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    • 8. 发明授权
    • Simultaneous planar and non-planar thin-film transistor processes
    • 同时平面和非平面薄膜晶体管工艺
    • US07238554B2
    • 2007-07-03
    • US10985587
    • 2004-11-09
    • Paul J. SchueleApostolos T. Voutsas
    • Paul J. SchueleApostolos T. Voutsas
    • H01L21/00
    • H01L27/12H01L29/78624H01L29/78642H01L29/78648H01L29/78675
    • A method is provided for concurrently forming MP-TFTs and P-TFTs. Generally, the method comprises: forming a P-TFT having source/drain (S/D) regions, an intervening channel region, and a gate, all in a first horizontal plane; and simultaneously forming a MP-TFT having a first gate in the first horizontal plane and at least one S/D region in a second horizontal plane, overlying the first horizontal plane. The vertical TFT (V-TFT) is an MP-TFT having vertical first gate sidewalls and a vertical channel region overlying a gate sidewall. The dual-gate TFT (DG-TFT) is an MP-TFT having a bottom gate, first and second S/D regions with top surfaces, an intervening channel region with a top surface, and a second, top gate with a bottom surface, all in a second horizontal plane, overlying the first horizontal plane.
    • 提供了用于同时形成MP-TFT和P-TFT的方法。 通常,该方法包括:在第一水平面中形成具有源极/漏极(S / D)区域,中间沟道区域和栅极的P-TFT; 同时在第一水平面上形成具有第一栅极的MP-TFT和位于第一水平面上的第二水平面中的至少一个S / D区域。 垂直TFT(V-TFT)是具有垂直的第一栅极侧壁和覆盖栅极侧壁的垂直沟道区的MP-TFT。 双栅极TFT(DG-TFT)是具有底栅,具有顶表面的第一和第二S / D区,具有顶表面的中间沟道区和具有底表面的第二顶栅的MP-TFT 都在第二个水平面上,覆盖着第一个水平面。
    • 9. 发明申请
    • In-Pixel Ultrasonic Touch Sensor for Display Applications
    • 用于显示应用的In-Pixel超声波触摸传感器
    • US20140198072A1
    • 2014-07-17
    • US13740043
    • 2013-01-11
    • Paul J. SchueleThemistokles AfentakisJohn W. Hartzell
    • Paul J. SchueleThemistokles AfentakisJohn W. Hartzell
    • G06F3/044
    • G06F3/044G06F3/0412G06F3/043
    • A video display is provided with a planar piezoelectric transmitter to transmit ultrasound signals, and a display panel including a plurality of pixels. Each pixel has a data interface to accept a video signal with a variable voltage associated with a range of light intensity values, and to supply a touch signal with a variable voltage derived from a range of reflected ultrasound signal energies. Each pixel is made up of a light device to supply light with an intensity responsive to the video signal voltage, and a storage capacitor to maintain a video signal voltage between refresh cycles. A piezoelectric transducer accepts a reflected ultrasound signal energy and maintains a touch signal voltage between refresh cycles. In one aspect, the storage capacitor and the piezoelectric transducer are the same device. The light device may be a liquid crystal (LC) layer or a light emitting diode.
    • 视频显示器设置有用于传输超声波信号的平面压电发射器,以及包括多个像素的显示面板。 每个像素具有接收具有与一定范围的光强度值相关联的可变电压的视频信号的数据接口,并且提供具有从反射的超声信号能量的范围导出的可变电压的触摸信号。 每个像素由光装置组成,以响应于视频信号电压的强度提供光,以及存储电容器,用于在刷新周期之间维持视频信号电压。 压电传感器接受反射的超声信号能量并在刷新周期之间保持触摸信号电压。 一方面,存储电容器和压电换能器是相同的装置。 光装置可以是液晶(LC)层或发光二极管。
    • 10. 发明授权
    • Plasmonic reflective display fabricated using anodized aluminum oxide
    • 使用阳极氧化铝制造的等离子体反射显示器
    • US08896907B2
    • 2014-11-25
    • US13449370
    • 2012-04-18
    • Douglas J. TweetAkinori HashimuraPaul J. SchueleApostolos T. Voutsas
    • Douglas J. TweetAkinori HashimuraPaul J. SchueleApostolos T. Voutsas
    • G02B26/00G02F1/1335
    • G02F1/133553G02F1/19G02F2201/124G02F2203/10
    • A method is provided for forming a reflective plasmonic display. The method provides a substrate and deposits a bottom dielectric layer. A conductive film is deposited overlying the bottom dielectric layer. A hard mask is formed with nano-size openings overlying the conductive film. The conductive film is plasma etched via nano-size openings in the hard mask, stopping at the dielectric layer. After removing the hard mask, a conductive film is left with nano-size openings to the dielectric layer. Metal is deposited in the nano-size openings, creating a pattern of metallic nanoparticles overlying the dielectric layer. Then, the conductive film is removed. The hard mask may be formed by conformally depositing an Al film overlying the conductive film and anodizing the Al film, creating a hard mask of porous anodized Al oxide (AAO) film. The porous AAO film may form a short-range hexagonal, and long-range random order hole patterns.
    • 提供了形成反射等离子体显示器的方法。 该方法提供衬底并沉积底部电介质层。 沉积覆盖在底部介电层上的导电膜。 形成具有覆盖导电膜的纳米尺寸开口的硬掩模。 导电膜通过硬掩模中的纳米尺寸开口进行等离子体蚀刻,停留在电介质层。 在去除硬掩模之后,导电膜留下具有到介电层的纳米尺寸的开口。 金属沉积在纳米尺寸的开口中,形成覆盖在介电层上的金属纳米颗粒图案。 然后,去除导电膜。 硬掩模可以通过共形沉积覆盖在导电膜上的Al膜并阳极氧化Al膜,形成多孔阳极氧化Al氧化物(AAO)膜的硬掩模来形成。 多孔AAO膜可以形成短程六边形和长程随机顺序孔图案。