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    • 7. 发明授权
    • Irradiation apparatus and manufacturing method for semiconductor device
    • 半导体装置的照射装置及其制造方法
    • US08451536B2
    • 2013-05-28
    • US12792327
    • 2010-06-02
    • Koichi Tsukihara
    • Koichi Tsukihara
    • G02B27/10
    • B23K26/0738B23K26/0608B23K26/0665B23K26/0676H01L21/02532H01L21/02678H01L21/268
    • Disclosed herein is an irradiation apparatus including: laser light source; a polarization splitting section configured to split laser light emitted from the laser light source into first linearly polarized light and second linearly polarized light different in polarization direction; a light beam dividing section configured to divide the first or second linearly polarized light into a plurality of light beams; a quarter-wave plate array composed of a plurality of first quarter-wave plates for converting some of the light beams into right circularly polarized light and a plurality of second quarter-wave plates for converting the other of the light beams into left circularly polarized light, the first quarter-wave plates and the second quarter-wave plates being alternately arranged in a first direction perpendicular to an optical axis; and a projection optical system for condensing the right circularly polarized light and the left circularly polarized light toward a work surface to be irradiated.
    • 本发明公开了一种照射装置,包括:激光光源; 偏振分束部,被配置为将从激光光源发射的激光分为第一直线偏振光和偏振方向不同的第二线偏振光; 光束分割部,被配置为将所述第一或第二直线偏振光分割为多个光束; 由用于将一些光束转换成右圆偏振光的多个第一四分之一波片组成的四分之一波片阵列和用于将另一个光束转换成左圆偏振光的多个第二四分之一波片 第一四分之一波片和第二四分之一波片在垂直于光轴的第一方向交替布置; 以及用于将正圆偏振光和左圆偏振光朝向要照射的工作表面聚光的投影光学系统。
    • 8. 发明授权
    • Light irradiator
    • 光照射器
    • US07154673B2
    • 2006-12-26
    • US10533946
    • 2003-10-24
    • Koichi TsukiharaKoichi Tatsuki
    • Koichi TsukiharaKoichi Tatsuki
    • G02B27/10
    • B23K26/0608B23K26/0604H01L21/268
    • A light illuminating apparatus used for a laser annealing apparatus includes a first light splitting unit (16) and a second light splitting unit (20) for splitting a sole laser beam into n laser beams, and a synthesis unit (21) for synthesizing an m'th laser beam, radiated from the first light splitting unit (16), and an m'th laser beam radiated from the second light splitting unit (20), to each other, where m is an integer not less than 1 and not larger than n. The first light splitting unit (16) and the second light splitting unit (20) are formed by the same optical components and are arrayed inverted with respect to each other.
    • 用于激光退火装置的光照射装置包括:第一分光单元(16)和用于将唯一激光束分割为n个激光束的第二分光单元(20),以及合成单元(21),用于合成m 从第一分光单元(16)辐射的第一激光束和从第二分光单元(20)辐射的第m个激光束彼此相对,其中m是不小于1且不大于 比n。 第一分光单元(16)和第二分光单元(20)由相同的光学部件形成,并相对于彼此反转。