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    • 1. 发明授权
    • Switch with increased magnetic sensitivity
    • 切换灵敏度提高
    • US08581679B2
    • 2013-11-12
    • US12713390
    • 2010-02-26
    • Tang MinOlivier Le NeelRavi Shankar
    • Tang MinOlivier Le NeelRavi Shankar
    • H01H51/22H01H57/00
    • H01H1/0036
    • Switches that are actuated through exposure to a magnetic field are described. A mobile element of a switch includes one or more anchoring members that are in electrical contact with one of the conductive portions. The mobile element also has a beam that is attached to the one or more anchoring members. The beam can be attached to the one or more anchoring members by flexures. The beam has an end portion that is configured to move toward the other conductive portion when exposed to an external force, such as a magnetic field. Various configurations of anchoring members may significantly decrease initial upward beam deformation upon manufacture of the mobile element, resulting in an increased sensitivity upon exposure to a magnetic field. Methods for manufacturing switches that exhibit increased sensitivity to magnetic fields are also disclosed.
    • 描述通过暴露于磁场而被致动的开关。 开关的移动元件包括与导电部分之一电接触的一个或多个锚定构件。 移动元件还具有附接到一个或多个锚固构件的梁。 梁可以通过弯曲连接到一个或多个锚固构件。 梁具有端部,其被配置为当暴露于诸如磁场的外力时朝向另一导电部分移动。 锚定构件的各种构造可以在制造移动元件时显着降低初始向上的梁变形,导致暴露于磁场时的灵敏度增加。 还公开了对磁场具有增强的灵敏度的开关的制造方法。
    • 2. 发明申请
    • SWITCH WITH INCREASED MAGNETIC SENSITIVITY
    • 开关具有提高的磁性灵敏度
    • US20110210808A1
    • 2011-09-01
    • US12713390
    • 2010-02-26
    • Tang MinOlivier Le NeelRavi Shankar
    • Tang MinOlivier Le NeelRavi Shankar
    • H01H1/00H01H9/00H01H11/00
    • H01H1/0036
    • Switches that are actuated through exposure to a magnetic field are described. Such switches include conductive portions that are electrically separate from one another when in an open switch configuration. A mobile element of a switch includes one or more anchoring members that are in electrical contact with one of the conductive portions. The mobile element also has a beam that is attached to the one or more anchoring members. The beam can be attached to the one or more anchoring members by flexures. In some cases, the beam includes a plurality of strips. The beam has an end portion that is configured to move toward the other conductive portion when exposed to an external force, such as a magnetic field. When the mobile element electrically contacts the other conductive portion of the substrate, an electrical pathway is established between the conductive portions, giving rise to a closed switch configuration. Various configurations of anchoring members may significantly decrease initial upward beam deformation upon manufacture of the mobile element, resulting in an increased sensitivity upon exposure to a magnetic field. Methods for manufacturing switches that exhibit increased sensitivity to magnetic fields are also disclosed. Switches described can be formed using semiconductor manufacturing techniques. Methods described also include forming a beam that is attached to one or more anchoring members where an end portion of the beam moves in a substantially downward direction upon exposure to a magnetic field of sufficient intensity.
