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1. 发明授权

US4511821A Support structure for piezoelectric vibrator 失效
标题翻译：压电振子的支撑结构
公开(公告)号：US4511821A
公开(公告)日：1985-04-16
申请号：US548869
申请日：1983-11-04
申请人： Takeshi Nakamura , Hiroshi Nishiyama , Satoshi Matsuda , Ikuo Matsumoto
发明人： Takeshi Nakamura , Hiroshi Nishiyama , Satoshi Matsuda , Ikuo Matsumoto
IPC分类号： H03H9/17 , H03H9/05 , H01L41/08
CPC分类号： H03H9/1035 , H03H9/0595
摘要： A support structure for a vibrator comprising a casing having two sets of conical projections formed therein so as to confront each other, and a support framework supporting the vibrator at nodes of vibration thereof. The vibrator is supported within the casing with the support framework sandwiched between the tips of the respective projections of those two sets at the associated nodes of vibration of the support structure.
摘要翻译：一种用于振动器的支撑结构，包括：壳体，其具有形成在其中的两组锥形突起，以便彼此面对;以及支撑框架，其在振动节点处支撑振动器。振动器支撑在壳体内，其中支撑框架夹在支撑结构的振动的相关节点处的两组的各个突起的尖端之间。

2. 发明授权

US4469975A Piezoelectric vibrator device including vibrator element and frame of unitary construction 失效
标题翻译：压电振子器件包括振动元件和单一结构框架
公开(公告)号：US4469975A
公开(公告)日：1984-09-04
申请号：US456309
申请日：1983-01-06
申请人： Takeshi Nakamura , Hiroshi Nishiyama
发明人： Takeshi Nakamura , Hiroshi Nishiyama
IPC分类号： H03H9/02 , H01L27/20 , H03B5/32 , H03H9/05 , H03H9/24 , H01L41/18
CPC分类号： H03H9/0542 , H01L27/20 , H03H9/0595 , H03B5/32
摘要： A piezoelectric vibrating device comprises a vibrating element supported by a support frame through at least two arms with the support frame surrounding the vibrating element. The vibrating element, the support frame and the support arms are of one-piece construction fabricated from a sheet of temperature-stable metal of constant elasticity. A ZnO layer is formed so as to overlay the vibrating element and also a portion of the support frame, and electrodes are formed so as to overlay a part of the ZnO layer on the vibrating element and another part of the ZnO layer on the support frame, respectively. One of the electrodes on the other part of the ZnO layer cooperates with the metal of constant elasticity to define a static capacitance with the ZnO layer serving as a dielectric body. An aluminum layer is interposed between the ZnO layer and the vibrating element.
摘要翻译：压电振动装置包括由支撑框架支撑的振动元件，所述振动元件通过支撑框架围绕振动元件的至少两个臂支撑。振动元件，支撑框架和支撑臂是由具有恒定弹性的温度稳定的金属片制成的一体式结构。形成ZnO层以覆盖振动元件和支撑框架的一部分，并且形成电极以将ZnO层的一部分覆盖在振动元件上，并且在支撑框架上覆盖ZnO层的另一部分，分别。 ZnO层另一部分的电极之一与恒定弹性金属配合，以确定ZnO层用作电介体的静态电容。在ZnO层和振动元件之间插入铝层。

