片提供凹口。其他方法使用光致抗蚀剂来保护第一极靴的不被切口的一侧，和/或使工件摆动小于360°。使得铣削更集中在切口部位。

7. 发明授权

US06339872B1 Method of making a merged magnetic head that includes a write head with single-sided notched first pole piece 失效
标题翻译：制造合并磁头的方法，其包括具有单面缺口第一极片的写头
公开(公告)号：US06339872B1
公开(公告)日：2002-01-22
申请号：US09564155
申请日：2000-05-03
申请人： Thomas Young Chang , Edward Hinpong Lee , Jyh-Shuey Jerry Lo
发明人： Thomas Young Chang , Edward Hinpong Lee , Jyh-Shuey Jerry Lo
IPC分类号： G11B542
CPC分类号： G11B5/3967 , G11B5/024 , G11B5/23 , G11B5/232 , G11B5/3116 , G11B5/3163 , Y10T29/49044 , Y10T29/49046
摘要： A single-sided, notched write head is provided for writing narrow erase band servo tracks as well as a double-notched write head, and for writing data tracks better than a double-notched write head. The single-sided, notched write head writes a narrow erase band on the notched side and a wide erase band on the unnotched side. In one embodiment, only one side of the first pole piece layer is notched, and in another embodiment a first side of the first pole piece layer is notched more than a second side. By writing servo tracks only a fraction of the track width of the write head, a wide erase band region is overwritten so that a narrow erase band is on each side of the servo track. Data tracks are written with a narrow erase band on one side and a wide erase band on the other side. The wide erase band on one side of the data track allows more flexibility in spacing the read head from adjacent tracks. The single-sided, notched write head can be manufactured with methods that require less processing time than a double-notched write head. In one method, a notching layer is employed where removal of a small corner of the notching layer provides the first pole piece with a notch. Other methods employ photoresist to protect the side of the first pole piece that is not to be notched, and/or oscillating the workpiece less than 360°C. so that milling is more concentrated at the notch site.
摘要翻译：提供单面，带缺口的写入头，用于写入窄擦除带伺服磁道以及双切口写入头，并且用于比双切口写入头更好地写入数据轨道。单面缺口写头在缺口侧写入窄擦除带，并在无缺口侧写入宽擦除带。在一个实施例中，仅第一极靴层的一侧被切口，而在另一实施例中，第一极靴层的第一侧比第二侧更多地被切口。通过仅将写入磁道的磁道宽度的一部分写入伺服磁道，将覆盖宽的擦除带区域，使得在伺服磁道的每一侧上存在窄的擦除带。数据磁道在一侧写入窄的擦除频带，另一侧写入宽的擦除频带。在数据轨道的一侧上的宽擦除带允许在读取头与相邻轨道间隔距离方面更加灵活。单面，缺口写头可以使用比双切口写头要少的处理时间的方法制造。在一种方法中，采用切口层，其中切口凹陷层的小角的移除为第一极片提供凹口。其他方法使用光致抗蚀剂来保护第一极靴的不被切口的一侧，和/或使工件摆动小于360℃。使得铣削更集中在切口部位。

8. 发明授权

US06201670B1 Merged magnetic head that includes a write head with single-sided notched first pole piece 失效
标题翻译：合并磁头，包括带单面缺口第一极片的写头
公开(公告)号：US06201670B1
公开(公告)日：2001-03-13
申请号：US08876451
申请日：1997-06-16
申请人： Thomas Young Chang , Edward Hinpong Lee , Jyh-Shuey Jerry Lo
发明人： Thomas Young Chang , Edward Hinpong Lee , Jyh-Shuey Jerry Lo
IPC分类号： G11B539
CPC分类号： G11B5/3967 , G11B5/024 , G11B5/23 , G11B5/232 , G11B5/3116 , G11B5/3163 , Y10T29/49044 , Y10T29/49046
摘要： A single-sided, notched write head is provided for writing narrow erase band servo tracks as well as a double-notched write head, and for writing data tracks better than a double-notched write head. The single-sided, notched write head writes a narrow erase band on the notched side and a wide erase band on the unnotched side. In one embodiment, only one side of the first pole piece layer is notched, and in another embodiment a first side of the first pole piece layer is notched more than a second side. By writing servo tracks only a fraction of the track width of the write head, a wide erase band region is overwritten so that a narrow erase band is on each side of the servo track. Data tracks are written with a narrow erase band on one side and a wide erase band on the other side. The wide erase band on one side of the data track allows more flexibility in spacing the read head from adjacent tracks. The single-sided, notched write head can be manufactured with methods that require less processing time than a double-notched write head. In one method, a notching layer is employed where removal of a small corner of the notching layer provides the first pole piece with a notch. Other methods employ photoresist to protect the side of the first pole piece that is not to be notched, and/or oscillating the workpiece less than 360°, so that milling is more concentrated at the notch site.
摘要翻译：提供单面，带缺口的写入头，用于写入窄擦除带伺服磁道以及双切口写入头，并且用于比双切口写入头更好地写入数据轨道。单面缺口写头在缺口侧写入窄擦除带，并在无缺口侧写入宽擦除带。在一个实施例中，仅第一极靴层的一侧被切口，而在另一实施例中，第一极靴层的第一侧比第二侧更多地被切口。通过仅将写入磁道的磁道宽度的一部分写入伺服磁道，将覆盖宽的擦除带区域，使得在伺服磁道的每一侧上存在窄的擦除带。数据磁道在一侧写入窄的擦除频带，另一侧写入宽的擦除频带。在数据轨道的一侧上的宽擦除带允许在读取头与相邻轨道间隔距离方面更加灵活。单面，缺口写头可以使用比双切口写头要少的处理时间的方法制造。在一种方法中，采用切口层，其中切口凹陷层的小角的移除为第一极片提供凹口。其他方法使用光致抗蚀剂来保护第一极片的不被切口的一侧和/或使工件摆动小于360°，使得铣削更集中在切口部位。

