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    • 1. 发明申请
    • METHOD FOR MANUFACTURING INTEGRATED CIRCUIT
    • 制造集成电路的方法
    • US20100317156A1
    • 2010-12-16
    • US12859878
    • 2010-08-20
    • Takuya TSURUMEJunya MARUYAMAYoshitaka DOZEN
    • Takuya TSURUMEJunya MARUYAMAYoshitaka DOZEN
    • H01L21/50
    • H01L27/1266H01L21/76251H01L27/1214H05K3/20
    • A method for separating an integrated circuit formed by a thin film having a novel structure or a method for transferring the integrated circuit to another substrate, that is, so-called transposing method, has not been proposed. According to the present invention, in the case that an integrated circuit having a thin film having a novel structure formed over a substrate via a release layer is separated, the release layer is removed in the state that the thin film integrated circuit is fixated, the thin film integrated circuit is transposed to a supporting substrate having an adhesion surface, and the thin film integrated circuit is transposed to another substrate having an adhesion surface with higher strength of adhesion than that of the supporting substrate.
    • 用于将由具有新颖结构的薄膜形成的集成电路分离的方法或将集成电路转移到另一基板的方法,即所谓的转置方法尚未提出。 根据本发明,在通过剥离层在基板上形成具有新颖结构的薄膜的集成电路被分离的情况下,在薄膜集成电路固定的状态下去除剥离层, 薄膜集成电路被转置到具有粘合表面的支撑基板上,并且薄膜集成电路被转置到具有比支撑基板的粘合强度更高的粘附表面的另一基板。
    • 2. 发明申请
    • WIRELESS CHIP AND MANUFACTURING METHOD THEREOF
    • 无线芯片及其制造方法
    • US20120322212A1
    • 2012-12-20
    • US13596376
    • 2012-08-28
    • Koji DAIRIKIJunya MARUYAMATomoko TAMURAEiji SUGIYAMAYoshitaka DOZEN
    • Koji DAIRIKIJunya MARUYAMATomoko TAMURAEiji SUGIYAMAYoshitaka DOZEN
    • H01L21/56
    • H01L27/1255H01L29/78621H01L29/78627H01L29/78648
    • It is an object of the present invention to reduce the cost of a wireless chip, further, to reduce the cost of a wireless chip by enabling the mass production of a wireless chip, and furthermore, to provide a downsized and lightweight wireless chip. A wireless chip in which a thin film integrated circuit peeled from a glass substrate or a quartz substrate is formed between a first base material and a second base material is provided according to the invention. As compared with a wireless chip formed from a silicon substrate, the wireless chip according to the invention realizes downsizing, thinness, and lightweight. The thin film integrated circuit included in the wireless chip according to the invention at least has an n-type thin film transistor having an LDD (Lightly Doped Drain) structure, a p-type thin film transistor having a single drain structure, and a conductive layer functioning as an antenna.
    • 本发明的目的在于降低无线芯片的成本,并且通过实现无线芯片的批量生产,进一步降低无线芯片的成本,此外,提供小型化,轻量化的无线芯片。 根据本发明,提供一种其中从玻璃基板或石英基板剥离的薄膜集成电路形成在第一基材和第二基材之间的无线芯片。 与由硅基板形成的无线芯片相比,根据本发明的无线芯片实现了小型化,薄型化和轻量化。 包括在根据本发明的无线芯片中的薄膜集成电路至少具有具有LDD(轻掺杂漏极)结构的n型薄膜晶体管,具有单个漏极结构的p型薄膜晶体管和导电 层作为天线起作用。