3. 发明授权

US4445066A Electrode structure for a zinc oxide thin film transducer 失效
标题翻译：氧化锌薄膜换能器的电极结构
公开(公告)号：US4445066A
公开(公告)日：1984-04-24
申请号：US509028
申请日：1983-06-29
申请人： Hiroshi Nishiyama , Takeshi Nakamura
发明人： Hiroshi Nishiyama , Takeshi Nakamura
IPC分类号： H01L41/047 , H01L41/22 , H03H9/13 , H03H9/21 , H01L41/08
CPC分类号： H03H9/21 , H01L41/0478 , H03H9/131
摘要： An Al electrode structure for a zinc oxide thin film in which an intermediate layer of V.sub.2 O.sub.3, Ta, V, Cu, Ni or Ti is provided between the surface of the zinc oxide thin film and the Al electrode. A tuning fork vibrator equipped with such an electrode structure has high reliability in that changes in resonance frequency and series resonance resistance (Ro) with time are small.
摘要翻译：在氧化锌薄膜的表面和Al电极之间设置有氧化锌薄膜的Al电极结构体，其中设置有V 2 O 3，Ta，V，Cu，Ni或Ti的中间层。配备有这种电极结构的音叉振动器具有高的可靠性，因为谐振频率和串联谐振电阻（Ro）随时间的变化很小。

4. 发明授权

US4037121A Piezoelectrically driven tuning fork with harmonic suppression 失效
标题翻译：具有谐波抑制的压电驱动音叉
公开(公告)号：US4037121A
公开(公告)日：1977-07-19
申请号：US670955
申请日：1976-03-26
申请人： Takeshi Nakamura , Hiroshi Nishiyama
发明人： Takeshi Nakamura , Hiroshi Nishiyama
IPC分类号： H03H9/24 , H01L41/04
CPC分类号： H03H9/24
摘要： An electrically driven tuning fork of the piezoelectric type, electromagnetic type or the like for use in electrical and electronic equipment which includes a tuning fork vibrator and electrical elements for driving the tuning fork vibrator. The two-pronged tuning fork vibrator has a pair of rectangular projections integrally formed with the prongs on corresponding side edges of the said prongs at one side of the tuning fork, excepting opposite end portions of the prongs adjacent to the node and in same embodiments, both the mode and antinode of the fundamental harmonic oscillation of the tuning fork for suppressing undesirable oscillation other than the fundamental harmonic oscillation of the tuning fork. Electrical elements are affixed onto the outer or inner surfaces of the prongs.
摘要翻译：用于电气和电子设备的压电类型，电磁型等的电驱动音叉，其包括音叉振动器和用于驱动音叉振动器的电气元件。双管齐音叉式振动器具有一对矩形突起，与音叉的一侧的所述插脚的对应侧边缘上的插脚一体形成，除了与节点相邻的插脚的相对端部，并且在同一实施例中，用于抑制音叉的基本谐波振荡以外的不期望的振荡的音叉的基本谐波振荡的模式和波腹。电气元件固定在插脚的外表面或内表面上。

5. 发明授权

US4318796A Sputtering apparatus 失效
标题翻译：溅射装置
公开(公告)号：US4318796A
公开(公告)日：1982-03-09
申请号：US169027
申请日：1980-07-15
申请人： Hiroshi Nishiyama , Suehiro Kato , Takeshi Nakamura
发明人： Hiroshi Nishiyama , Suehiro Kato , Takeshi Nakamura
IPC分类号： C23C14/34 , C23C15/00
CPC分类号： C23C14/3407
摘要： There is disclosed a sputtering apparatus for the deposition of thin films of a material other than metals on substrates, comprising a pair of opposed electrodes one of which is adapted to mount a substrate, wherein a target of a material other than metals, from which thin-film-forming atoms are ejected by ion-bombardment during sputtering, is mounted on the other electrode, said target comprising at least two target members stacked on one another.This target installation prevents thin films of a material other than metals from contamination resulting from breakage of the target which in turn results from an increase of the film-forming rate or physical properties of the target material.
摘要翻译：公开了一种用于在衬底上沉积金属以外的材料的薄膜的溅射装置，包括一对相对的电极，其中一个相对的电极适于安装衬底，其中除了金属之外的材料的靶在溅射期间通过离子轰击喷射成膜原子，安装在另一个电极上，所述目标包括彼此堆叠的至少两个目标构件。该目标装置防止由金属破裂导致的金属以外的材料的薄膜，这又导致目标材料的成膜速率或物理性质的增加。