9. 发明授权

US06069775A Inverted merged MR head with precise track width 失效
标题翻译：反转合并MR磁头具有精确的磁道宽度
公开(公告)号：US06069775A
公开(公告)日：2000-05-30
申请号：US996433
申请日：1997-12-22
申请人： Thomas Young Chang , Jyh-Shuey Jerry Lo
发明人： Thomas Young Chang , Jyh-Shuey Jerry Lo
IPC分类号： G11B5/012 , G11B5/31 , G11B5/39 , G11B5/127
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3116 , G11B5/3146 , G11B5/3163 , G11B2005/3996 , G11B5/012 , G11B5/3967 , Y10T29/49044 , Y10T29/49046 , Y10T29/49052
摘要： A method makes an inverted merged MR head with a second pole tip layer which is self-aligned with a top first pole tip layer. After forming a bottom first pole tip layer, which is relatively thin and relatively wide, a top first pole tip layer is formed thereon with a width that defines the track width of the merged MR head. A second pole tip forming layer is formed on the top first pole tip layer and layers adjacent both sides of the top first pole tip layer. The forming layer and the top first pole tip layer are lapped so that their top surfaces are flush with one another. Ion milling is then implemented to mill the top first pole tip layer at a faster rate than the forming layer causing a recess that is defined by a top surface of the top first pole tip layer and inclined surfaces of the forming layer immediately adjacent thereto. After formation of a write gap layer in the recess a second pole tip layer is formed in a recess replicated by the write gap layer causing a bottom base portion of the second pole tip layer to be substantially the same width as the track width and aligned with the top first pole tip layer so that flux can be transferred between the pole tips more narrowly confined within the track width.
摘要翻译：一种方法使得具有与顶部第一极尖端层自对准的第二极尖端层的反向合并MR头。在形成相当薄且相对宽的底部第一极尖端层之后，在其上形成顶部第一极尖端层，其宽度限定了合并的MR头的轨道宽度。第二极尖形成层形成在顶部第一极尖端层和邻近顶部第一极尖端层两侧的层。成形层和顶部第一极尖端层被重叠，使得它们的顶表面彼此齐平。然后实施离子铣削，以比形成层更快的速度铣削顶部第一极尖端层，所述形成层形成由顶部第一极尖端层的顶表面和紧邻其的形成层的倾斜表面限定的凹部。在凹部中形成写间隙层后，在由写间隙层复制的凹部中形成第二极尖端层，使第二极尖端层的底部基部与轨道宽度基本相同的宽度并与顶部的第一极尖端层，使得焊剂可以在极尖之间传输更狭窄地限制在轨道宽度内。

10. 发明授权

US07343666B2 Methods of making magnetic write heads with use of linewidth shrinkage techniques 失效
标题翻译：使用线宽收缩技术制造磁头的方法
公开(公告)号：US07343666B2
公开(公告)日：2008-03-18
申请号：US10881782
申请日：2004-06-30
申请人： Kim Y. Lee , Jyh-Shuey Jerry Lo , Dennis Richard McKean
发明人： Kim Y. Lee , Jyh-Shuey Jerry Lo , Dennis Richard McKean
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/3116 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： In one illustrative example, a method for use in making a magnetic write head includes the steps of forming a first pole piece layer of a first pole piece; forming a patterned resist over the first pole piece layer; electroplating a pedestal over the first pole piece layer within a channel of the patterned resist; electroplating a metal gap layer over the pedestal within the channel of the patterned resist; forming a resist channel shrinking film over the patterned resist; baking the resist channel shrinking film over the patterned to thereby reduce a width of the channel; removing the resist channel shrinking film; electroplating a second pole piece within the reduced-width channel of the patterned resist; removing the patterned resist; and milling the pedestal, using the second pole piece as a mask, to form a central notched pedestal having side walls with angled slopes.
摘要翻译：在一个说明性示例中，用于制造磁写头的方法包括以下步骤：形成第一极片的第一极片层; 在所述第一极片层上形成图案化抗蚀剂; 在图案化的抗蚀剂的通道内的第一极片层上电镀一个基座; 在图案化的抗蚀剂的通道内的基座上方电镀金属间隙层; 在图案化的抗蚀剂上形成抗蚀剂通道收缩膜; 在图案上烘烤抗蚀剂通道收缩膜，从而减小通道的宽度; 去除抗蚀剂通道收缩膜; 在图案化的抗蚀剂的减小宽度的通道内电镀第二极片; 去除图案化的抗蚀剂; 并使用第二极片作为掩模铣削基座，以形成具有倾斜斜面的侧壁的中心凹口底座。

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