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    • 1. 发明申请
    • Cooling device for semiconductor component
    • 半导体元件冷却装置
    • US20050141574A1
    • 2005-06-30
    • US10933436
    • 2004-09-03
    • Tetsuro SakanoHiroshi TakigawaYuji NishikawaKoji HayanoAkinori OhyamaRyusuke Miyata
    • Tetsuro SakanoHiroshi TakigawaYuji NishikawaKoji HayanoAkinori OhyamaRyusuke Miyata
    • H05K7/20H01L23/473H01S3/04H01S5/02H01S5/024H01S5/40
    • H01S5/02423H01L2924/0002H01S5/02236H01S5/02272H01S5/4031H01L2924/00
    • A cooling device for a semiconductor component which increases mechanical strength thereof and reduces a pressure loss of coolant. Plate members constituting the cooling device are formed with flow passages such as coolant supply and discharge openings, grooves divided by ridges, and through portions separated by projections or partitions. The ridges, projections, and partitions are joined to a adjacent plate member to increase the joining strength, which is further increased by forming the ridges, projections, and partitions of different plate members at the same positions. In the case of laminating the plate members having surfaces formed with solder layers, a number of minute vacant spaces are formed in those joining faces of the plate members which are not formed with passages, etc., and solder filets are formed over the entire joining faces to increase the joining strength. The grooves and through portions can be formed by chemical etching together with outer shapes of the plate members. A plurality of plate members can be fabricated from a single sheet material at a time.
    • 一种用于半导体部件的冷却装置,其增加其机械强度并降低冷却剂的压力损失。 构成冷却装置的板状构件形成有诸如冷却剂供应和排出开口的流动通道,由脊部分开的凹槽以及通过突出部或隔板分隔开的部分。 脊,突起和隔板连接到相邻的板构件以增加接合强度,这通过在相同位置形成不同板构件的脊,突起和隔板而进一步增加。 在层叠具有形成有焊料层的表面的板构件的情况下,在不形成有通路等的板构件的接合面中形成多个微小的空隙,并且在整个接合处形成焊料片 面对增加接合强度。 凹槽和贯通部分可以通过化学蚀刻与板构件的外形形成。 一次可以由单张片材制造多个板构件。
    • 2. 发明授权
    • Cooling device
    • 冷却装置
    • US06865200B2
    • 2005-03-08
    • US10178454
    • 2002-06-25
    • Hiroshi TakigawaTetsuro SakanoYuji NishikawaMasao SatoShinya NaitoRyusuke MiyataKoji Hayano
    • Hiroshi TakigawaTetsuro SakanoYuji NishikawaMasao SatoShinya NaitoRyusuke MiyataKoji Hayano
    • H05K7/20F28F3/08H01L23/473H01S5/024H01S5/40H01S3/04
    • F28F3/086H01S5/024H01S5/02423H01S5/4031H01S5/405
    • A cooling device suitable for cooling a laser diode bar constituting a surface illuminating device as a light source for exciting a laser medium of a solid-state laser oscillator of high power. The cooling device is capable of flowing coolant at sufficient flow rate by reducing the pressure loss in the flow passage of the coolant in the device, to realize a light source device of small thickness with high cooling capability and high reliability. The cooling device comprises a first plate member, one or more second plate member and a third plate member to be joined together to form a laminated body. The second plate member has grooved paths formed on both surfaces thereof and having depths greater than a half of thickness of the plate member, and also opened paths for communicating grooved paths formed on the first plate member and the third plate member. The pressure loss in the flow passage of coolant is reduced by increasing a sectional area of the flow passage by the grooved paths and the opened path of the second plate member without lowering mechanical strength of the device and without increasing a manufacturing cost of the device.