    • 描述通过暴露于磁场而被致动的开关。 这种开关包括当处于开路开关配置时彼此电分离的导电部分。 开关的移动元件包括与导电部分之一电接触的一个或多个锚定构件。 移动元件还具有附接到一个或多个锚固构件的梁。 梁可以通过弯曲连接到一个或多个锚固构件。 在一些情况下,梁包括多个条。 梁具有端部,其被配置为当暴露于诸如磁场的外力时朝向另一导电部分移动。 当移动元件电接触衬底的另一导电部分时,在导电部分之间建立电路径,产生闭合的开关构造。 锚定构件的各种构造可以在制造移动元件时显着降低初始向上的梁变形,导致暴露于磁场时的灵敏度增加。 还公开了对磁场具有增强的灵敏度的开关的制造方法。 所描述的开关可以使用半导体制造技术形成。 所描述的方法还包括形成连接到一个或多个锚固构件的梁,其中梁的端部在暴露于足够强度的磁场时沿基本上向下的方向移动。
    • 3. 发明授权
    • Microsensor with integrated temperature control
    • 具有集成温度控制的微传感器
    • US09448198B2
    • 2016-09-20
    • US13176599
    • 2011-07-05
    • Olivier Le NeelSuman CherianRavi Shankar
    • Olivier Le NeelSuman CherianRavi Shankar
    • G01K1/00G01K13/00G01K17/00G01N25/00G01N27/327G01N33/49
    • G01N27/3272G01N33/49
    • Microsensors that include an integrated thermal energy source and an integrated temperature sensor are capable of providing localized heating and temperature control of individual sensing regions within the microsensor. Localized temperature control allows analyte detection to be carried out at the same temperatures or substantially the same temperatures at which the sensor is calibrated. By carrying out the sensing near the calibration temperature, more accurate results can be obtained. In addition, the temperature of the sensing region can be controlled so that chemical reactions involving the analyte in the sensing region occur near their peak reaction rate. Carrying out the sensing near the peak reaction rate improves the sensitivity of the sensor which is important as sensor dimensions decrease and the magnitude of the generated signals decreases.
    • 包括集成热能源和集成温度传感器的微型传感器能够提供微传感器内各个感测区域的局部加热和温度控制。 局部温度控制允许分析物检测在相同的温度或基本相同的温度下进行,在此温度下传感器被校准。 通过在校准温度附近进行感测,可以获得更准确的结果。 此外,可以控制感测区域的温度,使得涉及感测区域中的分析物的化学反应在峰值反应速率附近发生。 在峰值反应速率附近进行感测提高了传感器的灵敏度,这在传感器尺寸减小并且产生的信号的幅度减小时是重要的。
    • 5. 发明申请
    • DEVICE AND METHOD FOR TESTING MAGNETIC SWITCHES AT WAFER-LEVEL STAGE OF MANUFACTURE
    • 用于在制造水平阶段测试磁性开关的装置和方法
    • US20110156712A1
    • 2011-06-30
    • US12650257
    • 2009-12-30
    • Ravi ShankarOlivier Le Neel
    • Ravi ShankarOlivier Le Neel
    • G01R31/327G01R33/12
    • G01R1/07378G01R1/07342G01R31/31702G01R31/318511G01R31/3278
    • A testing mechanism for testing magnetically operated microelectromechanical system (MEMS) switches at a wafer level stage of manufacture includes an electromagnetic fixture configured to be received in a standard probe ring. The electromagnetic fixture is rotatable, relative to the probe ring, to permit adjustment of orientation of a generated magnetic field relative to the MEMS devices of a subject wafer. The testing mechanism also includes a probe card with probes positioned to contact test pads on the subject wafer. During operation, the probe card is positioned over the wafer to be tested, with the test probes in electrical contact with respective contact pads of the wafer, and the electromagnetic fixture is positioned above the probe card. An electrical potential is applied across the switches on the subject wafer, and the electromagnetic fixture is energized at selected levels of power and duration. Current flow across each switch is measured to determine one or more of: open circuit contact resistance, closed circuit contact resistance, response time, response to switching magnetic field, frequency response, current capacity, critical dimensions, critical angles of magnetic field orientation, etc. Wafer level testing enables rejection of non-compliant switches before the cutting and packaging levels of manufacture.
