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    • 4. 发明申请
    • DEVICE FOR GLOBALLY MEASURING THICKNESS OF METAL FILM
    • 用于全球测量金属薄膜厚度的装置
    • US20140062468A1
    • 2014-03-06
    • US13985789
    • 2011-11-17
    • Xinchun LuDewen ZhaoZilian QuQian ZhaoYongyong HeYonggang Meng
    • Xinchun LuDewen ZhaoZilian QuQian ZhaoYongyong HeYonggang Meng
    • G01B7/06
    • G01B7/10G01B1/00G01B7/105G01R1/00H01L2221/00
    • A device for globally measuring a thickness of a metal film (901), comprises: a base (10); a rotating unit (20) comprising a fixed member (21) fixed on the base (10) and a rotating member (22) having a rotating joint (23); a working table (50) fixed on the rotating member (22) and having a vacuum passage which is formed therein and connected with the rotating joint (23); a linear driving unit (30) including a guide rail (31) fixed on the base (10) and a sliding block (32) slidable along the guide rail (31); a cantilever beam (40) disposed horizontally and defining a first end fixed with the sliding block (32) and a second end; a measuring head (80) connected to the second end of the cantilever beam (40), facing a surface of the working table (50) and having an eddy current probe (82) disposed therein.
    • 用于全面测量金属膜(901)的厚度的装置包括:基座(10); 旋转单元(20)包括固定在基座(10)上的固定构件(21)和具有旋转接头(23)的旋转构件(22); 固定在旋转构件(22)上并具有形成在其中并与旋转接头(23)连接的真空通道的工作台(50); 线性驱动单元(30),其包括固定在基座(10)上的导轨(31)和可沿导轨(31)滑动的滑块(32); 悬臂梁(40)水平设置并且限定固定有滑块(32)的第一端和第二端; 连接到所述悬臂梁(40)的第二端的测量头(80)面向所述工作台(50)的表面并且具有布置在其中的涡流探针(82)。