    • 一种适于冷却构成表面照明装置的激光二极管条的冷却装置,作为用于激发高功率的固态激光振荡器的激光介质的光源。 冷却装置能够通过减小装置内的冷却剂的流路中的压力损失,以足够的流量流动冷却剂,实现具有高冷却能力和高可靠性的小厚度的光源装置。 冷却装置包括第一板构件,一个或多个第二板构件和第三板构件,以将其接合在一起以形成层压体。 第二板构件具有形成在其两个表面上并且具有大于板构件的厚度的一半的深度的凹槽路径,以及用于连通形成在第一板构件和第三板构件上的沟槽路径的开口路径。 通过在不降低装置的机械强度的情况下增加通过槽形路径和第二板构件的打开路径的流动通道的截面积而减小冷却剂的流动通道中的压力损失,并且不增加装置的制造成本。
    • 3. 发明申请
    • Semiconductor laser apparatus
    • 半导体激光装置
    • US20060140238A1
    • 2006-06-29
    • US11313756
    • 2005-12-22
    • Yuji NishikawaAkinori OhyamaRyusuke Miyata
    • Yuji NishikawaAkinori OhyamaRyusuke Miyata
    • H01S5/00
    • H01S5/02272H01S5/02236H01S5/0224H01S5/02469H01S5/4031
    • A semiconductor laser apparatus (10) is provided and comprises a mounting substrate (6), a semiconductor laser chip (1) joined to a mounting surface (6a) of said mounting substrate (6) with solder (5), emitters (3) and non-active mesa portions (4) formed on a joining surface (1a) of said semiconductor laser chip (1) to be joined to said mounting surface (6a) of said mounting substrate (6); each of said emitters (3) and non-active mesa portions (4) being separated from the other by component separating channels (2) formed on said joining surface (1a) of said mounting substrate (1); wherein at least one mesa separating channel for separating said non-active mesa portion (4) is formed in said non-active mesa portion (4) at the joining surface (1a) of the semiconductor chip (1). Thereby, the joining strength of the solder is sufficient for preventing the separation of the semiconductor laser chip from the mounting substrate. The solder between the joining surface of the semiconductor laser chip and the mounting surface of the mounting substrate includes fillets (9a, 9b) disposed in the inner walls of the component separating channel and the mesa separating channel. The fill factor is preferably 50% or more.
    • 提供一种半导体激光装置(10),其包括安装基板(6),用焊料(5)接合到所述安装基板(6)的安装面(6a)上的半导体激光芯片(1),发射体(3) )和与所述安装基板(6)的所述安装面(6a)接合的所述半导体激光芯片(1)的接合面(1a)上形成的非活性台面部(4)。 每个所述发射器(3)和非活性台面部分(4)通过形成在所述安装衬底(1)的所述接合表面(1a)上的部件分离通道(2)与另一个分离; 其特征在于,在所述非活性台面部(4)中,在所述半导体芯片(1)的接合面(1a)形成有用于分离所述非活性台面部(4)的至少一个台面分离通道。 因此,焊料的接合强度足以防止半导体激光器芯片与安装基板分离。 半导体激光芯片的接合面和安装基板的安装面之间的焊料包括设置在部件分离通道和台面分离通道的内壁中的圆角(9a,9b)。 填充率优选为50%以上。
    • 4. 发明授权
    • Light source device for pumping solid-state laser medium
    • 用于泵浦固态激光介质的光源装置
    • US06850549B2
    • 2005-02-01
    • US10200756
    • 2002-07-24
    • Hiroshi TakigawaYuji NishikawaMasao SatoShinya NaitoRyusuke Miyata
    • Hiroshi TakigawaYuji NishikawaMasao SatoShinya NaitoRyusuke Miyata
    • H01S3/094H01S3/042H01S3/0941H01S5/024H01S5/40H01S3/091
    • H01S3/0941H01S5/02423H01S5/4025
    • A light source device for pumping a solid-state laser medium of a laser generator, which is compact and capable of economically using LD bars constituting the LD stack with easy maintenance. The light source device is constituted by a plurality of LD modules. Each LD module comprises a plurality of cooling devices on which LD bars are respectively mounted and connection plates on both sides thereof. The LD bars are stacked such that longitudinal directions thereof extend perpendicular to a stacking direction thereof. A desired number of LD modules are mechanically connected with each other using the connection plates to form the LD stack. A sealing member is intervened between confronting connection plates of adjacent LD modules, so that flow passages of coolant formed in the respective LD modules are continuously connected. The connection plates have functions of fixedly supporting the cooling devices of each LD module and electrically connecting the adjacent LD modules.
