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1. 发明授权

US06536130B1 Overlay mark for concurrently monitoring alignment accuracy, focus, leveling and astigmatism and method of application thereof 有权
标题翻译：叠加标记，用于同时监测对准精度，对焦，调平和散光及其应用方法
公开(公告)号：US06536130B1
公开(公告)日：2003-03-25
申请号：US09998286
申请日：2001-11-30
申请人： Te-Hung Wu , Jung-Yu Hsieh , Hsiu-Man Chang
发明人： Te-Hung Wu , Jung-Yu Hsieh , Hsiu-Man Chang
IPC分类号： G01B1100
CPC分类号： G03F7/70633 , G03F7/70641 , Y10S414/136
摘要： An overlay mark for concurrently monitoring alignment accuracy, focus, leveling and astigmatism and a method of application thereof are disclosed. The overlay mark comprises four inner bars and four outer bars formed at the corners of exposure areas. The inner bar has a sawtooth area and a bar-shaped area, and the outer bar is a fore-layer etched pattern. Both the inner bars and the outer bars are formed into rectangles, and each bar is one side of a rectangle and none of the sides are connected. The sawtooth areas of the inner bars disposed on opposite sides are located at a same position. The rectangle formed by the outer bars encloses the rectangle formed by the inner bars. During the monitoring process, a testing beam scans across a scan area being divided into two areas, i.e., one being the outer bars and the sawtooth area of the inner bars, and the other one being the outer bars and the bar-shaped area of the inner bars.
摘要翻译：公开了一种用于同时监视对准精度，对焦，调平和散光的重叠标记及其应用方法。覆盖标记包括形成在曝光区域的角部的四个内部条和四个外部条。内侧杆具有锯齿形区域和棒状区域，外侧杆是前层蚀刻图案。内杆和外杆都形成矩形，并且每个杆是矩形的一侧，并且没有一个侧面连接。设置在相对侧的内侧杆的锯齿区域位于相同位置。由外杆形成的矩形包围由内条形成的矩形。在监视过程中，测试光束扫描扫描区域被划分为两个区域，即一个是内部条的外部条和锯齿形区域，另一个是外部条和条形区域内条。

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