6. 发明授权

US4309266A Magnetron sputtering apparatus 失效
标题翻译：磁控溅射装置
公开(公告)号：US4309266A
公开(公告)日：1982-01-05
申请号：US170154
申请日：1980-07-18
申请人： Takeshi Nakamura , Suehiro Kato , Hiroshi Nishiyama
发明人： Takeshi Nakamura , Suehiro Kato , Hiroshi Nishiyama
IPC分类号： H01J37/34 , C23C15/00
CPC分类号： H01J37/3455 , H01J37/3408
摘要： A magnetron sputtering apparatus for producing thin films, which comprises at least two spaced apart opposing electrodes, one of the electrodes having a space therein and being used for mounting a target thereon, from which film-forming atoms are ejected by ion-bombardment, the other electrode being used for mounting a substrate thereon, and a magnet arranged in the space of the target mounting electrode, characterized in that the magnet is mounted on a means for adjusting the distance between the target and the magnet, the means for adjusting said distance being provided in the one electrode on which the target is mounted.The magnetron sputtering apparatus of the present invention enables one to adjust the magnetic flux density at the surface of the target by the adjustment of the distance between the target and the magnet, thus making it possible to produce thin films with uniform characteristics, even if the sputtering is repeated many times without exchange of the target.
摘要翻译：一种用于制造薄膜的磁控溅射装置，其包括至少两个间隔开的相对电极，其中一个电极在其中具有空间并用于安装其上的目标，通过离子轰击喷射成膜原子，用于在其上安装基板的其他电极和布置在目标安装电极的空间中的磁体，其特征在于，所述磁体安装在用于调节所述目标和所述磁体之间的距离的装置上，所述用于调节所述距离的装置设置在安装有目标物的一个电极中。本发明的磁控管溅射装置能够通过调整靶和磁体之间的距离来调整靶的表面的磁通密度，从而可以制造均匀的特性的薄膜，即使溅射重复多次而不交换目标。

7. 发明授权

US4472654A Piezoelectric tuning fork vibrator with reduced vibrational leakage 失效
标题翻译：压电音叉振动器减少振动泄漏
公开(公告)号：US4472654A
公开(公告)日：1984-09-18
申请号：US506194
申请日：1983-06-20
申请人： Takeshi Nakamura , Hiroshi Nishiyama , Satoshi Matsuda , Tsutomu Okada
发明人： Takeshi Nakamura , Hiroshi Nishiyama , Satoshi Matsuda , Tsutomu Okada
IPC分类号： H03H9/24 , H03H9/21 , H01L41/08
CPC分类号： H03H9/21
摘要： A piezoelectric tuning fork vibrator used as an oscillator or a detection element in various electronic circuits, which is provided at a vibrator body with a slit to form tuning fork legs at both sides, one leg at the vibrator having at the outside surface a piezoelectric thin film and an electrode thereon, so that the one leg including the piezoelectric thin film and electrode, is made equal in width to the other leg.Hence, the both side tuning fork legs equal in width become equal in the resonance frequency and avoids leakage of vibration energy, whereby this piezoelectric vibrator is free from characteristic variation and has a high accuracy.
摘要翻译：一种用作各种电子电路中的振荡器或检测元件的压电音叉振子，其设置在具有狭缝的振动体上，以在两侧形成音叉腿，所述振动器的一个腿在外表面具有压电薄片膜和电极，使得包括压电薄膜和电极的一条腿的宽度与另一条腿相等。因此，宽度相等的双方音叉在共振频率上变得相等，避免了振动能量的泄漏，由此该压电振动器没有特征变化并且具有高精度。

