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    • 2. 发明申请
    • Memory cell arrangements and methods of manufacturing memory cell arrangements
    • 存储单元布置和制造存储单元布置的方法
    • US20080073694A1
    • 2008-03-27
    • US11526149
    • 2006-09-22
    • Josef WillerThomas MikolajickNicolas NagelMichael Specht
    • Josef WillerThomas MikolajickNicolas NagelMichael Specht
    • H01L29/788
    • H01L27/105H01L27/11526H01L27/11529
    • A memory cell arrangement includes a first memory cell string having a plurality of serially source-to-drain-coupled transistors, at least some of them being memory cells, a second memory cell string having a plurality of serially source-to-drain-coupled transistors, at least some of them being memory cells. A dielectric material is between and above the first memory cell string and the second memory cell string. A source/drain line groove is defined in the dielectric material. The source/drain line groove extends from a source/drain region of one transistor of the first memory cell string to a source/drain region of the second memory cell string. Electrically conductive filling material is disposed in the source/drain line groove. Dielectric filling material is disposed in the source/drain line groove between the source/drain regions.
    • 存储单元布置包括具有多个串联的源极至漏极耦合的晶体管的第一存储单元串,其中至少一些是存储单元;第二存储单元串,具有多个串联的源至漏耦合的晶体管 晶体管,其中至少有一些是存储单元。 电介质材料在第一存储单元串和第二存储单元串之间和之上。 源极/漏极线沟槽限定在电介质材料中。 源极/漏极线槽从第一存储单元串的一个晶体管的源极/漏极区域延伸到第二存储单元串的源极/漏极区域。 导电填充材料设置在源极/漏极线槽中。 电介质填充材料设置在源极/漏极区域之间的源极/漏极线沟槽中。
    • 3. 发明授权
    • Memory cell arrangements
    • 存储单元布置
    • US07838921B2
    • 2010-11-23
    • US11526149
    • 2006-09-22
    • Josef WillerThomas MikolajickNicolas NagelMichael Specht
    • Josef WillerThomas MikolajickNicolas NagelMichael Specht
    • H01L29/788
    • H01L27/105H01L27/11526H01L27/11529
    • A memory cell arrangement includes a first memory cell string having a plurality of serially source-to-drain-coupled transistors, at least some of them being memory cells, a second memory cell string having a plurality of serially source-to-drain-coupled transistors, at least some of them being memory cells. A dielectric material is between and above the first memory cell string and the second memory cell string. A source/drain line groove is defined in the dielectric material. The source/drain line groove extends from a source/drain region of one transistor of the first memory cell string to a source/drain region of the second memory cell string. Electrically conductive filling material is disposed in the source/drain line groove. Dielectric filling material is disposed in the source/drain line groove between the source/drain regions.
    • 存储单元布置包括具有多个串联的源极至漏极耦合的晶体管的第一存储单元串,其中至少一些是存储单元;第二存储单元串,具有多个串联的源至漏耦合的晶体管 晶体管,其中至少有一些是存储单元。 电介质材料在第一存储单元串和第二存储单元串之间和之上。 源极/漏极线沟槽限定在电介质材料中。 源极/漏极线槽从第一存储单元串的一个晶体管的源极/漏极区域延伸到第二存储单元串的源极/漏极区域。 导电填充材料设置在源极/漏极线槽中。 电介质填充材料设置在源极/漏极区域之间的源极/漏极线沟槽中。
    • 9. 发明授权
    • Integrated circuits and methods of manufacturing thereof
    • 集成电路及其制造方法
    • US07714377B2
    • 2010-05-11
    • US11737617
    • 2007-04-19
    • Michael SpechtNicolas NagelFranz HofmannThomas Mikolajick
    • Michael SpechtNicolas NagelFranz HofmannThomas Mikolajick
    • H01L29/788
    • G11C16/0483H01L27/115H01L27/11521H01L27/11524H01L27/11568Y10T29/49117
    • Embodiments of the invention relate to integrated circuits having a memory cell arrangement and methods of manufacturing thereof. In one embodiment of the invention, an integrated circuit has a memory cell arrangement which includes a fin structure extending in its longitudinal direction as a first direction, including a first insulating layer, a first active region disposed above the first insulating layer, a second insulating layer disposed above the first active region, a second active region disposed above the second insulating layer, a charge storage layer structure disposed at least next to at least one sidewall of the fin structure covering at least a portion of the first active region and at least a portion of the second active region, and a control gate disposed next to the charge storage layer structure.
    • 本发明的实施例涉及具有存储单元布置的集成电路及其制造方法。 在本发明的一个实施例中,集成电路具有存储单元布置,其包括沿其纵向方向延伸的翅片结构作为第一方向,包括第一绝缘层,设置在第一绝缘层上方的第一有源区,第二绝缘层 设置在所述第一有源区上方的第二有源区,设置在所述第二绝缘层上方的第二有源区,电荷存储层结构,其至少布置在所述鳍结构的至少一个侧壁上,覆盖所述第一有源区的至少一部分,并且至少 第二有源区的一部分,以及设置在电荷存储层结构旁边的控制栅。