会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Micromechanical high-pressure sensor
    • 微机械式高压传感器
    • US07040172B2
    • 2006-05-09
    • US11059229
    • 2005-02-16
    • Thomas MoelknerRalf HennWerner SteinerHans-Peter DidraPhilip CutuliFrank Klopf
    • Thomas MoelknerRalf HennWerner SteinerHans-Peter DidraPhilip CutuliFrank Klopf
    • G01L7/00
    • G01L9/0055G01L9/08
    • A micromechanical pressure sensor and a method for producing a micromechanical pressure sensor. This pressure sensor has at least one membrane and a measuring element situated on the membrane. A pressure applied at the membrane or a pressure differential applied at the different sides of the membrane results in deformation of the membrane. Simultaneous with the deformation of the membrane, the measuring element is subjected to elastic elongation and/or compression. In a piezo-sensitive component, such elastic elongation and/or compression generates a measured variable in the measuring element, which represents the applied pressure or the applied pressure differential at the membrane. It is provided in this context that the measuring element have at least partially a NiCr(Si) layer. Due to an at least partial crystallization in the production of the micromechanical pressure sensor, this NiCr(Si) layer has more advantageous piezoelectrical characteristics than an amorphous NiCr(Si) layer.
    • 微机械压力传感器和微机械压力传感器的制造方法。 该压力传感器具有位于膜上的至少一个膜和测量元件。 在膜上施加的压力或在膜的不同侧施加的压力差导致膜的变形。 与膜的变形同时,测量元件受到弹性伸长和/或压缩。 在压敏元件中,这种弹性伸长和/或压缩在测量元件中产生测量的变量,其表示施加的压力或膜上施加的压差。 在本文中提供测量元件至少部分地具有NiCr(Si)层。 由于在微机械压力传感器的生产中至少部分结晶,该NiCr(Si)层具有比非晶NiCr(Si)层更有利的压电特性。
    • 2. 发明申请
    • Micromechanical high-pressure sensor
    • 微机械式高压传感器
    • US20050188769A1
    • 2005-09-01
    • US11059229
    • 2005-02-16
    • Thomas MoelknerRalf HennWerner SteinerHans-Peter DidraPhilip CutuliFrank Klopf
    • Thomas MoelknerRalf HennWerner SteinerHans-Peter DidraPhilip CutuliFrank Klopf
    • G01L9/00B32B17/06G01L1/22G01L9/08H01L29/84
    • G01L9/0055G01L9/08
    • A micromechanical pressure sensor and a method for producing a micromechanical pressure sensor. This pressure sensor has at least one membrane and a measuring element situated on the membrane. A pressure applied at the membrane or a pressure differential applied at the different sides of the membrane results in deformation of the membrane. Simultaneous with the deformation of the membrane, the measuring element is subjected to elastic elongation and/or compression. In a piezo-sensitive component, such elastic elongation and/or compression generates a measured variable in the measuring element, which represents the applied pressure or the applied pressure differential at the membrane. It is provided in this context that the measuring element have at least partially a NiCr(Si) layer. Due to an at least partial crystallization in the production of the micromechanical pressure sensor, this NiCr(Si) layer has more advantageous piezoelectrical characteristics than an amorphous NiCr(Si) layer.
    • 微机械压力传感器和微机械压力传感器的制造方法。 该压力传感器具有位于膜上的至少一个膜和测量元件。 在膜上施加的压力或在膜的不同侧施加的压力差导致膜的变形。 与膜的变形同时,测量元件受到弹性伸长和/或压缩。 在压敏元件中,这种弹性伸长和/或压缩在测量元件中产生测量的变量,其表示施加的压力或膜上施加的压差。 在本文中提供测量元件至少部分地具有NiCr(Si)层。 由于在微机械压力传感器的生产中至少部分结晶,该NiCr(Si)层具有比非晶NiCr(Si)层更有利的压电特性。