8. 发明授权

US6158281A Vibration gyroscope 失效
标题翻译：振动陀螺仪
公开(公告)号：US6158281A
公开(公告)日：2000-12-12
申请号：US728847
申请日：1996-10-10
申请人： Kazuhiro Ebara , Katsumi Fujimoto , Hiroshi Nishiyama , Takeshi Nakamura
发明人： Kazuhiro Ebara , Katsumi Fujimoto , Hiroshi Nishiyama , Takeshi Nakamura
IPC分类号： G01C19/56 , G01C19/5649 , G01P9/04
CPC分类号： G01C19/5649
摘要： A vibration gyroscope 10 includes a vibrator 12. The vibrator 12 has a vibration member 14 formed in a regular triangular prism shape. On side faces of the vibration member 14, piezoelectric elements 16a, 16b and 16c are formed. Two of the piezoelectric elements 16a and 16b are connected to resistors 26 and 28, respectively. Between the other feedback piezoelectric element 16c and these resistors, an oscillation circuit 30 is connected. A signal having a phase opposite to that of the signal output from the feedback piezoelectric element 16c is input to the vibration member 14 serving as a grounding terminal by a phase inverter 34. The signals output from the two piezoelectric elements 16a and 16b are input to a differential circuit 36. The differential circuit 36 is connected to a synchronous detection circuit 38 and connected to a smoothing circuit 40 and a DC amplifier 42 in series.
摘要翻译：振动陀螺仪10包括振动器12.振动器12具有以正三角形棱柱形状形成的振动部件14。在振动部件14的侧面形成压电元件16a，16b，16c。两个压电元件16a和16b分别连接到电阻器26和28。在另一反馈压电元件16c与这些电阻之间，连接振荡电路30。具有与从反馈压电元件16c输出的信号相反的相位的信号通过相位逆变器34输入到用作接地端子的振动部件14.由两个压电元件16a和16b输出的信号被输入到差分电路36.差分电路36连接到同步检测电路38并串联连接到平滑电路40和DC放大器42。

9. 发明授权

US4697116A Piezoelectric vibrator 失效
标题翻译：压电振子
公开(公告)号：US4697116A
公开(公告)日：1987-09-29
申请号：US456307
申请日：1983-01-06
申请人： Takeshi Nakamura , Hiroshi Nishiyama , Ikuo Matsumoto
发明人： Takeshi Nakamura , Hiroshi Nishiyama , Ikuo Matsumoto
IPC分类号： G10G7/02 , H03H9/24 , H01L41/08
CPC分类号： H03H9/24 , G10G7/02
摘要： A piezoelectric vibrator comprises a mechanical vibrating member having, an aluminum layer formed on a surface of the vibrating member, and a piezoelectric transducer overlaying the aluminum layer.
摘要翻译：一种压电振动器，包括具有形成在所述振动部件的表面上的铝层和覆盖所述铝层的压电传感器的机械振动部件。

10. 发明授权

US4433264A Electrode structure for a zinc oxide thin film 失效
标题翻译：氧化锌薄膜的电极结构
公开(公告)号：US4433264A
公开(公告)日：1984-02-21
申请号：US500828
申请日：1983-06-03
申请人： Hiroshi Nishiyama , Takeshi Nakamura
发明人： Hiroshi Nishiyama , Takeshi Nakamura
IPC分类号： H03H9/17 , H03H9/125 , H03H9/13 , H03H9/21 , H01L41/08
CPC分类号： H03H9/21 , H01L41/29 , H03H9/131
摘要： An electrode structure for a zinc oxide thin film having a SnO.sub.2 layer between the surface of the zinc oxide thin film and the electrode. A tuning fork vibrator equipped with such a structure has a high reliability in that changes in resonance frequency and insulation resistance (IR) with time are small and the increase in series resonance resistance (R.sub.O) is small.
摘要翻译：一种在氧化锌薄膜的表面和电极之间具有SnO 2层的氧化锌薄膜的电极结构。具有这种结构的音叉振子具有高的可靠性，因为谐振频率和绝缘电阻（IR）随时间的变化小，并且串联谐振电阻（RO）的增加很小。

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