    • 一种用于泵浦激光发生器的固态激光介质的光源装置,其紧凑并且能够经济地使用容易维护的构成LD堆叠的LD棒。 光源装置由多个LD模块构成。 每个LD模块包括多个冷却装置,LD条分别安装在其上,连接板在其两侧。 LD条被堆叠成使得其纵向方向垂直于其堆叠方向延伸。 所需数量的LD模块使用连接板彼此机械连接以形成LD堆叠。 在相邻的LD模块的面对的连接板之间插入有密封构件,使得形成在各个LD模块中的冷却剂的流路连续地连接。 连接板具有固定地支撑每个LD模块的冷却装置并且电连接相邻的LD模块的功能。
    • 5. 发明申请
    • Semiconductor laser device
    • 半导体激光器件
    • US20050111508A1
    • 2005-05-26
    • US10995469
    • 2004-11-24
    • Yuji NishikawaHiroshi TakigawaRyusuke Miyata
    • Yuji NishikawaHiroshi TakigawaRyusuke Miyata
    • H01S5/02H01S5/022H01S5/024H01S5/40H01S5/00
    • H01S5/4031H01S5/0202H01S5/02236H01S5/0224H01S5/02272H01S5/02276H01S5/02469H01S2301/176
    • A semiconductor laser device, including an LD array member having a monolithic linear-array configuration and provided with a plurality of emitters, respectively emitting a laser beam, in a parallel arrangement in a single semiconductor crystal. The LD array member includes a main area in which the emitters are disposed in the parallel arrangement, a first inactive area formed outside of the main area, and a second inactive area formed between the emitters disposed side-by-side in the main area. The first inactive area has a dimension larger than the second inactive area, as seen in a direction transverse to the plurality of emitters. The LD array member includes a first facet, in which emitting ends of the emitters are disposed, and a second facet opposite to the first facet; at least one of the first facet and the second facet being covered by a coating material. The LD array member also includes a pair of lateral faces respectively intersecting each of the first and second facets; at least one of the lateral faces being covered at least partially by a coating material.
    • 一种半导体激光器件,包括具有单片线性阵列配置的LD阵列构件,并且分别以单个半导体晶体的平行布置发射激光束并设置有多个发射极。 LD阵列构件包括其中发射器布置在并联装置中的主区域,形成在主区域外部的第一无效区域和形成在主区域并排布置的发射器之间的第二无效区域。 如横向于多个发射器的方向所见,第一无效区域的尺寸大于第二无效区域。 LD阵列构件包括其中设置发射器的发射端的第一小面和与第一小面相对的第二小面; 第一面和第二面中的至少一个被涂覆材料覆盖。 LD阵列构件还包括分别与第一和第二面各自相交的一对侧面; 至少一个侧面至少部分被涂层材料覆盖。
    • 6. 发明申请
    • Laser unit
    • 激光单元
    • US20060013274A1
    • 2006-01-19
    • US11176349
    • 2005-07-08
    • Yuji NishikawaHiroyuki YoshidaHisatada MachidaAkihiko NishioRyusuke Miyata
    • Yuji NishikawaHiroyuki YoshidaHisatada MachidaAkihiko NishioRyusuke Miyata
    • H01S3/04
    • H01S3/04H01S5/02423
    • A laser unit using circulating cooling water, which may economically maintain the cleanliness of the cooling water and a channel for the cooling water. By a command of an operator, the activation of a water conveying device of the laser unit, the start of the laser oscillation, the stop of the laser oscillation and the stop of the conveying device are sequentially executed. When the laser unit is stopped for a relatively long period, an intermittent conveyance mode is automatically started in the laser unit. In this mode, the conveyance of the water starts after the passing of a first predetermined period of time and the conveyance stops after the passing of a second predetermined period of time. Similarly, the start and the stop of the conveyance of the water by the conveying device are alternately changed. When the laser oscillation should be started, the intermittent conveyance mode is terminated by the operator. The water conveyance device may be located within the laser unit or outside of a body of the laser unit.
    • 使用循环冷却水的激光单元,其可以经济地保持冷却水的清洁度和冷却水的通道。 通过操作者的命令,依次执行激光单元的水输送装置的激活,激光振荡的开始,激光振荡的停止和输送装置的停止。 当激光单元停止相对长的时间时,在激光单元中自动开始间歇输送模式。 在这种模式中,水的输送在经过第一预定时间段之后开始,并且在经过第二预定时间段之后输送停止。 类似地,交替地改变由输送装置输送水的开始和停止。 当激光振荡开始时,操作员终止间歇输送模式。 水输送装置可以位于激光单元内或激光单元的主体的外侧。