    • 用于在晶片级制造阶段测试磁操作微机电系统(MEMS)开关的测试机构包括被配置为接收在标准探针环中的电磁夹具。 电磁夹具相对于探针环可旋转,以允许相对于目标晶片的MEMS器件调整产生的磁场的取向。 测试机构还包括具有探针的探针卡,所述探针被定位成接触主体晶片上的测试焊盘。 在操作期间,探针卡位于要测试的晶片上,测试探针与晶片的相应接触焊盘电接触,并且电磁夹具位于探针卡上方。 在主体晶片上的开关上施加电势,并且电磁夹具以选定的功率和持续时间被激励。 测量每个开关上的电流,以确定以下一个或多个:开路接触电阻,闭路接触电阻,响应时间,对开关磁场的响应,频率响应,电流容量,临界尺寸,磁场定向的临界角等 晶圆级测试在切割和封装制造水平之前能够拒绝不符合标准的开关。
    • 7. 发明授权
    • Device and method for testing magnetic switches at wafer-level stage of manufacture
    • 在晶圆级制造阶段测试磁性开关的装置和方法
    • US08451016B2
    • 2013-05-28
    • US12650257
    • 2009-12-30
    • Ravi ShankarOlivier Le Neel
    • Ravi ShankarOlivier Le Neel
    • G01R31/20G01R31/00G01R1/073
    • G01R1/07378G01R1/07342G01R31/31702G01R31/318511G01R31/3278
    • A testing mechanism for testing magnetically operated microelectromechanical system (MEMS) switches at a wafer level stage of manufacture includes an electromagnetic fixture configured to be received in a standard probe ring. The electromagnetic fixture is rotatable, relative to the probe ring, to permit adjustment of orientation of a generated magnetic field relative to the MEMS devices of a subject wafer. The testing mechanism also includes a probe card with probes positioned to contact test pads on the subject wafer. During operation, the probe card is positioned over the wafer to be tested, with the test probes in electrical contact with respective contact pads of the wafer, and the electromagnetic fixture is positioned above the probe card. An electrical potential is applied across the switches on the subject wafer, and the electromagnetic fixture is energized at selected levels of power and duration. Current flow across each switch is measured to determine one or more of: open circuit contact resistance, closed circuit contact resistance, response time, response to switching magnetic field, frequency response, current capacity, critical dimensions, critical angles of magnetic field orientation, etc. Wafer level testing enables rejection of non-compliant switches before the cutting and packaging levels of manufacture.
    • 用于在晶片级制造阶段测试磁操作微机电系统(MEMS)开关的测试机构包括被配置为接收在标准探针环中的电磁夹具。 电磁夹具相对于探针环可旋转,以允许相对于目标晶片的MEMS器件调整产生的磁场的取向。 测试机构还包括具有探针的探针卡,所述探针被定位成接触主体晶片上的测试焊盘。 在操作期间,探针卡位于要测试的晶片上,测试探针与晶片的相应接触焊盘电接触,并且电磁夹具位于探针卡上方。 在主体晶片上的开关上施加电势,并且电磁夹具以选定的功率和持续时间被激励。 测量每个开关上的电流,以确定以下一个或多个:开路接触电阻,闭路接触电阻,响应时间,对开关磁场的响应,频率响应,电流容量,临界尺寸,磁场定向的临界角等 晶圆级别测试在切割和封装制造水平之前能够拒绝不符合标准的开关。
    • 10. 发明授权
    • Temperature switch with resistive sensor
    • 温度开关带电阻式传感器
    • US08598681B2
    • 2013-12-03
    • US13341286
    • 2011-12-30
    • Olivier Le NeelRavi Shankar
    • Olivier Le NeelRavi Shankar
    • H01L29/00H01L21/20
    • G01K7/20G01K3/005
    • The present disclosure is directed to a device and a method for forming a precision temperature sensor switch with a Wheatstone bridge configuration of four resistors and a comparator. When the temperature sensor detects a temperature above a threshold, the switch will change states. The four resistors in the Wheatstone bridge have the same resistance, with three of the resistors having a low temperature coefficient of resistance and the fourth resistor having a high temperature coefficient of resistance. As the temperature increases, the resistance of the fourth resistor will change. The change in resistance of the fourth resistor will change a voltage across the bridge. The voltage across the bridge is coupled to the comparator and compares the voltage with the threshold temperature, such that when the threshold temperature is exceeded, the comparator switches the output off.
    • 本公开涉及用于形成具有四个电阻器和比较器的惠斯登电桥配置的精密温度传感器开关的装置和方法。 当温度传感器检测到温度高于阈值时,开关将改变状态。 惠斯通电桥中的四个电阻具有相同的电阻,其中三个电阻具有低的电阻温度系数,第四电阻具有高的电阻温度系数。 随着温度的升高,第四个电阻的电阻将发生变化。 第四个电阻器的电阻变化会改变跨桥的电压。 桥上的电压耦合到比较器并将电压与阈值温度进行比较,使得当超过阈值温度时,比较器关闭输出。