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1. 发明授权

US06474987B1 Wafer holder 有权
标题翻译：晶圆架
公开(公告)号：US06474987B1
公开(公告)日：2002-11-05
申请号：US09831032
申请日：2001-07-09
申请人： Tetsuya Nakai , Katsuo Arai , Makoto Shinohara , Fumitomo Kawahara , Makoto Saito , Yasuhiko Kawamura
发明人： Tetsuya Nakai , Katsuo Arai , Makoto Shinohara , Fumitomo Kawahara , Makoto Saito , Yasuhiko Kawamura
IPC分类号： F27D500
CPC分类号： H01L21/68735 , C23C16/4583 , C30B25/12 , C30B31/14 , H01L21/67309 , H01L21/6875
摘要： A wafer (22) is placed on an upper surface of a holder body (23), and the holder body is inserted into a plurality of holder-aimed concave recesses (14) formed on supporters (12) accommodated in a heat treatment furnace such that the holder body is held horizontally. The holder body is formed into a disk shape free of recessed cut portions, and the holder body is formed with an upwardly projecting ring-like projection (24) extending in the circumferential direction of the holder body around the axis of the holder body. The wafer holder is constituted such that the wafer is placed on the holder body while contacting with the upper surface of the projection, and such that the outer diameter of the projection is formed to be in a range of 0.5D to 0.98D wherein D is the diameter of the wafer, so that the outer periphery of the wafer is kept from contacting with the projection. Occurrence of slips in the wafer is restricted by preventing warpage of the holder body upon fabricating the holder body. Further, each of wafers having different diameters is assuredly held by the same holder body without deviating from a relevant predetermined position. Moreover, the working operations for loading and unloading the wafer to and from the holder body are smoothly conducted.
摘要翻译：将晶片（22）放置在保持器主体（23）的上表面上，并且将保持器主体插入形成在容纳在热处理炉中的支撑体（12）上的多个保持器目标凹入凹部（14）中，保持器主体水平地保持。保持体形成为没有凹进切口部的圆盘形状，并且保持体形成有沿保持体本体的周向延伸的向上突出的环状突起（24）。晶片保持器构成为使得晶片与突起的上表面接触地放置在保持器主体上，并且使得突起的外径形成为0.5D至0.98D的范围，其中D为晶片的直径，使得晶片的外周保持不与突起接触。通过在制造保持器主体时防止保持器本体的翘曲来限制晶片中的滑移。此外，具有不同直径的每个晶片在不偏离相关预定位置的情况下可靠地由相同的保持器主体保持。此外，平滑地进行用于将晶片装载到保持器主体和从保持器主体卸载的工作操作。

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