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    • 1. 发明授权
    • Method for forming patterns
    • 形成图案的方法
    • US4597826A
    • 1986-07-01
    • US686521
    • 1984-12-26
    • Teiji MajimaHiromichi Watanabe
    • Teiji MajimaHiromichi Watanabe
    • H01F41/34H01L21/033C23F1/02B44C1/22C03C15/00C03C25/06
    • H01L21/0337H01F41/34H01L21/0332H01L21/0335H01L21/0338
    • A method is disclosed of forming a fine pattern on a substrate, in which an etching mask pattern is formed on a layer of material of a pattern to be formed, an overlying layer is deposited on the pattern material layer and the mask pattern, and thereafter, the overlying layer and the pattern material layer are etched by ion etching. This method makes it possible, due to the pattern-widening effect caused by the deposition of the overlying layer and by the use of ion etching, to form a pattern having a gap smaller than 0.5 .mu.m or a contiguous-disk pattern having a period of 2 .mu.m or less by photolithography having a 1 .mu.m resolution. It is also possible to form a pattern adapted to enable an easy planing process, by utilizing a difference in etching rates between the mask pattern and the overlying layer. An apparatus used for carrying out the pattern forming method comprises film layer forming means and ion etching means, whereby the overlying layer forming step and the ion etching step can be successively performed by using one and the same apparatus.
    • 公开了在基板上形成精细图案的方法,其中在要形成的图案的材料层上形成蚀刻掩模图案,在图案材料层和掩模图案上沉积上覆层,之后 ,通过离子蚀刻蚀刻上覆层和图案材料层。 该方法可以由于由上覆层的沉积引起的图案加宽效应和通过使用离子蚀刻来形成间隙小于0.5μm的图案或具有间隔的连续盘图案 为2μm或更小,通过具有1μm分辨率的光刻。 也可以通过利用掩模图案和上覆层之间的蚀刻速率的差异来形成适于实现容易的刨削工艺的图案。 用于进行图案形成方法的装置包括膜层形成装置和离子蚀刻装置,由此可以通过使用同一装置连续执行上覆层形成步骤和离子蚀刻步骤。
    • 4. 发明授权
    • Combustion-pressure-data acquisition system of multi-cylinder engine
    • 多缸发动机燃烧压力数据采集系统
    • US07062955B2
    • 2006-06-20
    • US11249110
    • 2005-10-11
    • Hajime KashiwaseHiromichi WatanabeHiroshi Yokoyama
    • Hajime KashiwaseHiromichi WatanabeHiroshi Yokoyama
    • G01M15/00
    • G01L23/222F02D35/023F02D41/28F02D2041/281G01L9/085
    • A combustion-pressure-data acquisition system of a multi-cylinder engine according to the present invention includes an in-cylinder pressure sensor CPS#n for directly detecting combustion pressure in each cylinder; an amplifier unit AP#n to which the in-cylinder pressure sensor CPS#n for each cylinder is connected; and a channel switching unit MUX to which the amplifier unit AP#n for each cylinder is connected. It selects a system to be measured from among a plurality of systems of signals from the amplifier units AP#n with a channel selection signal outputted from an engine-controlling electronic control unit and outputs combustion pressure data to the ECU. Further, it outputs to an amplifier unit AP#n with which measurement ends a reset signal for discharging the electric charge between the in-cylinder pressure sensor CPS#n and the amplifier circuit to efficiently acquire combustion pressure data of each cylinder with a simple structure without complicated processing.
    • 根据本发明的多缸发动机的燃烧压力数据采集系统包括用于直接检测每个气缸中的燃烧压力的缸内压力传感器CPS#n; 每个气缸的缸内压力传感器CPS#n连接的放大器单元AP#n; 以及连接有用于每个气缸的放大器单元AP#n的通道切换单元MUX。 从具有从发动机控制电子控制单元输出的通道选择信号的放大器单元AP#n的多个信号系统中选择要测量的系统,并将燃料压力数据输出到ECU。 此外,它输出到放大器单元AP#n,测量结束用于在缸内压力传感器CPS#n和放大器电路之间排放电荷的复位信号,以便以简单的结构有效地获取每个气缸的燃烧压力数据 没有复杂的处理。
    • 7. 发明授权
    • Combustion pressure data collection system for multi-cylinder engine
    • 多气缸发动机燃烧压力数据采集系统
    • US06915780B2
    • 2005-07-12
    • US10943570
    • 2004-09-17
    • Hajime KashiwaseHiromichi WatanabeHiroshi Yokoyama
    • Hajime KashiwaseHiromichi WatanabeHiroshi Yokoyama
    • G01L19/04F02D35/02F02D45/00G01L23/10G01M15/08F02D7/00
    • G01L23/10F02D35/023F02D41/28F02D2041/281G01M15/08
    • A combustion pressure data collection system for a multi-cylinder engine includes a cylinder pressure sensor, an amplifier unit, and a channel switching unit. The cylinder pressure sensor directly detect a combustion pressure of respective cylinders, the amplifier unit converts a charge signal from the cylinder pressure sensor into voltage signal and have an automatic correction function for automatically correcting a voltage output level so that the level is setted to the same level before and after the cylinder pressure sensor generate a charge, and the amplifier unit of the respective cylinders is connected to the channel switching unit. A channel for actuating to be measured is selected from signals of a plurality of channels supplied from the amplifier units in response to a channel selection signal output from an electronic engine control unit, and combustion pressure data are outputted to the electronic engine control unit from the cylinder of the channel, thereby combustion pressure data can be effectively collected by a simple arrangement without complex processing.
    • 用于多缸发动机的燃烧压力数据收集系统包括气缸压力传感器,放大器单元和通道切换单元。 气缸压力传感器直接检测各个气缸的燃烧压力,放大器单元将来自气缸压力传感器的充电信号转换为电压信号,并具有自动校正功能,用于自动校正电压输出电平,使电平设置为相同 气缸压力传感器之前和之后的电平产生电荷,并且各个气缸的放大器单元连接到通道切换单元。 响应于从电子发动机控制单元输出的通道选择信号,从放大器单元提供的多个通道的信号中选择待测量的通道,并且燃烧压力数据从电子发动机控制单元从 通道的气缸,由此燃烧压力数据可以通过简单的布置有效地收集而不需要复杂的处理。